9/7/2011	12:00:04 AM	Recipe started at 11:59 PM
9/7/2011	12:00:04 AM	Helium valve closed
9/7/2011	12:00:04 AM	H2 valve closed
9/7/2011	12:00:04 AM	BCl3 valve closed
9/7/2011	12:00:04 AM	PH3 valve closed
9/7/2011	12:00:04 AM	SiCl4 pre valve closed
9/7/2011	12:00:04 AM	SiCl4 post valve closed
9/7/2011	12:00:04 AM	Bypass valve closed
9/7/2011	12:00:04 AM	Bubbler valve closed
9/7/2011	12:00:04 AM	Main Vac valve opened
9/7/2011	12:00:04 AM	Helium MFC set to  0.000000
9/7/2011	12:00:04 AM	H2 MFC set to  0.000000
9/7/2011	12:00:04 AM	BCl3 MFC set to  0.000000
9/7/2011	12:00:04 AM	PHl3 MFC set to  0.000000
9/7/2011	12:00:04 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:00:04 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:00:04 AM	Tube furnace set to 150
9/7/2011	12:00:34 AM	H2 valve closed
9/7/2011	12:00:34 AM	BCl3 valve closed
9/7/2011	12:00:34 AM	PH3 valve closed
9/7/2011	12:00:34 AM	SiCl4 pre valve closed
9/7/2011	12:00:34 AM	SiCl4 post valve closed
9/7/2011	12:00:34 AM	Bypass valve closed
9/7/2011	12:00:34 AM	Bubbler valve closed
9/7/2011	12:00:34 AM	Helium valve opened
9/7/2011	12:00:34 AM	Main Vac valve opened
9/7/2011	12:00:34 AM	Helium MFC set to  20.000000
9/7/2011	12:00:34 AM	H2 MFC set to  0.000000
9/7/2011	12:00:34 AM	BCl3 MFC set to  0.000000
9/7/2011	12:00:34 AM	PHl3 MFC set to  0.000000
9/7/2011	12:00:34 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:00:34 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:00:34 AM	Tube furnace set to 150
9/7/2011	12:01:04 AM	Helium valve closed
9/7/2011	12:01:04 AM	H2 valve closed
9/7/2011	12:01:04 AM	BCl3 valve closed
9/7/2011	12:01:04 AM	PH3 valve closed
9/7/2011	12:01:04 AM	SiCl4 pre valve closed
9/7/2011	12:01:04 AM	SiCl4 post valve closed
9/7/2011	12:01:04 AM	Bypass valve closed
9/7/2011	12:01:04 AM	Bubbler valve closed
9/7/2011	12:01:04 AM	Main Vac valve opened
9/7/2011	12:01:04 AM	Helium MFC set to  0.000000
9/7/2011	12:01:04 AM	H2 MFC set to  0.000000
9/7/2011	12:01:04 AM	BCl3 MFC set to  0.000000
9/7/2011	12:01:04 AM	PHl3 MFC set to  0.000000
9/7/2011	12:01:04 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:01:04 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:01:05 AM	Tube furnace set to 150
9/7/2011	12:01:35 AM	H2 valve closed
9/7/2011	12:01:35 AM	BCl3 valve closed
9/7/2011	12:01:35 AM	PH3 valve closed
9/7/2011	12:01:35 AM	SiCl4 pre valve closed
9/7/2011	12:01:35 AM	SiCl4 post valve closed
9/7/2011	12:01:35 AM	Bypass valve closed
9/7/2011	12:01:35 AM	Bubbler valve closed
9/7/2011	12:01:35 AM	Helium valve opened
9/7/2011	12:01:35 AM	Main Vac valve opened
9/7/2011	12:01:35 AM	Helium MFC set to  20.000000
9/7/2011	12:01:35 AM	H2 MFC set to  0.000000
9/7/2011	12:01:35 AM	BCl3 MFC set to  0.000000
9/7/2011	12:01:35 AM	PHl3 MFC set to  0.000000
9/7/2011	12:01:35 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:01:35 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:01:35 AM	Tube furnace set to 150
9/7/2011	12:02:05 AM	Helium valve closed
9/7/2011	12:02:05 AM	H2 valve closed
9/7/2011	12:02:05 AM	BCl3 valve closed
9/7/2011	12:02:05 AM	PH3 valve closed
9/7/2011	12:02:05 AM	SiCl4 pre valve closed
9/7/2011	12:02:05 AM	SiCl4 post valve closed
9/7/2011	12:02:05 AM	Bypass valve closed
9/7/2011	12:02:05 AM	Bubbler valve closed
9/7/2011	12:02:05 AM	Main Vac valve opened
9/7/2011	12:02:05 AM	Helium MFC set to  0.000000
9/7/2011	12:02:05 AM	H2 MFC set to  0.000000
9/7/2011	12:02:05 AM	BCl3 MFC set to  0.000000
9/7/2011	12:02:05 AM	PHl3 MFC set to  0.000000
9/7/2011	12:02:05 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:02:05 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:02:05 AM	Tube furnace set to 150
9/7/2011	12:02:35 AM	H2 valve closed
9/7/2011	12:02:35 AM	BCl3 valve closed
9/7/2011	12:02:35 AM	PH3 valve closed
9/7/2011	12:02:35 AM	SiCl4 pre valve closed
9/7/2011	12:02:35 AM	SiCl4 post valve closed
9/7/2011	12:02:35 AM	Bypass valve closed
9/7/2011	12:02:35 AM	Bubbler valve closed
9/7/2011	12:02:35 AM	Helium valve opened
9/7/2011	12:02:35 AM	Main Vac valve opened
9/7/2011	12:02:35 AM	Helium MFC set to  20.000000
9/7/2011	12:02:35 AM	H2 MFC set to  0.000000
9/7/2011	12:02:35 AM	BCl3 MFC set to  0.000000
9/7/2011	12:02:35 AM	PHl3 MFC set to  0.000000
9/7/2011	12:02:35 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:02:35 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:02:35 AM	Tube furnace set to 150
9/7/2011	12:03:05 AM	Helium valve closed
9/7/2011	12:03:05 AM	H2 valve closed
9/7/2011	12:03:05 AM	BCl3 valve closed
9/7/2011	12:03:05 AM	PH3 valve closed
9/7/2011	12:03:05 AM	SiCl4 pre valve closed
9/7/2011	12:03:05 AM	SiCl4 post valve closed
9/7/2011	12:03:05 AM	Bypass valve closed
9/7/2011	12:03:05 AM	Bubbler valve closed
9/7/2011	12:03:05 AM	Main Vac valve opened
9/7/2011	12:03:05 AM	Helium MFC set to  0.000000
9/7/2011	12:03:05 AM	H2 MFC set to  0.000000
9/7/2011	12:03:05 AM	BCl3 MFC set to  0.000000
9/7/2011	12:03:05 AM	PHl3 MFC set to  0.000000
9/7/2011	12:03:05 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:03:05 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:03:05 AM	Tube furnace set to 150
9/7/2011	12:03:35 AM	H2 valve closed
9/7/2011	12:03:35 AM	BCl3 valve closed
9/7/2011	12:03:35 AM	PH3 valve closed
9/7/2011	12:03:35 AM	SiCl4 pre valve closed
9/7/2011	12:03:35 AM	SiCl4 post valve closed
9/7/2011	12:03:35 AM	Bypass valve closed
9/7/2011	12:03:35 AM	Bubbler valve closed
9/7/2011	12:03:35 AM	Helium valve opened
9/7/2011	12:03:35 AM	Main Vac valve opened
9/7/2011	12:03:35 AM	Helium MFC set to  20.000000
9/7/2011	12:03:35 AM	H2 MFC set to  0.000000
9/7/2011	12:03:35 AM	BCl3 MFC set to  0.000000
9/7/2011	12:03:35 AM	PHl3 MFC set to  0.000000
9/7/2011	12:03:35 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:03:35 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:03:36 AM	Tube furnace set to 150
9/7/2011	12:04:06 AM	Helium valve closed
9/7/2011	12:04:06 AM	H2 valve closed
9/7/2011	12:04:06 AM	BCl3 valve closed
9/7/2011	12:04:06 AM	PH3 valve closed
9/7/2011	12:04:06 AM	SiCl4 pre valve closed
9/7/2011	12:04:06 AM	SiCl4 post valve closed
9/7/2011	12:04:06 AM	Bypass valve closed
9/7/2011	12:04:06 AM	Bubbler valve closed
9/7/2011	12:04:06 AM	Main Vac valve opened
9/7/2011	12:04:06 AM	Helium MFC set to  0.000000
9/7/2011	12:04:06 AM	H2 MFC set to  0.000000
9/7/2011	12:04:06 AM	BCl3 MFC set to  0.000000
9/7/2011	12:04:06 AM	PHl3 MFC set to  0.000000
9/7/2011	12:04:06 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:04:06 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:04:06 AM	Tube furnace set to 150
9/7/2011	12:04:36 AM	H2 valve closed
9/7/2011	12:04:36 AM	BCl3 valve closed
9/7/2011	12:04:36 AM	PH3 valve closed
9/7/2011	12:04:36 AM	SiCl4 pre valve closed
9/7/2011	12:04:36 AM	SiCl4 post valve closed
9/7/2011	12:04:36 AM	Bypass valve closed
9/7/2011	12:04:36 AM	Bubbler valve closed
9/7/2011	12:04:36 AM	Helium valve opened
9/7/2011	12:04:36 AM	Main Vac valve opened
9/7/2011	12:04:36 AM	Helium MFC set to  20.000000
9/7/2011	12:04:36 AM	H2 MFC set to  0.000000
9/7/2011	12:04:36 AM	BCl3 MFC set to  0.000000
9/7/2011	12:04:36 AM	PHl3 MFC set to  0.000000
9/7/2011	12:04:36 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:04:36 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:04:36 AM	Tube furnace set to 150
9/7/2011	12:05:06 AM	Helium valve closed
9/7/2011	12:05:06 AM	H2 valve closed
9/7/2011	12:05:06 AM	BCl3 valve closed
9/7/2011	12:05:06 AM	PH3 valve closed
9/7/2011	12:05:06 AM	SiCl4 pre valve closed
9/7/2011	12:05:06 AM	SiCl4 post valve closed
9/7/2011	12:05:06 AM	Bypass valve closed
9/7/2011	12:05:06 AM	Bubbler valve closed
9/7/2011	12:05:06 AM	Main Vac valve opened
9/7/2011	12:05:06 AM	Helium MFC set to  0.000000
9/7/2011	12:05:06 AM	H2 MFC set to  0.000000
9/7/2011	12:05:06 AM	BCl3 MFC set to  0.000000
9/7/2011	12:05:06 AM	PHl3 MFC set to  0.000000
9/7/2011	12:05:06 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:05:06 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:05:06 AM	Tube furnace set to 150
9/7/2011	12:05:36 AM	H2 valve closed
9/7/2011	12:05:36 AM	BCl3 valve closed
9/7/2011	12:05:36 AM	PH3 valve closed
9/7/2011	12:05:36 AM	SiCl4 pre valve closed
9/7/2011	12:05:36 AM	SiCl4 post valve closed
9/7/2011	12:05:36 AM	Bypass valve closed
9/7/2011	12:05:36 AM	Bubbler valve closed
9/7/2011	12:05:36 AM	Helium valve opened
9/7/2011	12:05:36 AM	Main Vac valve opened
9/7/2011	12:05:36 AM	Helium MFC set to  20.000000
9/7/2011	12:05:36 AM	H2 MFC set to  0.000000
9/7/2011	12:05:36 AM	BCl3 MFC set to  0.000000
9/7/2011	12:05:36 AM	PHl3 MFC set to  0.000000
9/7/2011	12:05:36 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:05:36 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:05:36 AM	Tube furnace set to 150
9/7/2011	12:05:37 AM	Run aborted at 12:05 AM
9/7/2011	12:05:37 AM	Helium valve closed
9/7/2011	12:05:37 AM	H2 valve closed
9/7/2011	12:05:37 AM	BCl3 valve closed
9/7/2011	12:05:37 AM	PH3 valve closed
9/7/2011	12:05:37 AM	SiCl4 pre valve closed
9/7/2011	12:05:37 AM	SiCl4 post valve closed
9/7/2011	12:05:37 AM	Bypass valve closed
9/7/2011	12:05:37 AM	Main Vac valve closed
9/7/2011	12:05:37 AM	Bubbler valve closed
9/7/2011	12:05:37 AM	Helium MFC set to  0.000000
9/7/2011	12:05:37 AM	H2 MFC set to  0.000000
9/7/2011	12:05:37 AM	BCl3 MFC set to  0.000000
9/7/2011	12:05:37 AM	PHl3 MFC set to  0.000000
9/7/2011	12:05:37 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:05:38 AM	Tube furnace set to 0
9/7/2011	12:05:44 AM	Main Vac valve opened
9/7/2011	12:05:56 AM	Main Vac valve closed
9/7/2011	12:06:03 AM	Main Vac valve opened
9/7/2011	12:06:14 AM	H2 MFC set to  11.000000
9/7/2011	12:06:16 AM	H2 valve opened
9/7/2011	12:07:23 AM	H2 valve closed
9/7/2011	12:08:25 AM	Recipe started at 12:08 AM
9/7/2011	12:08:25 AM	Helium valve closed
9/7/2011	12:08:25 AM	H2 valve closed
9/7/2011	12:08:25 AM	BCl3 valve closed
9/7/2011	12:08:25 AM	PH3 valve closed
9/7/2011	12:08:25 AM	SiCl4 pre valve closed
9/7/2011	12:08:25 AM	SiCl4 post valve closed
9/7/2011	12:08:25 AM	Main Vac valve closed
9/7/2011	12:08:25 AM	Bypass valve closed
9/7/2011	12:08:25 AM	Bubbler valve closed
9/7/2011	12:08:25 AM	Helium MFC set to  0.000000
9/7/2011	12:08:25 AM	H2 MFC set to  0.000000
9/7/2011	12:08:25 AM	BCl3 MFC set to  0.000000
9/7/2011	12:08:25 AM	PHl3 MFC set to  0.000000
9/7/2011	12:08:25 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:08:25 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:08:25 AM	Tube furnace set to 0
9/7/2011	12:08:28 AM	Helium valve closed
9/7/2011	12:08:28 AM	BCl3 valve closed
9/7/2011	12:08:28 AM	PH3 valve closed
9/7/2011	12:08:28 AM	SiCl4 pre valve closed
9/7/2011	12:08:28 AM	SiCl4 post valve closed
9/7/2011	12:08:28 AM	Main Vac valve closed
9/7/2011	12:08:28 AM	Bypass valve closed
9/7/2011	12:08:28 AM	Bubbler valve closed
9/7/2011	12:08:28 AM	H2 valve opened
9/7/2011	12:08:29 AM	Helium MFC set to  0.000000
9/7/2011	12:08:29 AM	H2 MFC set to  500.000000
9/7/2011	12:08:29 AM	BCl3 MFC set to  0.000000
9/7/2011	12:08:29 AM	PHl3 MFC set to  0.000000
9/7/2011	12:08:29 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:08:29 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:08:29 AM	Tube furnace set to 0
9/7/2011	12:09:29 AM	Helium valve closed
9/7/2011	12:09:29 AM	BCl3 valve closed
9/7/2011	12:09:29 AM	PH3 valve closed
9/7/2011	12:09:29 AM	SiCl4 pre valve closed
9/7/2011	12:09:29 AM	SiCl4 post valve closed
9/7/2011	12:09:29 AM	Main Vac valve closed
9/7/2011	12:09:29 AM	Bypass valve closed
9/7/2011	12:09:29 AM	H2 valve opened
9/7/2011	12:09:29 AM	Bubbler valve opened
9/7/2011	12:09:29 AM	Helium MFC set to  0.000000
9/7/2011	12:09:29 AM	H2 MFC set to  500.000000
9/7/2011	12:09:29 AM	BCl3 MFC set to  0.000000
9/7/2011	12:09:29 AM	PHl3 MFC set to  0.000000
9/7/2011	12:09:29 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:09:29 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:09:29 AM	Tube furnace set to 0
9/7/2011	12:09:30 AM	Helium valve closed
9/7/2011	12:09:30 AM	BCl3 valve closed
9/7/2011	12:09:30 AM	PH3 valve closed
9/7/2011	12:09:30 AM	SiCl4 pre valve closed
9/7/2011	12:09:30 AM	SiCl4 post valve closed
9/7/2011	12:09:30 AM	Main Vac valve closed
9/7/2011	12:09:30 AM	Bypass valve closed
9/7/2011	12:09:30 AM	H2 valve opened
9/7/2011	12:09:30 AM	Bubbler valve opened
9/7/2011	12:09:30 AM	Helium MFC set to  0.000000
9/7/2011	12:09:30 AM	H2 MFC set to  500.000000
9/7/2011	12:09:30 AM	BCl3 MFC set to  0.000000
9/7/2011	12:09:30 AM	PHl3 MFC set to  0.000000
9/7/2011	12:09:30 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:09:30 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:09:30 AM	Tube furnace set to 1000
9/7/2011	12:29:30 AM	Helium valve closed
9/7/2011	12:29:30 AM	PH3 valve closed
9/7/2011	12:29:30 AM	Main Vac valve closed
9/7/2011	12:29:30 AM	Bypass valve closed
9/7/2011	12:29:30 AM	H2 valve opened
9/7/2011	12:29:30 AM	BCl3 valve opened
9/7/2011	12:29:30 AM	SiCl4 pre valve opened
9/7/2011	12:29:30 AM	SiCl4 post valve opened
9/7/2011	12:29:30 AM	Bubbler valve opened
9/7/2011	12:29:30 AM	Helium MFC set to  0.000000
9/7/2011	12:29:30 AM	H2 MFC set to  500.000000
9/7/2011	12:29:30 AM	BCl3 MFC set to  2.100000
9/7/2011	12:29:30 AM	PHl3 MFC set to  0.000000
9/7/2011	12:29:30 AM	SiCl4 MFC set to  50.000000
9/7/2011	12:29:30 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:29:30 AM	Tube furnace set to 1000
9/7/2011	12:46:10 AM	Helium valve closed
9/7/2011	12:46:10 AM	BCl3 valve closed
9/7/2011	12:46:10 AM	PH3 valve closed
9/7/2011	12:46:11 AM	SiCl4 pre valve closed
9/7/2011	12:46:11 AM	SiCl4 post valve closed
9/7/2011	12:46:11 AM	Main Vac valve closed
9/7/2011	12:46:11 AM	Bypass valve closed
9/7/2011	12:46:11 AM	H2 valve opened
9/7/2011	12:46:11 AM	Bubbler valve opened
9/7/2011	12:46:11 AM	Helium MFC set to  0.000000
9/7/2011	12:46:11 AM	H2 MFC set to  500.000000
9/7/2011	12:46:11 AM	BCl3 MFC set to  0.000000
9/7/2011	12:46:11 AM	PHl3 MFC set to  0.000000
9/7/2011	12:46:11 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:46:11 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:46:11 AM	Tube furnace set to 750
9/7/2011	12:51:11 AM	H2 valve closed
9/7/2011	12:51:11 AM	BCl3 valve closed
9/7/2011	12:51:11 AM	PH3 valve closed
9/7/2011	12:51:11 AM	SiCl4 pre valve closed
9/7/2011	12:51:11 AM	SiCl4 post valve closed
9/7/2011	12:51:11 AM	Main Vac valve closed
9/7/2011	12:51:11 AM	Bypass valve closed
9/7/2011	12:51:11 AM	Helium valve opened
9/7/2011	12:51:11 AM	Bubbler valve opened
9/7/2011	12:51:11 AM	Helium MFC set to  500.000000
9/7/2011	12:51:11 AM	H2 MFC set to  0.000000
9/7/2011	12:51:11 AM	BCl3 MFC set to  0.000000
9/7/2011	12:51:11 AM	PHl3 MFC set to  0.000000
9/7/2011	12:51:11 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:51:11 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:51:11 AM	Tube furnace set to 0
9/7/2011	12:53:24 AM	Run aborted at 12:53 AM
9/7/2011	12:53:24 AM	Helium valve closed
9/7/2011	12:53:24 AM	H2 valve closed
9/7/2011	12:53:24 AM	BCl3 valve closed
9/7/2011	12:53:24 AM	PH3 valve closed
9/7/2011	12:53:24 AM	SiCl4 pre valve closed
9/7/2011	12:53:24 AM	SiCl4 post valve closed
9/7/2011	12:53:24 AM	Bypass valve closed
9/7/2011	12:53:24 AM	Main Vac valve closed
9/7/2011	12:53:24 AM	Bubbler valve closed
9/7/2011	12:53:24 AM	Helium MFC set to  0.000000
9/7/2011	12:53:24 AM	H2 MFC set to  0.000000
9/7/2011	12:53:24 AM	BCl3 MFC set to  0.000000
9/7/2011	12:53:24 AM	PHl3 MFC set to  0.000000
9/7/2011	12:53:24 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:53:24 AM	Tube furnace set to 0
9/7/2011	12:55:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	12:55:52 AM	Recipe started at 12:55 AM
9/7/2011	12:55:52 AM	Helium valve closed
9/7/2011	12:55:52 AM	H2 valve closed
9/7/2011	12:55:52 AM	BCl3 valve closed
9/7/2011	12:55:52 AM	PH3 valve closed
9/7/2011	12:55:52 AM	SiCl4 pre valve closed
9/7/2011	12:55:52 AM	SiCl4 post valve closed
9/7/2011	12:55:52 AM	Main Vac valve closed
9/7/2011	12:55:52 AM	Bubbler valve closed
9/7/2011	12:55:52 AM	Bypass valve opened
9/7/2011	12:55:52 AM	Helium MFC set to  0.000000
9/7/2011	12:55:52 AM	H2 MFC set to  0.000000
9/7/2011	12:55:52 AM	BCl3 MFC set to  0.000000
9/7/2011	12:55:52 AM	PHl3 MFC set to  0.000000
9/7/2011	12:55:52 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:55:52 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:55:52 AM	Tube furnace set to 0
9/7/2011	12:56:46 AM	Helium valve closed
9/7/2011	12:56:46 AM	H2 valve closed
9/7/2011	12:56:46 AM	BCl3 valve closed
9/7/2011	12:56:46 AM	PH3 valve closed
9/7/2011	12:56:46 AM	SiCl4 pre valve closed
9/7/2011	12:56:46 AM	SiCl4 post valve closed
9/7/2011	12:56:46 AM	Main Vac valve closed
9/7/2011	12:56:46 AM	Bubbler valve closed
9/7/2011	12:56:46 AM	Bypass valve opened
9/7/2011	12:56:46 AM	Helium MFC set to  0.000000
9/7/2011	12:56:46 AM	H2 MFC set to  0.000000
9/7/2011	12:56:46 AM	BCl3 MFC set to  0.000000
9/7/2011	12:56:46 AM	PHl3 MFC set to  0.000000
9/7/2011	12:56:46 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:56:46 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:56:46 AM	Tube furnace set to 0
9/7/2011	12:57:46 AM	Helium valve closed
9/7/2011	12:57:46 AM	H2 valve closed
9/7/2011	12:57:46 AM	BCl3 valve closed
9/7/2011	12:57:46 AM	PH3 valve closed
9/7/2011	12:57:46 AM	SiCl4 pre valve closed
9/7/2011	12:57:46 AM	SiCl4 post valve closed
9/7/2011	12:57:46 AM	Bypass valve closed
9/7/2011	12:57:46 AM	Bubbler valve closed
9/7/2011	12:57:46 AM	Main Vac valve opened
9/7/2011	12:57:46 AM	Helium MFC set to  0.000000
9/7/2011	12:57:46 AM	H2 MFC set to  0.000000
9/7/2011	12:57:46 AM	BCl3 MFC set to  0.000000
9/7/2011	12:57:46 AM	PHl3 MFC set to  0.000000
9/7/2011	12:57:46 AM	SiCl4 MFC set to  0.000000
9/7/2011	12:57:46 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:57:47 AM	Tube furnace set to 0
9/7/2011	12:57:48 AM	Run finished at 12:57 AM
9/7/2011	12:57:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	12:57:59 AM	H2 MFC set to  11.000000
9/7/2011	12:58:00 AM	H2 valve opened
9/7/2011	1:02:14 AM	H2 valve closed
9/7/2011	1:02:17 AM	H2 MFC set to  0.000000
9/7/2011	1:02:46 AM	Recipe started at 1:02 AM
9/7/2011	1:02:46 AM	Helium valve closed
9/7/2011	1:02:46 AM	H2 valve closed
9/7/2011	1:02:46 AM	BCl3 valve closed
9/7/2011	1:02:46 AM	PH3 valve closed
9/7/2011	1:02:46 AM	SiCl4 pre valve closed
9/7/2011	1:02:46 AM	SiCl4 post valve closed
9/7/2011	1:02:46 AM	Bypass valve closed
9/7/2011	1:02:46 AM	Bubbler valve closed
9/7/2011	1:02:46 AM	Main Vac valve opened
9/7/2011	1:02:46 AM	Helium MFC set to  0.000000
9/7/2011	1:02:46 AM	H2 MFC set to  0.000000
9/7/2011	1:02:46 AM	BCl3 MFC set to  0.000000
9/7/2011	1:02:46 AM	PHl3 MFC set to  0.000000
9/7/2011	1:02:46 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:02:46 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:02:46 AM	Tube furnace set to 150
9/7/2011	1:03:16 AM	H2 valve closed
9/7/2011	1:03:16 AM	BCl3 valve closed
9/7/2011	1:03:16 AM	PH3 valve closed
9/7/2011	1:03:16 AM	SiCl4 pre valve closed
9/7/2011	1:03:16 AM	SiCl4 post valve closed
9/7/2011	1:03:16 AM	Bypass valve closed
9/7/2011	1:03:16 AM	Bubbler valve closed
9/7/2011	1:03:16 AM	Helium valve opened
9/7/2011	1:03:16 AM	Main Vac valve opened
9/7/2011	1:03:16 AM	Helium MFC set to  20.000000
9/7/2011	1:03:16 AM	H2 MFC set to  0.000000
9/7/2011	1:03:16 AM	BCl3 MFC set to  0.000000
9/7/2011	1:03:16 AM	PHl3 MFC set to  0.000000
9/7/2011	1:03:16 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:03:16 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:03:16 AM	Tube furnace set to 150
9/7/2011	1:03:46 AM	Helium valve closed
9/7/2011	1:03:46 AM	H2 valve closed
9/7/2011	1:03:46 AM	BCl3 valve closed
9/7/2011	1:03:46 AM	PH3 valve closed
9/7/2011	1:03:46 AM	SiCl4 pre valve closed
9/7/2011	1:03:46 AM	SiCl4 post valve closed
9/7/2011	1:03:46 AM	Bypass valve closed
9/7/2011	1:03:46 AM	Bubbler valve closed
9/7/2011	1:03:46 AM	Main Vac valve opened
9/7/2011	1:03:46 AM	Helium MFC set to  0.000000
9/7/2011	1:03:46 AM	H2 MFC set to  0.000000
9/7/2011	1:03:46 AM	BCl3 MFC set to  0.000000
9/7/2011	1:03:46 AM	PHl3 MFC set to  0.000000
9/7/2011	1:03:46 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:03:46 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:03:47 AM	Tube furnace set to 150
9/7/2011	1:04:17 AM	H2 valve closed
9/7/2011	1:04:17 AM	BCl3 valve closed
9/7/2011	1:04:17 AM	PH3 valve closed
9/7/2011	1:04:17 AM	SiCl4 pre valve closed
9/7/2011	1:04:17 AM	SiCl4 post valve closed
9/7/2011	1:04:17 AM	Bypass valve closed
9/7/2011	1:04:17 AM	Bubbler valve closed
9/7/2011	1:04:17 AM	Helium valve opened
9/7/2011	1:04:17 AM	Main Vac valve opened
9/7/2011	1:04:17 AM	Helium MFC set to  20.000000
9/7/2011	1:04:17 AM	H2 MFC set to  0.000000
9/7/2011	1:04:17 AM	BCl3 MFC set to  0.000000
9/7/2011	1:04:17 AM	PHl3 MFC set to  0.000000
9/7/2011	1:04:17 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:04:17 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:04:17 AM	Tube furnace set to 150
9/7/2011	1:04:47 AM	Helium valve closed
9/7/2011	1:04:47 AM	H2 valve closed
9/7/2011	1:04:47 AM	BCl3 valve closed
9/7/2011	1:04:47 AM	PH3 valve closed
9/7/2011	1:04:47 AM	SiCl4 pre valve closed
9/7/2011	1:04:47 AM	SiCl4 post valve closed
9/7/2011	1:04:47 AM	Bypass valve closed
9/7/2011	1:04:47 AM	Bubbler valve closed
9/7/2011	1:04:47 AM	Main Vac valve opened
9/7/2011	1:04:47 AM	Helium MFC set to  0.000000
9/7/2011	1:04:47 AM	H2 MFC set to  0.000000
9/7/2011	1:04:47 AM	BCl3 MFC set to  0.000000
9/7/2011	1:04:47 AM	PHl3 MFC set to  0.000000
9/7/2011	1:04:47 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:04:47 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:04:47 AM	Tube furnace set to 150
9/7/2011	1:05:17 AM	H2 valve closed
9/7/2011	1:05:17 AM	BCl3 valve closed
9/7/2011	1:05:17 AM	PH3 valve closed
9/7/2011	1:05:17 AM	SiCl4 pre valve closed
9/7/2011	1:05:17 AM	SiCl4 post valve closed
9/7/2011	1:05:17 AM	Bypass valve closed
9/7/2011	1:05:17 AM	Bubbler valve closed
9/7/2011	1:05:17 AM	Helium valve opened
9/7/2011	1:05:17 AM	Main Vac valve opened
9/7/2011	1:05:17 AM	Helium MFC set to  20.000000
9/7/2011	1:05:17 AM	H2 MFC set to  0.000000
9/7/2011	1:05:17 AM	BCl3 MFC set to  0.000000
9/7/2011	1:05:17 AM	PHl3 MFC set to  0.000000
9/7/2011	1:05:17 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:05:17 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:05:17 AM	Tube furnace set to 150
9/7/2011	1:05:47 AM	Helium valve closed
9/7/2011	1:05:47 AM	H2 valve closed
9/7/2011	1:05:47 AM	BCl3 valve closed
9/7/2011	1:05:47 AM	PH3 valve closed
9/7/2011	1:05:47 AM	SiCl4 pre valve closed
9/7/2011	1:05:47 AM	SiCl4 post valve closed
9/7/2011	1:05:47 AM	Bypass valve closed
9/7/2011	1:05:47 AM	Bubbler valve closed
9/7/2011	1:05:47 AM	Main Vac valve opened
9/7/2011	1:05:47 AM	Helium MFC set to  0.000000
9/7/2011	1:05:47 AM	H2 MFC set to  0.000000
9/7/2011	1:05:47 AM	BCl3 MFC set to  0.000000
9/7/2011	1:05:47 AM	PHl3 MFC set to  0.000000
9/7/2011	1:05:47 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:05:47 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:05:47 AM	Tube furnace set to 150
9/7/2011	1:06:17 AM	H2 valve closed
9/7/2011	1:06:17 AM	BCl3 valve closed
9/7/2011	1:06:17 AM	PH3 valve closed
9/7/2011	1:06:17 AM	SiCl4 pre valve closed
9/7/2011	1:06:17 AM	SiCl4 post valve closed
9/7/2011	1:06:17 AM	Bypass valve closed
9/7/2011	1:06:17 AM	Bubbler valve closed
9/7/2011	1:06:17 AM	Helium valve opened
9/7/2011	1:06:17 AM	Main Vac valve opened
9/7/2011	1:06:17 AM	Helium MFC set to  20.000000
9/7/2011	1:06:17 AM	H2 MFC set to  0.000000
9/7/2011	1:06:17 AM	BCl3 MFC set to  0.000000
9/7/2011	1:06:17 AM	PHl3 MFC set to  0.000000
9/7/2011	1:06:17 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:06:17 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:06:18 AM	Tube furnace set to 150
9/7/2011	1:06:48 AM	Helium valve closed
9/7/2011	1:06:48 AM	H2 valve closed
9/7/2011	1:06:48 AM	BCl3 valve closed
9/7/2011	1:06:48 AM	PH3 valve closed
9/7/2011	1:06:48 AM	SiCl4 pre valve closed
9/7/2011	1:06:48 AM	SiCl4 post valve closed
9/7/2011	1:06:48 AM	Bypass valve closed
9/7/2011	1:06:48 AM	Bubbler valve closed
9/7/2011	1:06:48 AM	Main Vac valve opened
9/7/2011	1:06:48 AM	Helium MFC set to  0.000000
9/7/2011	1:06:48 AM	H2 MFC set to  0.000000
9/7/2011	1:06:48 AM	BCl3 MFC set to  0.000000
9/7/2011	1:06:48 AM	PHl3 MFC set to  0.000000
9/7/2011	1:06:48 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:06:48 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:06:48 AM	Tube furnace set to 150
9/7/2011	1:07:18 AM	H2 valve closed
9/7/2011	1:07:18 AM	BCl3 valve closed
9/7/2011	1:07:18 AM	PH3 valve closed
9/7/2011	1:07:18 AM	SiCl4 pre valve closed
9/7/2011	1:07:18 AM	SiCl4 post valve closed
9/7/2011	1:07:18 AM	Bypass valve closed
9/7/2011	1:07:18 AM	Bubbler valve closed
9/7/2011	1:07:18 AM	Helium valve opened
9/7/2011	1:07:18 AM	Main Vac valve opened
9/7/2011	1:07:18 AM	Helium MFC set to  20.000000
9/7/2011	1:07:18 AM	H2 MFC set to  0.000000
9/7/2011	1:07:18 AM	BCl3 MFC set to  0.000000
9/7/2011	1:07:18 AM	PHl3 MFC set to  0.000000
9/7/2011	1:07:18 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:07:18 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:07:18 AM	Tube furnace set to 150
9/7/2011	1:07:48 AM	Helium valve closed
9/7/2011	1:07:48 AM	H2 valve closed
9/7/2011	1:07:48 AM	BCl3 valve closed
9/7/2011	1:07:48 AM	PH3 valve closed
9/7/2011	1:07:48 AM	SiCl4 pre valve closed
9/7/2011	1:07:48 AM	SiCl4 post valve closed
9/7/2011	1:07:48 AM	Bypass valve closed
9/7/2011	1:07:48 AM	Bubbler valve closed
9/7/2011	1:07:48 AM	Main Vac valve opened
9/7/2011	1:07:48 AM	Helium MFC set to  0.000000
9/7/2011	1:07:48 AM	H2 MFC set to  0.000000
9/7/2011	1:07:48 AM	BCl3 MFC set to  0.000000
9/7/2011	1:07:48 AM	PHl3 MFC set to  0.000000
9/7/2011	1:07:48 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:07:48 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:07:48 AM	Tube furnace set to 150
9/7/2011	1:08:18 AM	H2 valve closed
9/7/2011	1:08:18 AM	BCl3 valve closed
9/7/2011	1:08:18 AM	PH3 valve closed
9/7/2011	1:08:18 AM	SiCl4 pre valve closed
9/7/2011	1:08:18 AM	SiCl4 post valve closed
9/7/2011	1:08:18 AM	Bypass valve closed
9/7/2011	1:08:18 AM	Bubbler valve closed
9/7/2011	1:08:18 AM	Helium valve opened
9/7/2011	1:08:18 AM	Main Vac valve opened
9/7/2011	1:08:18 AM	Helium MFC set to  20.000000
9/7/2011	1:08:18 AM	H2 MFC set to  0.000000
9/7/2011	1:08:18 AM	BCl3 MFC set to  0.000000
9/7/2011	1:08:18 AM	PHl3 MFC set to  0.000000
9/7/2011	1:08:18 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:08:18 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:08:18 AM	Tube furnace set to 150
9/7/2011	1:08:48 AM	Helium valve closed
9/7/2011	1:08:48 AM	H2 valve closed
9/7/2011	1:08:48 AM	BCl3 valve closed
9/7/2011	1:08:48 AM	PH3 valve closed
9/7/2011	1:08:48 AM	SiCl4 pre valve closed
9/7/2011	1:08:48 AM	SiCl4 post valve closed
9/7/2011	1:08:48 AM	Bypass valve closed
9/7/2011	1:08:48 AM	Bubbler valve closed
9/7/2011	1:08:48 AM	Main Vac valve opened
9/7/2011	1:08:48 AM	Helium MFC set to  0.000000
9/7/2011	1:08:48 AM	H2 MFC set to  0.000000
9/7/2011	1:08:48 AM	BCl3 MFC set to  0.000000
9/7/2011	1:08:48 AM	PHl3 MFC set to  0.000000
9/7/2011	1:08:48 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:08:48 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:08:49 AM	Tube furnace set to 150
9/7/2011	1:09:19 AM	H2 valve closed
9/7/2011	1:09:19 AM	BCl3 valve closed
9/7/2011	1:09:19 AM	PH3 valve closed
9/7/2011	1:09:19 AM	SiCl4 pre valve closed
9/7/2011	1:09:19 AM	SiCl4 post valve closed
9/7/2011	1:09:19 AM	Bypass valve closed
9/7/2011	1:09:19 AM	Bubbler valve closed
9/7/2011	1:09:19 AM	Helium valve opened
9/7/2011	1:09:19 AM	Main Vac valve opened
9/7/2011	1:09:19 AM	Helium MFC set to  20.000000
9/7/2011	1:09:19 AM	H2 MFC set to  0.000000
9/7/2011	1:09:19 AM	BCl3 MFC set to  0.000000
9/7/2011	1:09:19 AM	PHl3 MFC set to  0.000000
9/7/2011	1:09:19 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:09:19 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:09:19 AM	Tube furnace set to 150
9/7/2011	1:09:49 AM	Helium valve closed
9/7/2011	1:09:49 AM	H2 valve closed
9/7/2011	1:09:49 AM	BCl3 valve closed
9/7/2011	1:09:49 AM	PH3 valve closed
9/7/2011	1:09:49 AM	SiCl4 pre valve closed
9/7/2011	1:09:49 AM	SiCl4 post valve closed
9/7/2011	1:09:49 AM	Bypass valve closed
9/7/2011	1:09:49 AM	Bubbler valve closed
9/7/2011	1:09:49 AM	Main Vac valve opened
9/7/2011	1:09:49 AM	Helium MFC set to  0.000000
9/7/2011	1:09:49 AM	H2 MFC set to  0.000000
9/7/2011	1:09:49 AM	BCl3 MFC set to  0.000000
9/7/2011	1:09:49 AM	PHl3 MFC set to  0.000000
9/7/2011	1:09:49 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:09:49 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:09:49 AM	Tube furnace set to 150
9/7/2011	1:10:19 AM	H2 valve closed
9/7/2011	1:10:19 AM	BCl3 valve closed
9/7/2011	1:10:19 AM	PH3 valve closed
9/7/2011	1:10:19 AM	SiCl4 pre valve closed
9/7/2011	1:10:19 AM	SiCl4 post valve closed
9/7/2011	1:10:19 AM	Bypass valve closed
9/7/2011	1:10:19 AM	Bubbler valve closed
9/7/2011	1:10:19 AM	Helium valve opened
9/7/2011	1:10:19 AM	Main Vac valve opened
9/7/2011	1:10:19 AM	Helium MFC set to  20.000000
9/7/2011	1:10:19 AM	H2 MFC set to  0.000000
9/7/2011	1:10:19 AM	BCl3 MFC set to  0.000000
9/7/2011	1:10:19 AM	PHl3 MFC set to  0.000000
9/7/2011	1:10:19 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:10:19 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:10:19 AM	Tube furnace set to 150
9/7/2011	1:10:49 AM	Helium valve closed
9/7/2011	1:10:49 AM	H2 valve closed
9/7/2011	1:10:49 AM	BCl3 valve closed
9/7/2011	1:10:49 AM	PH3 valve closed
9/7/2011	1:10:49 AM	SiCl4 pre valve closed
9/7/2011	1:10:49 AM	SiCl4 post valve closed
9/7/2011	1:10:49 AM	Bypass valve closed
9/7/2011	1:10:49 AM	Bubbler valve closed
9/7/2011	1:10:49 AM	Main Vac valve opened
9/7/2011	1:10:49 AM	Helium MFC set to  0.000000
9/7/2011	1:10:49 AM	H2 MFC set to  0.000000
9/7/2011	1:10:49 AM	BCl3 MFC set to  0.000000
9/7/2011	1:10:49 AM	PHl3 MFC set to  0.000000
9/7/2011	1:10:49 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:10:49 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:10:50 AM	Tube furnace set to 150
9/7/2011	1:11:20 AM	H2 valve closed
9/7/2011	1:11:20 AM	BCl3 valve closed
9/7/2011	1:11:20 AM	PH3 valve closed
9/7/2011	1:11:20 AM	SiCl4 pre valve closed
9/7/2011	1:11:20 AM	SiCl4 post valve closed
9/7/2011	1:11:20 AM	Bypass valve closed
9/7/2011	1:11:20 AM	Bubbler valve closed
9/7/2011	1:11:20 AM	Helium valve opened
9/7/2011	1:11:20 AM	Main Vac valve opened
9/7/2011	1:11:20 AM	Helium MFC set to  20.000000
9/7/2011	1:11:20 AM	H2 MFC set to  0.000000
9/7/2011	1:11:20 AM	BCl3 MFC set to  0.000000
9/7/2011	1:11:20 AM	PHl3 MFC set to  0.000000
9/7/2011	1:11:20 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:11:20 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:11:20 AM	Tube furnace set to 150
9/7/2011	1:11:50 AM	Helium valve closed
9/7/2011	1:11:50 AM	H2 valve closed
9/7/2011	1:11:50 AM	BCl3 valve closed
9/7/2011	1:11:50 AM	PH3 valve closed
9/7/2011	1:11:50 AM	SiCl4 pre valve closed
9/7/2011	1:11:50 AM	SiCl4 post valve closed
9/7/2011	1:11:50 AM	Bypass valve closed
9/7/2011	1:11:50 AM	Bubbler valve closed
9/7/2011	1:11:50 AM	Main Vac valve opened
9/7/2011	1:11:50 AM	Helium MFC set to  0.000000
9/7/2011	1:11:50 AM	H2 MFC set to  0.000000
9/7/2011	1:11:50 AM	BCl3 MFC set to  0.000000
9/7/2011	1:11:50 AM	PHl3 MFC set to  0.000000
9/7/2011	1:11:50 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:11:50 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:11:50 AM	Tube furnace set to 150
9/7/2011	1:12:20 AM	H2 valve closed
9/7/2011	1:12:20 AM	BCl3 valve closed
9/7/2011	1:12:20 AM	PH3 valve closed
9/7/2011	1:12:20 AM	SiCl4 pre valve closed
9/7/2011	1:12:20 AM	SiCl4 post valve closed
9/7/2011	1:12:20 AM	Bypass valve closed
9/7/2011	1:12:20 AM	Bubbler valve closed
9/7/2011	1:12:20 AM	Helium valve opened
9/7/2011	1:12:20 AM	Main Vac valve opened
9/7/2011	1:12:20 AM	Helium MFC set to  20.000000
9/7/2011	1:12:20 AM	H2 MFC set to  0.000000
9/7/2011	1:12:20 AM	BCl3 MFC set to  0.000000
9/7/2011	1:12:20 AM	PHl3 MFC set to  0.000000
9/7/2011	1:12:20 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:12:20 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:12:20 AM	Tube furnace set to 150
9/7/2011	1:12:50 AM	Helium valve closed
9/7/2011	1:12:50 AM	H2 valve closed
9/7/2011	1:12:50 AM	BCl3 valve closed
9/7/2011	1:12:50 AM	PH3 valve closed
9/7/2011	1:12:50 AM	SiCl4 pre valve closed
9/7/2011	1:12:50 AM	SiCl4 post valve closed
9/7/2011	1:12:50 AM	Bypass valve closed
9/7/2011	1:12:50 AM	Bubbler valve closed
9/7/2011	1:12:50 AM	Main Vac valve opened
9/7/2011	1:12:50 AM	Helium MFC set to  0.000000
9/7/2011	1:12:50 AM	H2 MFC set to  0.000000
9/7/2011	1:12:50 AM	BCl3 MFC set to  0.000000
9/7/2011	1:12:50 AM	PHl3 MFC set to  0.000000
9/7/2011	1:12:50 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:12:50 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:12:50 AM	Tube furnace set to 150
9/7/2011	1:12:51 AM	Run finished at 1:12 AM
9/7/2011	1:38:35 AM	Recipe started at 1:38 AM
9/7/2011	1:38:35 AM	Helium valve closed
9/7/2011	1:38:35 AM	H2 valve closed
9/7/2011	1:38:35 AM	BCl3 valve closed
9/7/2011	1:38:35 AM	PH3 valve closed
9/7/2011	1:38:35 AM	SiCl4 pre valve closed
9/7/2011	1:38:35 AM	SiCl4 post valve closed
9/7/2011	1:38:35 AM	Main Vac valve closed
9/7/2011	1:38:35 AM	Bypass valve closed
9/7/2011	1:38:35 AM	Bubbler valve closed
9/7/2011	1:38:35 AM	Helium MFC set to  0.000000
9/7/2011	1:38:35 AM	H2 MFC set to  0.000000
9/7/2011	1:38:35 AM	BCl3 MFC set to  0.000000
9/7/2011	1:38:35 AM	PHl3 MFC set to  0.000000
9/7/2011	1:38:35 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:38:35 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:38:36 AM	Tube furnace set to 0
9/7/2011	1:38:39 AM	Helium valve closed
9/7/2011	1:38:39 AM	BCl3 valve closed
9/7/2011	1:38:39 AM	PH3 valve closed
9/7/2011	1:38:39 AM	SiCl4 pre valve closed
9/7/2011	1:38:39 AM	SiCl4 post valve closed
9/7/2011	1:38:39 AM	Main Vac valve closed
9/7/2011	1:38:39 AM	Bypass valve closed
9/7/2011	1:38:39 AM	Bubbler valve closed
9/7/2011	1:38:39 AM	H2 valve opened
9/7/2011	1:38:39 AM	Helium MFC set to  0.000000
9/7/2011	1:38:39 AM	H2 MFC set to  500.000000
9/7/2011	1:38:39 AM	BCl3 MFC set to  0.000000
9/7/2011	1:38:39 AM	PHl3 MFC set to  0.000000
9/7/2011	1:38:39 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:38:39 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:38:39 AM	Tube furnace set to 0
9/7/2011	1:39:40 AM	Helium valve closed
9/7/2011	1:39:40 AM	BCl3 valve closed
9/7/2011	1:39:40 AM	PH3 valve closed
9/7/2011	1:39:40 AM	SiCl4 pre valve closed
9/7/2011	1:39:40 AM	SiCl4 post valve closed
9/7/2011	1:39:40 AM	Main Vac valve closed
9/7/2011	1:39:40 AM	Bypass valve closed
9/7/2011	1:39:40 AM	H2 valve opened
9/7/2011	1:39:40 AM	Bubbler valve opened
9/7/2011	1:39:40 AM	Helium MFC set to  0.000000
9/7/2011	1:39:40 AM	H2 MFC set to  500.000000
9/7/2011	1:39:40 AM	BCl3 MFC set to  0.000000
9/7/2011	1:39:40 AM	PHl3 MFC set to  0.000000
9/7/2011	1:39:40 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:39:40 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:39:40 AM	Tube furnace set to 0
9/7/2011	1:39:41 AM	Helium valve closed
9/7/2011	1:39:41 AM	BCl3 valve closed
9/7/2011	1:39:41 AM	PH3 valve closed
9/7/2011	1:39:41 AM	SiCl4 pre valve closed
9/7/2011	1:39:41 AM	SiCl4 post valve closed
9/7/2011	1:39:41 AM	Main Vac valve closed
9/7/2011	1:39:41 AM	Bypass valve closed
9/7/2011	1:39:41 AM	H2 valve opened
9/7/2011	1:39:41 AM	Bubbler valve opened
9/7/2011	1:39:41 AM	Helium MFC set to  0.000000
9/7/2011	1:39:41 AM	H2 MFC set to  500.000000
9/7/2011	1:39:41 AM	BCl3 MFC set to  0.000000
9/7/2011	1:39:41 AM	PHl3 MFC set to  0.000000
9/7/2011	1:39:41 AM	SiCl4 MFC set to  0.000000
9/7/2011	1:39:41 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:39:41 AM	Tube furnace set to 1000
9/7/2011	1:59:41 AM	Helium valve closed
9/7/2011	1:59:41 AM	PH3 valve closed
9/7/2011	1:59:41 AM	Main Vac valve closed
9/7/2011	1:59:41 AM	Bypass valve closed
9/7/2011	1:59:41 AM	H2 valve opened
9/7/2011	1:59:41 AM	BCl3 valve opened
9/7/2011	1:59:41 AM	SiCl4 pre valve opened
9/7/2011	1:59:41 AM	SiCl4 post valve opened
9/7/2011	1:59:41 AM	Bubbler valve opened
9/7/2011	1:59:41 AM	Helium MFC set to  0.000000
9/7/2011	1:59:41 AM	H2 MFC set to  500.000000
9/7/2011	1:59:41 AM	BCl3 MFC set to  2.100000
9/7/2011	1:59:41 AM	PHl3 MFC set to  0.000000
9/7/2011	1:59:41 AM	SiCl4 MFC set to  50.000000
9/7/2011	1:59:41 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:59:42 AM	Tube furnace set to 1000
9/7/2011	2:16:22 AM	Helium valve closed
9/7/2011	2:16:22 AM	BCl3 valve closed
9/7/2011	2:16:22 AM	PH3 valve closed
9/7/2011	2:16:22 AM	SiCl4 pre valve closed
9/7/2011	2:16:22 AM	SiCl4 post valve closed
9/7/2011	2:16:22 AM	Main Vac valve closed
9/7/2011	2:16:22 AM	Bypass valve closed
9/7/2011	2:16:22 AM	H2 valve opened
9/7/2011	2:16:22 AM	Bubbler valve opened
9/7/2011	2:16:22 AM	Helium MFC set to  0.000000
9/7/2011	2:16:22 AM	H2 MFC set to  500.000000
9/7/2011	2:16:22 AM	BCl3 MFC set to  0.000000
9/7/2011	2:16:22 AM	PHl3 MFC set to  0.000000
9/7/2011	2:16:22 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:16:22 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:16:22 AM	Tube furnace set to 750
9/7/2011	2:21:22 AM	H2 valve closed
9/7/2011	2:21:22 AM	BCl3 valve closed
9/7/2011	2:21:22 AM	PH3 valve closed
9/7/2011	2:21:22 AM	SiCl4 pre valve closed
9/7/2011	2:21:22 AM	SiCl4 post valve closed
9/7/2011	2:21:22 AM	Main Vac valve closed
9/7/2011	2:21:22 AM	Bypass valve closed
9/7/2011	2:21:22 AM	Helium valve opened
9/7/2011	2:21:22 AM	Bubbler valve opened
9/7/2011	2:21:22 AM	Helium MFC set to  500.000000
9/7/2011	2:21:22 AM	H2 MFC set to  0.000000
9/7/2011	2:21:22 AM	BCl3 MFC set to  0.000000
9/7/2011	2:21:22 AM	PHl3 MFC set to  0.000000
9/7/2011	2:21:22 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:21:22 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:21:22 AM	Tube furnace set to 0
9/7/2011	2:24:03 AM	Run aborted at 2:24 AM
9/7/2011	2:24:03 AM	Helium valve closed
9/7/2011	2:24:03 AM	H2 valve closed
9/7/2011	2:24:03 AM	BCl3 valve closed
9/7/2011	2:24:03 AM	PH3 valve closed
9/7/2011	2:24:03 AM	SiCl4 pre valve closed
9/7/2011	2:24:03 AM	SiCl4 post valve closed
9/7/2011	2:24:03 AM	Bypass valve closed
9/7/2011	2:24:03 AM	Main Vac valve closed
9/7/2011	2:24:03 AM	Bubbler valve closed
9/7/2011	2:24:03 AM	Helium MFC set to  0.000000
9/7/2011	2:24:03 AM	H2 MFC set to  0.000000
9/7/2011	2:24:03 AM	BCl3 MFC set to  0.000000
9/7/2011	2:24:03 AM	PHl3 MFC set to  0.000000
9/7/2011	2:24:03 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:24:03 AM	Tube furnace set to 0
9/7/2011	2:27:19 AM	Recipe started at 2:27 AM
9/7/2011	2:27:19 AM	Helium valve closed
9/7/2011	2:27:19 AM	H2 valve closed
9/7/2011	2:27:19 AM	BCl3 valve closed
9/7/2011	2:27:19 AM	PH3 valve closed
9/7/2011	2:27:19 AM	SiCl4 pre valve closed
9/7/2011	2:27:19 AM	SiCl4 post valve closed
9/7/2011	2:27:19 AM	Bypass valve closed
9/7/2011	2:27:19 AM	Bubbler valve closed
9/7/2011	2:27:19 AM	Main Vac valve opened
9/7/2011	2:27:19 AM	Helium MFC set to  0.000000
9/7/2011	2:27:19 AM	H2 MFC set to  0.000000
9/7/2011	2:27:19 AM	BCl3 MFC set to  0.000000
9/7/2011	2:27:19 AM	PHl3 MFC set to  0.000000
9/7/2011	2:27:19 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:27:19 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:27:19 AM	Tube furnace set to 150
9/7/2011	2:27:25 AM	H2 valve closed
9/7/2011	2:27:25 AM	BCl3 valve closed
9/7/2011	2:27:25 AM	PH3 valve closed
9/7/2011	2:27:25 AM	SiCl4 pre valve closed
9/7/2011	2:27:25 AM	SiCl4 post valve closed
9/7/2011	2:27:25 AM	Bypass valve closed
9/7/2011	2:27:25 AM	Bubbler valve closed
9/7/2011	2:27:25 AM	Helium valve opened
9/7/2011	2:27:25 AM	Main Vac valve opened
9/7/2011	2:27:25 AM	Helium MFC set to  20.000000
9/7/2011	2:27:25 AM	H2 MFC set to  0.000000
9/7/2011	2:27:25 AM	BCl3 MFC set to  0.000000
9/7/2011	2:27:25 AM	PHl3 MFC set to  0.000000
9/7/2011	2:27:25 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:27:25 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:27:26 AM	Tube furnace set to 150
9/7/2011	2:27:26 AM	Run aborted at 2:27 AM
9/7/2011	2:27:26 AM	Helium valve closed
9/7/2011	2:27:26 AM	H2 valve closed
9/7/2011	2:27:26 AM	BCl3 valve closed
9/7/2011	2:27:26 AM	PH3 valve closed
9/7/2011	2:27:26 AM	SiCl4 pre valve closed
9/7/2011	2:27:26 AM	SiCl4 post valve closed
9/7/2011	2:27:26 AM	Bypass valve closed
9/7/2011	2:27:26 AM	Main Vac valve closed
9/7/2011	2:27:26 AM	Bubbler valve closed
9/7/2011	2:27:26 AM	Helium MFC set to  0.000000
9/7/2011	2:27:26 AM	H2 MFC set to  0.000000
9/7/2011	2:27:26 AM	BCl3 MFC set to  0.000000
9/7/2011	2:27:26 AM	PHl3 MFC set to  0.000000
9/7/2011	2:27:26 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:27:27 AM	Tube furnace set to 0
9/7/2011	2:27:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	2:27:41 AM	Recipe started at 2:27 AM
9/7/2011	2:27:41 AM	Helium valve closed
9/7/2011	2:27:41 AM	H2 valve closed
9/7/2011	2:27:41 AM	BCl3 valve closed
9/7/2011	2:27:41 AM	PH3 valve closed
9/7/2011	2:27:41 AM	SiCl4 pre valve closed
9/7/2011	2:27:41 AM	SiCl4 post valve closed
9/7/2011	2:27:41 AM	Main Vac valve closed
9/7/2011	2:27:41 AM	Bubbler valve closed
9/7/2011	2:27:41 AM	Bypass valve opened
9/7/2011	2:27:41 AM	Helium MFC set to  0.000000
9/7/2011	2:27:41 AM	H2 MFC set to  0.000000
9/7/2011	2:27:41 AM	BCl3 MFC set to  0.000000
9/7/2011	2:27:41 AM	PHl3 MFC set to  0.000000
9/7/2011	2:27:41 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:27:41 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:27:41 AM	Tube furnace set to 0
9/7/2011	2:27:41 AM	Run aborted at 2:27 AM
9/7/2011	2:27:41 AM	Helium valve closed
9/7/2011	2:27:41 AM	H2 valve closed
9/7/2011	2:27:42 AM	BCl3 valve closed
9/7/2011	2:27:42 AM	PH3 valve closed
9/7/2011	2:27:42 AM	SiCl4 pre valve closed
9/7/2011	2:27:42 AM	SiCl4 post valve closed
9/7/2011	2:27:42 AM	Bypass valve closed
9/7/2011	2:27:42 AM	Main Vac valve closed
9/7/2011	2:27:42 AM	Bubbler valve closed
9/7/2011	2:27:42 AM	Helium MFC set to  0.000000
9/7/2011	2:27:42 AM	H2 MFC set to  0.000000
9/7/2011	2:27:42 AM	BCl3 MFC set to  0.000000
9/7/2011	2:27:42 AM	PHl3 MFC set to  0.000000
9/7/2011	2:27:42 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:27:42 AM	Tube furnace set to 0
9/7/2011	2:27:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	2:27:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	2:27:44 AM	Recipe started at 2:27 AM
9/7/2011	2:27:44 AM	Helium valve closed
9/7/2011	2:27:44 AM	H2 valve closed
9/7/2011	2:27:44 AM	BCl3 valve closed
9/7/2011	2:27:44 AM	PH3 valve closed
9/7/2011	2:27:44 AM	SiCl4 pre valve closed
9/7/2011	2:27:44 AM	SiCl4 post valve closed
9/7/2011	2:27:44 AM	Main Vac valve closed
9/7/2011	2:27:44 AM	Bubbler valve closed
9/7/2011	2:27:44 AM	Bypass valve opened
9/7/2011	2:27:44 AM	Helium MFC set to  0.000000
9/7/2011	2:27:44 AM	H2 MFC set to  0.000000
9/7/2011	2:27:44 AM	BCl3 MFC set to  0.000000
9/7/2011	2:27:44 AM	PHl3 MFC set to  0.000000
9/7/2011	2:27:44 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:27:44 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:27:45 AM	Tube furnace set to 0
9/7/2011	2:27:45 AM	Helium valve closed
9/7/2011	2:27:45 AM	H2 valve closed
9/7/2011	2:27:45 AM	BCl3 valve closed
9/7/2011	2:27:45 AM	PH3 valve closed
9/7/2011	2:27:45 AM	SiCl4 pre valve closed
9/7/2011	2:27:45 AM	SiCl4 post valve closed
9/7/2011	2:27:45 AM	Main Vac valve closed
9/7/2011	2:27:45 AM	Bubbler valve closed
9/7/2011	2:27:45 AM	Bypass valve opened
9/7/2011	2:27:45 AM	Helium MFC set to  0.000000
9/7/2011	2:27:45 AM	H2 MFC set to  0.000000
9/7/2011	2:27:45 AM	BCl3 MFC set to  0.000000
9/7/2011	2:27:45 AM	PHl3 MFC set to  0.000000
9/7/2011	2:27:45 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:27:45 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:27:45 AM	Tube furnace set to 0
9/7/2011	2:28:45 AM	Helium valve closed
9/7/2011	2:28:45 AM	H2 valve closed
9/7/2011	2:28:45 AM	BCl3 valve closed
9/7/2011	2:28:45 AM	PH3 valve closed
9/7/2011	2:28:45 AM	SiCl4 pre valve closed
9/7/2011	2:28:45 AM	SiCl4 post valve closed
9/7/2011	2:28:45 AM	Bypass valve closed
9/7/2011	2:28:45 AM	Bubbler valve closed
9/7/2011	2:28:45 AM	Main Vac valve opened
9/7/2011	2:28:45 AM	Helium MFC set to  0.000000
9/7/2011	2:28:45 AM	H2 MFC set to  0.000000
9/7/2011	2:28:45 AM	BCl3 MFC set to  0.000000
9/7/2011	2:28:45 AM	PHl3 MFC set to  0.000000
9/7/2011	2:28:45 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:28:45 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:28:45 AM	Tube furnace set to 0
9/7/2011	2:28:46 AM	Run finished at 2:28 AM
9/7/2011	2:28:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	2:28:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	2:29:10 AM	Recipe started at 2:29 AM
9/7/2011	2:29:10 AM	Helium valve closed
9/7/2011	2:29:10 AM	H2 valve closed
9/7/2011	2:29:10 AM	BCl3 valve closed
9/7/2011	2:29:10 AM	PH3 valve closed
9/7/2011	2:29:10 AM	SiCl4 pre valve closed
9/7/2011	2:29:10 AM	SiCl4 post valve closed
9/7/2011	2:29:10 AM	Main Vac valve closed
9/7/2011	2:29:10 AM	Bubbler valve closed
9/7/2011	2:29:10 AM	Bypass valve opened
9/7/2011	2:29:10 AM	Helium MFC set to  0.000000
9/7/2011	2:29:10 AM	H2 MFC set to  0.000000
9/7/2011	2:29:10 AM	BCl3 MFC set to  0.000000
9/7/2011	2:29:10 AM	PHl3 MFC set to  0.000000
9/7/2011	2:29:10 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:29:10 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:29:10 AM	Tube furnace set to 0
9/7/2011	2:29:11 AM	Helium valve closed
9/7/2011	2:29:11 AM	H2 valve closed
9/7/2011	2:29:11 AM	BCl3 valve closed
9/7/2011	2:29:11 AM	PH3 valve closed
9/7/2011	2:29:11 AM	SiCl4 pre valve closed
9/7/2011	2:29:11 AM	SiCl4 post valve closed
9/7/2011	2:29:11 AM	Main Vac valve closed
9/7/2011	2:29:11 AM	Bubbler valve closed
9/7/2011	2:29:11 AM	Bypass valve opened
9/7/2011	2:29:11 AM	Helium MFC set to  0.000000
9/7/2011	2:29:11 AM	H2 MFC set to  0.000000
9/7/2011	2:29:11 AM	BCl3 MFC set to  0.000000
9/7/2011	2:29:11 AM	PHl3 MFC set to  0.000000
9/7/2011	2:29:11 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:29:11 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:29:11 AM	Tube furnace set to 0
9/7/2011	2:29:41 AM	Helium valve closed
9/7/2011	2:29:41 AM	H2 valve closed
9/7/2011	2:29:41 AM	BCl3 valve closed
9/7/2011	2:29:41 AM	PH3 valve closed
9/7/2011	2:29:41 AM	SiCl4 pre valve closed
9/7/2011	2:29:41 AM	SiCl4 post valve closed
9/7/2011	2:29:41 AM	Bypass valve closed
9/7/2011	2:29:41 AM	Bubbler valve closed
9/7/2011	2:29:41 AM	Main Vac valve opened
9/7/2011	2:29:41 AM	Helium MFC set to  0.000000
9/7/2011	2:29:41 AM	H2 MFC set to  0.000000
9/7/2011	2:29:41 AM	BCl3 MFC set to  0.000000
9/7/2011	2:29:41 AM	PHl3 MFC set to  0.000000
9/7/2011	2:29:41 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:29:41 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:29:41 AM	Tube furnace set to 0
9/7/2011	2:30:11 AM	H2 valve closed
9/7/2011	2:30:11 AM	BCl3 valve closed
9/7/2011	2:30:11 AM	PH3 valve closed
9/7/2011	2:30:11 AM	SiCl4 pre valve closed
9/7/2011	2:30:11 AM	SiCl4 post valve closed
9/7/2011	2:30:11 AM	Bypass valve closed
9/7/2011	2:30:11 AM	Bubbler valve closed
9/7/2011	2:30:11 AM	Helium valve opened
9/7/2011	2:30:11 AM	Main Vac valve opened
9/7/2011	2:30:11 AM	Helium MFC set to  20.000000
9/7/2011	2:30:11 AM	H2 MFC set to  0.000000
9/7/2011	2:30:11 AM	BCl3 MFC set to  0.000000
9/7/2011	2:30:11 AM	PHl3 MFC set to  0.000000
9/7/2011	2:30:11 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:30:11 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:30:11 AM	Tube furnace set to 0
9/7/2011	2:30:41 AM	Helium valve closed
9/7/2011	2:30:41 AM	H2 valve closed
9/7/2011	2:30:41 AM	BCl3 valve closed
9/7/2011	2:30:41 AM	PH3 valve closed
9/7/2011	2:30:41 AM	SiCl4 pre valve closed
9/7/2011	2:30:41 AM	SiCl4 post valve closed
9/7/2011	2:30:41 AM	Bypass valve closed
9/7/2011	2:30:41 AM	Bubbler valve closed
9/7/2011	2:30:41 AM	Main Vac valve opened
9/7/2011	2:30:41 AM	Helium MFC set to  0.000000
9/7/2011	2:30:41 AM	H2 MFC set to  0.000000
9/7/2011	2:30:41 AM	BCl3 MFC set to  0.000000
9/7/2011	2:30:41 AM	PHl3 MFC set to  0.000000
9/7/2011	2:30:41 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:30:41 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:30:42 AM	Tube furnace set to 0
9/7/2011	2:31:12 AM	H2 valve closed
9/7/2011	2:31:12 AM	BCl3 valve closed
9/7/2011	2:31:12 AM	PH3 valve closed
9/7/2011	2:31:12 AM	SiCl4 pre valve closed
9/7/2011	2:31:12 AM	SiCl4 post valve closed
9/7/2011	2:31:12 AM	Bypass valve closed
9/7/2011	2:31:12 AM	Bubbler valve closed
9/7/2011	2:31:12 AM	Helium valve opened
9/7/2011	2:31:12 AM	Main Vac valve opened
9/7/2011	2:31:12 AM	Helium MFC set to  20.000000
9/7/2011	2:31:12 AM	H2 MFC set to  0.000000
9/7/2011	2:31:12 AM	BCl3 MFC set to  0.000000
9/7/2011	2:31:12 AM	PHl3 MFC set to  0.000000
9/7/2011	2:31:12 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:31:12 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:31:12 AM	Tube furnace set to 0
9/7/2011	2:31:42 AM	Helium valve closed
9/7/2011	2:31:42 AM	H2 valve closed
9/7/2011	2:31:42 AM	BCl3 valve closed
9/7/2011	2:31:42 AM	PH3 valve closed
9/7/2011	2:31:42 AM	SiCl4 pre valve closed
9/7/2011	2:31:42 AM	SiCl4 post valve closed
9/7/2011	2:31:42 AM	Bypass valve closed
9/7/2011	2:31:42 AM	Bubbler valve closed
9/7/2011	2:31:42 AM	Main Vac valve opened
9/7/2011	2:31:42 AM	Helium MFC set to  0.000000
9/7/2011	2:31:42 AM	H2 MFC set to  0.000000
9/7/2011	2:31:42 AM	BCl3 MFC set to  0.000000
9/7/2011	2:31:42 AM	PHl3 MFC set to  0.000000
9/7/2011	2:31:42 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:31:42 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:31:42 AM	Tube furnace set to 0
9/7/2011	2:32:12 AM	H2 valve closed
9/7/2011	2:32:12 AM	BCl3 valve closed
9/7/2011	2:32:12 AM	PH3 valve closed
9/7/2011	2:32:12 AM	SiCl4 pre valve closed
9/7/2011	2:32:12 AM	SiCl4 post valve closed
9/7/2011	2:32:12 AM	Bypass valve closed
9/7/2011	2:32:12 AM	Bubbler valve closed
9/7/2011	2:32:12 AM	Helium valve opened
9/7/2011	2:32:12 AM	Main Vac valve opened
9/7/2011	2:32:12 AM	Helium MFC set to  20.000000
9/7/2011	2:32:12 AM	H2 MFC set to  0.000000
9/7/2011	2:32:12 AM	BCl3 MFC set to  0.000000
9/7/2011	2:32:12 AM	PHl3 MFC set to  0.000000
9/7/2011	2:32:12 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:32:12 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:32:12 AM	Tube furnace set to 0
9/7/2011	2:32:42 AM	Helium valve closed
9/7/2011	2:32:42 AM	H2 valve closed
9/7/2011	2:32:42 AM	BCl3 valve closed
9/7/2011	2:32:42 AM	PH3 valve closed
9/7/2011	2:32:42 AM	SiCl4 pre valve closed
9/7/2011	2:32:42 AM	SiCl4 post valve closed
9/7/2011	2:32:42 AM	Bypass valve closed
9/7/2011	2:32:42 AM	Bubbler valve closed
9/7/2011	2:32:42 AM	Main Vac valve opened
9/7/2011	2:32:42 AM	Helium MFC set to  0.000000
9/7/2011	2:32:42 AM	H2 MFC set to  0.000000
9/7/2011	2:32:42 AM	BCl3 MFC set to  0.000000
9/7/2011	2:32:42 AM	PHl3 MFC set to  0.000000
9/7/2011	2:32:42 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:32:42 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:32:42 AM	Tube furnace set to 0
9/7/2011	2:33:12 AM	H2 valve closed
9/7/2011	2:33:12 AM	BCl3 valve closed
9/7/2011	2:33:12 AM	PH3 valve closed
9/7/2011	2:33:12 AM	SiCl4 pre valve closed
9/7/2011	2:33:12 AM	SiCl4 post valve closed
9/7/2011	2:33:12 AM	Bypass valve closed
9/7/2011	2:33:12 AM	Bubbler valve closed
9/7/2011	2:33:12 AM	Helium valve opened
9/7/2011	2:33:12 AM	Main Vac valve opened
9/7/2011	2:33:12 AM	Helium MFC set to  20.000000
9/7/2011	2:33:12 AM	H2 MFC set to  0.000000
9/7/2011	2:33:12 AM	BCl3 MFC set to  0.000000
9/7/2011	2:33:12 AM	PHl3 MFC set to  0.000000
9/7/2011	2:33:12 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:33:12 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:33:13 AM	Tube furnace set to 0
9/7/2011	2:33:43 AM	Helium valve closed
9/7/2011	2:33:43 AM	H2 valve closed
9/7/2011	2:33:43 AM	BCl3 valve closed
9/7/2011	2:33:43 AM	PH3 valve closed
9/7/2011	2:33:43 AM	SiCl4 pre valve closed
9/7/2011	2:33:43 AM	SiCl4 post valve closed
9/7/2011	2:33:43 AM	Bypass valve closed
9/7/2011	2:33:43 AM	Bubbler valve closed
9/7/2011	2:33:43 AM	Main Vac valve opened
9/7/2011	2:33:43 AM	Helium MFC set to  0.000000
9/7/2011	2:33:43 AM	H2 MFC set to  0.000000
9/7/2011	2:33:43 AM	BCl3 MFC set to  0.000000
9/7/2011	2:33:43 AM	PHl3 MFC set to  0.000000
9/7/2011	2:33:43 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:33:43 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:33:43 AM	Tube furnace set to 0
9/7/2011	2:34:13 AM	H2 valve closed
9/7/2011	2:34:13 AM	BCl3 valve closed
9/7/2011	2:34:13 AM	PH3 valve closed
9/7/2011	2:34:13 AM	SiCl4 pre valve closed
9/7/2011	2:34:13 AM	SiCl4 post valve closed
9/7/2011	2:34:13 AM	Bypass valve closed
9/7/2011	2:34:13 AM	Bubbler valve closed
9/7/2011	2:34:13 AM	Helium valve opened
9/7/2011	2:34:13 AM	Main Vac valve opened
9/7/2011	2:34:13 AM	Helium MFC set to  20.000000
9/7/2011	2:34:13 AM	H2 MFC set to  0.000000
9/7/2011	2:34:13 AM	BCl3 MFC set to  0.000000
9/7/2011	2:34:13 AM	PHl3 MFC set to  0.000000
9/7/2011	2:34:13 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:34:13 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:34:13 AM	Tube furnace set to 0
9/7/2011	2:34:43 AM	Helium valve closed
9/7/2011	2:34:43 AM	H2 valve closed
9/7/2011	2:34:43 AM	BCl3 valve closed
9/7/2011	2:34:43 AM	PH3 valve closed
9/7/2011	2:34:43 AM	SiCl4 pre valve closed
9/7/2011	2:34:43 AM	SiCl4 post valve closed
9/7/2011	2:34:43 AM	Bypass valve closed
9/7/2011	2:34:43 AM	Bubbler valve closed
9/7/2011	2:34:43 AM	Main Vac valve opened
9/7/2011	2:34:43 AM	Helium MFC set to  0.000000
9/7/2011	2:34:43 AM	H2 MFC set to  0.000000
9/7/2011	2:34:43 AM	BCl3 MFC set to  0.000000
9/7/2011	2:34:43 AM	PHl3 MFC set to  0.000000
9/7/2011	2:34:43 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:34:43 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:34:43 AM	Tube furnace set to 0
9/7/2011	2:35:13 AM	H2 valve closed
9/7/2011	2:35:13 AM	BCl3 valve closed
9/7/2011	2:35:13 AM	PH3 valve closed
9/7/2011	2:35:13 AM	SiCl4 pre valve closed
9/7/2011	2:35:13 AM	SiCl4 post valve closed
9/7/2011	2:35:13 AM	Bypass valve closed
9/7/2011	2:35:13 AM	Bubbler valve closed
9/7/2011	2:35:13 AM	Helium valve opened
9/7/2011	2:35:13 AM	Main Vac valve opened
9/7/2011	2:35:13 AM	Helium MFC set to  20.000000
9/7/2011	2:35:13 AM	H2 MFC set to  0.000000
9/7/2011	2:35:13 AM	BCl3 MFC set to  0.000000
9/7/2011	2:35:13 AM	PHl3 MFC set to  0.000000
9/7/2011	2:35:13 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:35:13 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:35:13 AM	Tube furnace set to 0
9/7/2011	2:35:44 AM	Helium valve closed
9/7/2011	2:35:44 AM	H2 valve closed
9/7/2011	2:35:44 AM	BCl3 valve closed
9/7/2011	2:35:44 AM	PH3 valve closed
9/7/2011	2:35:44 AM	SiCl4 pre valve closed
9/7/2011	2:35:44 AM	SiCl4 post valve closed
9/7/2011	2:35:44 AM	Bypass valve closed
9/7/2011	2:35:44 AM	Bubbler valve closed
9/7/2011	2:35:44 AM	Main Vac valve opened
9/7/2011	2:35:44 AM	Helium MFC set to  0.000000
9/7/2011	2:35:44 AM	H2 MFC set to  0.000000
9/7/2011	2:35:44 AM	BCl3 MFC set to  0.000000
9/7/2011	2:35:44 AM	PHl3 MFC set to  0.000000
9/7/2011	2:35:44 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:35:44 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:35:44 AM	Tube furnace set to 0
9/7/2011	2:36:14 AM	H2 valve closed
9/7/2011	2:36:14 AM	BCl3 valve closed
9/7/2011	2:36:14 AM	PH3 valve closed
9/7/2011	2:36:14 AM	SiCl4 pre valve closed
9/7/2011	2:36:14 AM	SiCl4 post valve closed
9/7/2011	2:36:14 AM	Bypass valve closed
9/7/2011	2:36:14 AM	Bubbler valve closed
9/7/2011	2:36:14 AM	Helium valve opened
9/7/2011	2:36:14 AM	Main Vac valve opened
9/7/2011	2:36:14 AM	Helium MFC set to  20.000000
9/7/2011	2:36:14 AM	H2 MFC set to  0.000000
9/7/2011	2:36:14 AM	BCl3 MFC set to  0.000000
9/7/2011	2:36:14 AM	PHl3 MFC set to  0.000000
9/7/2011	2:36:14 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:36:14 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:36:14 AM	Tube furnace set to 0
9/7/2011	2:36:44 AM	Helium valve closed
9/7/2011	2:36:44 AM	H2 valve closed
9/7/2011	2:36:44 AM	BCl3 valve closed
9/7/2011	2:36:44 AM	PH3 valve closed
9/7/2011	2:36:44 AM	SiCl4 pre valve closed
9/7/2011	2:36:44 AM	SiCl4 post valve closed
9/7/2011	2:36:44 AM	Bypass valve closed
9/7/2011	2:36:44 AM	Bubbler valve closed
9/7/2011	2:36:44 AM	Main Vac valve opened
9/7/2011	2:36:44 AM	Helium MFC set to  0.000000
9/7/2011	2:36:44 AM	H2 MFC set to  0.000000
9/7/2011	2:36:44 AM	BCl3 MFC set to  0.000000
9/7/2011	2:36:44 AM	PHl3 MFC set to  0.000000
9/7/2011	2:36:44 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:36:44 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:36:44 AM	Tube furnace set to 0
9/7/2011	2:37:14 AM	H2 valve closed
9/7/2011	2:37:14 AM	BCl3 valve closed
9/7/2011	2:37:14 AM	PH3 valve closed
9/7/2011	2:37:14 AM	SiCl4 pre valve closed
9/7/2011	2:37:14 AM	SiCl4 post valve closed
9/7/2011	2:37:14 AM	Bypass valve closed
9/7/2011	2:37:14 AM	Bubbler valve closed
9/7/2011	2:37:14 AM	Helium valve opened
9/7/2011	2:37:14 AM	Main Vac valve opened
9/7/2011	2:37:14 AM	Helium MFC set to  20.000000
9/7/2011	2:37:14 AM	H2 MFC set to  0.000000
9/7/2011	2:37:14 AM	BCl3 MFC set to  0.000000
9/7/2011	2:37:14 AM	PHl3 MFC set to  0.000000
9/7/2011	2:37:14 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:37:14 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:37:14 AM	Tube furnace set to 0
9/7/2011	2:37:44 AM	Helium valve closed
9/7/2011	2:37:44 AM	H2 valve closed
9/7/2011	2:37:44 AM	BCl3 valve closed
9/7/2011	2:37:44 AM	PH3 valve closed
9/7/2011	2:37:44 AM	SiCl4 pre valve closed
9/7/2011	2:37:44 AM	SiCl4 post valve closed
9/7/2011	2:37:44 AM	Bypass valve closed
9/7/2011	2:37:44 AM	Bubbler valve closed
9/7/2011	2:37:44 AM	Main Vac valve opened
9/7/2011	2:37:44 AM	Helium MFC set to  0.000000
9/7/2011	2:37:44 AM	H2 MFC set to  0.000000
9/7/2011	2:37:44 AM	BCl3 MFC set to  0.000000
9/7/2011	2:37:44 AM	PHl3 MFC set to  0.000000
9/7/2011	2:37:44 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:37:44 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:37:45 AM	Tube furnace set to 0
9/7/2011	2:38:15 AM	H2 valve closed
9/7/2011	2:38:15 AM	BCl3 valve closed
9/7/2011	2:38:15 AM	PH3 valve closed
9/7/2011	2:38:15 AM	SiCl4 pre valve closed
9/7/2011	2:38:15 AM	SiCl4 post valve closed
9/7/2011	2:38:15 AM	Bypass valve closed
9/7/2011	2:38:15 AM	Bubbler valve closed
9/7/2011	2:38:15 AM	Helium valve opened
9/7/2011	2:38:15 AM	Main Vac valve opened
9/7/2011	2:38:15 AM	Helium MFC set to  20.000000
9/7/2011	2:38:15 AM	H2 MFC set to  0.000000
9/7/2011	2:38:15 AM	BCl3 MFC set to  0.000000
9/7/2011	2:38:15 AM	PHl3 MFC set to  0.000000
9/7/2011	2:38:15 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:38:15 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:38:15 AM	Tube furnace set to 0
9/7/2011	2:38:45 AM	Helium valve closed
9/7/2011	2:38:45 AM	H2 valve closed
9/7/2011	2:38:45 AM	BCl3 valve closed
9/7/2011	2:38:45 AM	PH3 valve closed
9/7/2011	2:38:45 AM	SiCl4 pre valve closed
9/7/2011	2:38:45 AM	SiCl4 post valve closed
9/7/2011	2:38:45 AM	Bypass valve closed
9/7/2011	2:38:45 AM	Bubbler valve closed
9/7/2011	2:38:45 AM	Main Vac valve opened
9/7/2011	2:38:45 AM	Helium MFC set to  0.000000
9/7/2011	2:38:45 AM	H2 MFC set to  0.000000
9/7/2011	2:38:45 AM	BCl3 MFC set to  0.000000
9/7/2011	2:38:45 AM	PHl3 MFC set to  0.000000
9/7/2011	2:38:45 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:38:45 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:38:45 AM	Tube furnace set to 0
9/7/2011	2:39:15 AM	H2 valve closed
9/7/2011	2:39:15 AM	BCl3 valve closed
9/7/2011	2:39:15 AM	PH3 valve closed
9/7/2011	2:39:15 AM	SiCl4 pre valve closed
9/7/2011	2:39:15 AM	SiCl4 post valve closed
9/7/2011	2:39:15 AM	Bypass valve closed
9/7/2011	2:39:15 AM	Bubbler valve closed
9/7/2011	2:39:15 AM	Helium valve opened
9/7/2011	2:39:15 AM	Main Vac valve opened
9/7/2011	2:39:15 AM	Helium MFC set to  20.000000
9/7/2011	2:39:15 AM	H2 MFC set to  0.000000
9/7/2011	2:39:15 AM	BCl3 MFC set to  0.000000
9/7/2011	2:39:15 AM	PHl3 MFC set to  0.000000
9/7/2011	2:39:15 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:39:15 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:39:15 AM	Tube furnace set to 0
9/7/2011	2:39:45 AM	Helium valve closed
9/7/2011	2:39:45 AM	H2 valve closed
9/7/2011	2:39:45 AM	BCl3 valve closed
9/7/2011	2:39:45 AM	PH3 valve closed
9/7/2011	2:39:45 AM	SiCl4 pre valve closed
9/7/2011	2:39:45 AM	SiCl4 post valve closed
9/7/2011	2:39:45 AM	Bypass valve closed
9/7/2011	2:39:45 AM	Bubbler valve closed
9/7/2011	2:39:45 AM	Main Vac valve opened
9/7/2011	2:39:45 AM	Helium MFC set to  0.000000
9/7/2011	2:39:45 AM	H2 MFC set to  0.000000
9/7/2011	2:39:45 AM	BCl3 MFC set to  0.000000
9/7/2011	2:39:45 AM	PHl3 MFC set to  0.000000
9/7/2011	2:39:45 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:39:45 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:39:45 AM	Tube furnace set to 0
9/7/2011	2:39:46 AM	Run finished at 2:39 AM
9/7/2011	2:39:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	2:39:57 AM	Recipe started at 2:39 AM
9/7/2011	2:39:57 AM	Helium valve closed
9/7/2011	2:39:57 AM	H2 valve closed
9/7/2011	2:39:57 AM	BCl3 valve closed
9/7/2011	2:39:57 AM	PH3 valve closed
9/7/2011	2:39:57 AM	SiCl4 pre valve closed
9/7/2011	2:39:57 AM	SiCl4 post valve closed
9/7/2011	2:39:57 AM	Bypass valve closed
9/7/2011	2:39:57 AM	Bubbler valve closed
9/7/2011	2:39:57 AM	Main Vac valve opened
9/7/2011	2:39:57 AM	Helium MFC set to  0.000000
9/7/2011	2:39:57 AM	H2 MFC set to  0.000000
9/7/2011	2:39:57 AM	BCl3 MFC set to  0.000000
9/7/2011	2:39:57 AM	PHl3 MFC set to  0.000000
9/7/2011	2:39:57 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:39:57 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:39:57 AM	Tube furnace set to 150
9/7/2011	2:40:27 AM	H2 valve closed
9/7/2011	2:40:27 AM	BCl3 valve closed
9/7/2011	2:40:27 AM	PH3 valve closed
9/7/2011	2:40:27 AM	SiCl4 pre valve closed
9/7/2011	2:40:27 AM	SiCl4 post valve closed
9/7/2011	2:40:27 AM	Bypass valve closed
9/7/2011	2:40:27 AM	Bubbler valve closed
9/7/2011	2:40:27 AM	Helium valve opened
9/7/2011	2:40:27 AM	Main Vac valve opened
9/7/2011	2:40:27 AM	Helium MFC set to  20.000000
9/7/2011	2:40:27 AM	H2 MFC set to  0.000000
9/7/2011	2:40:27 AM	BCl3 MFC set to  0.000000
9/7/2011	2:40:27 AM	PHl3 MFC set to  0.000000
9/7/2011	2:40:27 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:40:27 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:40:27 AM	Tube furnace set to 150
9/7/2011	2:40:57 AM	Helium valve closed
9/7/2011	2:40:57 AM	H2 valve closed
9/7/2011	2:40:57 AM	BCl3 valve closed
9/7/2011	2:40:57 AM	PH3 valve closed
9/7/2011	2:40:57 AM	SiCl4 pre valve closed
9/7/2011	2:40:57 AM	SiCl4 post valve closed
9/7/2011	2:40:57 AM	Bypass valve closed
9/7/2011	2:40:57 AM	Bubbler valve closed
9/7/2011	2:40:57 AM	Main Vac valve opened
9/7/2011	2:40:57 AM	Helium MFC set to  0.000000
9/7/2011	2:40:57 AM	H2 MFC set to  0.000000
9/7/2011	2:40:57 AM	BCl3 MFC set to  0.000000
9/7/2011	2:40:57 AM	PHl3 MFC set to  0.000000
9/7/2011	2:40:57 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:40:57 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:40:58 AM	Tube furnace set to 150
9/7/2011	2:41:28 AM	H2 valve closed
9/7/2011	2:41:28 AM	BCl3 valve closed
9/7/2011	2:41:28 AM	PH3 valve closed
9/7/2011	2:41:28 AM	SiCl4 pre valve closed
9/7/2011	2:41:28 AM	SiCl4 post valve closed
9/7/2011	2:41:28 AM	Bypass valve closed
9/7/2011	2:41:28 AM	Bubbler valve closed
9/7/2011	2:41:28 AM	Helium valve opened
9/7/2011	2:41:28 AM	Main Vac valve opened
9/7/2011	2:41:28 AM	Helium MFC set to  20.000000
9/7/2011	2:41:28 AM	H2 MFC set to  0.000000
9/7/2011	2:41:28 AM	BCl3 MFC set to  0.000000
9/7/2011	2:41:28 AM	PHl3 MFC set to  0.000000
9/7/2011	2:41:28 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:41:28 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:41:28 AM	Tube furnace set to 150
9/7/2011	2:41:58 AM	Helium valve closed
9/7/2011	2:41:58 AM	H2 valve closed
9/7/2011	2:41:58 AM	BCl3 valve closed
9/7/2011	2:41:58 AM	PH3 valve closed
9/7/2011	2:41:58 AM	SiCl4 pre valve closed
9/7/2011	2:41:58 AM	SiCl4 post valve closed
9/7/2011	2:41:58 AM	Bypass valve closed
9/7/2011	2:41:58 AM	Bubbler valve closed
9/7/2011	2:41:58 AM	Main Vac valve opened
9/7/2011	2:41:58 AM	Helium MFC set to  0.000000
9/7/2011	2:41:58 AM	H2 MFC set to  0.000000
9/7/2011	2:41:58 AM	BCl3 MFC set to  0.000000
9/7/2011	2:41:58 AM	PHl3 MFC set to  0.000000
9/7/2011	2:41:58 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:41:58 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:41:58 AM	Tube furnace set to 150
9/7/2011	2:42:28 AM	H2 valve closed
9/7/2011	2:42:28 AM	BCl3 valve closed
9/7/2011	2:42:28 AM	PH3 valve closed
9/7/2011	2:42:28 AM	SiCl4 pre valve closed
9/7/2011	2:42:28 AM	SiCl4 post valve closed
9/7/2011	2:42:28 AM	Bypass valve closed
9/7/2011	2:42:28 AM	Bubbler valve closed
9/7/2011	2:42:28 AM	Helium valve opened
9/7/2011	2:42:28 AM	Main Vac valve opened
9/7/2011	2:42:28 AM	Helium MFC set to  20.000000
9/7/2011	2:42:28 AM	H2 MFC set to  0.000000
9/7/2011	2:42:28 AM	BCl3 MFC set to  0.000000
9/7/2011	2:42:28 AM	PHl3 MFC set to  0.000000
9/7/2011	2:42:28 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:42:28 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:42:28 AM	Tube furnace set to 150
9/7/2011	2:42:58 AM	Helium valve closed
9/7/2011	2:42:58 AM	H2 valve closed
9/7/2011	2:42:58 AM	BCl3 valve closed
9/7/2011	2:42:58 AM	PH3 valve closed
9/7/2011	2:42:58 AM	SiCl4 pre valve closed
9/7/2011	2:42:58 AM	SiCl4 post valve closed
9/7/2011	2:42:58 AM	Bypass valve closed
9/7/2011	2:42:58 AM	Bubbler valve closed
9/7/2011	2:42:58 AM	Main Vac valve opened
9/7/2011	2:42:58 AM	Helium MFC set to  0.000000
9/7/2011	2:42:58 AM	H2 MFC set to  0.000000
9/7/2011	2:42:58 AM	BCl3 MFC set to  0.000000
9/7/2011	2:42:58 AM	PHl3 MFC set to  0.000000
9/7/2011	2:42:58 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:42:58 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:42:58 AM	Tube furnace set to 150
9/7/2011	2:43:28 AM	H2 valve closed
9/7/2011	2:43:28 AM	BCl3 valve closed
9/7/2011	2:43:28 AM	PH3 valve closed
9/7/2011	2:43:28 AM	SiCl4 pre valve closed
9/7/2011	2:43:28 AM	SiCl4 post valve closed
9/7/2011	2:43:28 AM	Bypass valve closed
9/7/2011	2:43:28 AM	Bubbler valve closed
9/7/2011	2:43:28 AM	Helium valve opened
9/7/2011	2:43:28 AM	Main Vac valve opened
9/7/2011	2:43:28 AM	Helium MFC set to  20.000000
9/7/2011	2:43:28 AM	H2 MFC set to  0.000000
9/7/2011	2:43:28 AM	BCl3 MFC set to  0.000000
9/7/2011	2:43:28 AM	PHl3 MFC set to  0.000000
9/7/2011	2:43:28 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:43:28 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:43:29 AM	Tube furnace set to 150
9/7/2011	2:43:59 AM	Helium valve closed
9/7/2011	2:43:59 AM	H2 valve closed
9/7/2011	2:43:59 AM	BCl3 valve closed
9/7/2011	2:43:59 AM	PH3 valve closed
9/7/2011	2:43:59 AM	SiCl4 pre valve closed
9/7/2011	2:43:59 AM	SiCl4 post valve closed
9/7/2011	2:43:59 AM	Bypass valve closed
9/7/2011	2:43:59 AM	Bubbler valve closed
9/7/2011	2:43:59 AM	Main Vac valve opened
9/7/2011	2:43:59 AM	Helium MFC set to  0.000000
9/7/2011	2:43:59 AM	H2 MFC set to  0.000000
9/7/2011	2:43:59 AM	BCl3 MFC set to  0.000000
9/7/2011	2:43:59 AM	PHl3 MFC set to  0.000000
9/7/2011	2:43:59 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:43:59 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:43:59 AM	Tube furnace set to 150
9/7/2011	2:44:29 AM	H2 valve closed
9/7/2011	2:44:29 AM	BCl3 valve closed
9/7/2011	2:44:29 AM	PH3 valve closed
9/7/2011	2:44:29 AM	SiCl4 pre valve closed
9/7/2011	2:44:29 AM	SiCl4 post valve closed
9/7/2011	2:44:29 AM	Bypass valve closed
9/7/2011	2:44:29 AM	Bubbler valve closed
9/7/2011	2:44:29 AM	Helium valve opened
9/7/2011	2:44:29 AM	Main Vac valve opened
9/7/2011	2:44:29 AM	Helium MFC set to  20.000000
9/7/2011	2:44:29 AM	H2 MFC set to  0.000000
9/7/2011	2:44:29 AM	BCl3 MFC set to  0.000000
9/7/2011	2:44:29 AM	PHl3 MFC set to  0.000000
9/7/2011	2:44:29 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:44:29 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:44:29 AM	Tube furnace set to 150
9/7/2011	2:44:59 AM	Helium valve closed
9/7/2011	2:44:59 AM	H2 valve closed
9/7/2011	2:44:59 AM	BCl3 valve closed
9/7/2011	2:44:59 AM	PH3 valve closed
9/7/2011	2:44:59 AM	SiCl4 pre valve closed
9/7/2011	2:44:59 AM	SiCl4 post valve closed
9/7/2011	2:44:59 AM	Bypass valve closed
9/7/2011	2:44:59 AM	Bubbler valve closed
9/7/2011	2:44:59 AM	Main Vac valve opened
9/7/2011	2:44:59 AM	Helium MFC set to  0.000000
9/7/2011	2:44:59 AM	H2 MFC set to  0.000000
9/7/2011	2:44:59 AM	BCl3 MFC set to  0.000000
9/7/2011	2:44:59 AM	PHl3 MFC set to  0.000000
9/7/2011	2:44:59 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:44:59 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:44:59 AM	Tube furnace set to 150
9/7/2011	2:45:29 AM	H2 valve closed
9/7/2011	2:45:29 AM	BCl3 valve closed
9/7/2011	2:45:29 AM	PH3 valve closed
9/7/2011	2:45:29 AM	SiCl4 pre valve closed
9/7/2011	2:45:29 AM	SiCl4 post valve closed
9/7/2011	2:45:29 AM	Bypass valve closed
9/7/2011	2:45:29 AM	Bubbler valve closed
9/7/2011	2:45:29 AM	Helium valve opened
9/7/2011	2:45:29 AM	Main Vac valve opened
9/7/2011	2:45:29 AM	Helium MFC set to  20.000000
9/7/2011	2:45:29 AM	H2 MFC set to  0.000000
9/7/2011	2:45:29 AM	BCl3 MFC set to  0.000000
9/7/2011	2:45:29 AM	PHl3 MFC set to  0.000000
9/7/2011	2:45:29 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:45:29 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:45:29 AM	Tube furnace set to 150
9/7/2011	2:45:59 AM	Helium valve closed
9/7/2011	2:45:59 AM	H2 valve closed
9/7/2011	2:45:59 AM	BCl3 valve closed
9/7/2011	2:45:59 AM	PH3 valve closed
9/7/2011	2:45:59 AM	SiCl4 pre valve closed
9/7/2011	2:45:59 AM	SiCl4 post valve closed
9/7/2011	2:45:59 AM	Bypass valve closed
9/7/2011	2:45:59 AM	Bubbler valve closed
9/7/2011	2:45:59 AM	Main Vac valve opened
9/7/2011	2:45:59 AM	Helium MFC set to  0.000000
9/7/2011	2:45:59 AM	H2 MFC set to  0.000000
9/7/2011	2:45:59 AM	BCl3 MFC set to  0.000000
9/7/2011	2:45:59 AM	PHl3 MFC set to  0.000000
9/7/2011	2:45:59 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:45:59 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:46:00 AM	Tube furnace set to 150
9/7/2011	2:46:30 AM	H2 valve closed
9/7/2011	2:46:30 AM	BCl3 valve closed
9/7/2011	2:46:30 AM	PH3 valve closed
9/7/2011	2:46:30 AM	SiCl4 pre valve closed
9/7/2011	2:46:30 AM	SiCl4 post valve closed
9/7/2011	2:46:30 AM	Bypass valve closed
9/7/2011	2:46:30 AM	Bubbler valve closed
9/7/2011	2:46:30 AM	Helium valve opened
9/7/2011	2:46:30 AM	Main Vac valve opened
9/7/2011	2:46:30 AM	Helium MFC set to  20.000000
9/7/2011	2:46:30 AM	H2 MFC set to  0.000000
9/7/2011	2:46:30 AM	BCl3 MFC set to  0.000000
9/7/2011	2:46:30 AM	PHl3 MFC set to  0.000000
9/7/2011	2:46:30 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:46:30 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:46:30 AM	Tube furnace set to 150
9/7/2011	2:47:00 AM	Helium valve closed
9/7/2011	2:47:00 AM	H2 valve closed
9/7/2011	2:47:00 AM	BCl3 valve closed
9/7/2011	2:47:00 AM	PH3 valve closed
9/7/2011	2:47:00 AM	SiCl4 pre valve closed
9/7/2011	2:47:00 AM	SiCl4 post valve closed
9/7/2011	2:47:00 AM	Bypass valve closed
9/7/2011	2:47:00 AM	Bubbler valve closed
9/7/2011	2:47:00 AM	Main Vac valve opened
9/7/2011	2:47:00 AM	Helium MFC set to  0.000000
9/7/2011	2:47:00 AM	H2 MFC set to  0.000000
9/7/2011	2:47:00 AM	BCl3 MFC set to  0.000000
9/7/2011	2:47:00 AM	PHl3 MFC set to  0.000000
9/7/2011	2:47:00 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:47:00 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:47:00 AM	Tube furnace set to 150
9/7/2011	2:47:30 AM	H2 valve closed
9/7/2011	2:47:30 AM	BCl3 valve closed
9/7/2011	2:47:30 AM	PH3 valve closed
9/7/2011	2:47:30 AM	SiCl4 pre valve closed
9/7/2011	2:47:30 AM	SiCl4 post valve closed
9/7/2011	2:47:30 AM	Bypass valve closed
9/7/2011	2:47:30 AM	Bubbler valve closed
9/7/2011	2:47:30 AM	Helium valve opened
9/7/2011	2:47:30 AM	Main Vac valve opened
9/7/2011	2:47:30 AM	Helium MFC set to  20.000000
9/7/2011	2:47:30 AM	H2 MFC set to  0.000000
9/7/2011	2:47:30 AM	BCl3 MFC set to  0.000000
9/7/2011	2:47:30 AM	PHl3 MFC set to  0.000000
9/7/2011	2:47:30 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:47:30 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:47:30 AM	Tube furnace set to 150
9/7/2011	2:48:00 AM	Helium valve closed
9/7/2011	2:48:00 AM	H2 valve closed
9/7/2011	2:48:00 AM	BCl3 valve closed
9/7/2011	2:48:00 AM	PH3 valve closed
9/7/2011	2:48:00 AM	SiCl4 pre valve closed
9/7/2011	2:48:00 AM	SiCl4 post valve closed
9/7/2011	2:48:00 AM	Bypass valve closed
9/7/2011	2:48:00 AM	Bubbler valve closed
9/7/2011	2:48:00 AM	Main Vac valve opened
9/7/2011	2:48:00 AM	Helium MFC set to  0.000000
9/7/2011	2:48:00 AM	H2 MFC set to  0.000000
9/7/2011	2:48:00 AM	BCl3 MFC set to  0.000000
9/7/2011	2:48:00 AM	PHl3 MFC set to  0.000000
9/7/2011	2:48:00 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:48:00 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:48:00 AM	Tube furnace set to 150
9/7/2011	2:48:30 AM	H2 valve closed
9/7/2011	2:48:30 AM	BCl3 valve closed
9/7/2011	2:48:30 AM	PH3 valve closed
9/7/2011	2:48:30 AM	SiCl4 pre valve closed
9/7/2011	2:48:30 AM	SiCl4 post valve closed
9/7/2011	2:48:30 AM	Bypass valve closed
9/7/2011	2:48:30 AM	Bubbler valve closed
9/7/2011	2:48:30 AM	Helium valve opened
9/7/2011	2:48:30 AM	Main Vac valve opened
9/7/2011	2:48:30 AM	Helium MFC set to  20.000000
9/7/2011	2:48:30 AM	H2 MFC set to  0.000000
9/7/2011	2:48:30 AM	BCl3 MFC set to  0.000000
9/7/2011	2:48:30 AM	PHl3 MFC set to  0.000000
9/7/2011	2:48:30 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:48:30 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:48:31 AM	Tube furnace set to 150
9/7/2011	2:49:01 AM	Helium valve closed
9/7/2011	2:49:01 AM	H2 valve closed
9/7/2011	2:49:01 AM	BCl3 valve closed
9/7/2011	2:49:01 AM	PH3 valve closed
9/7/2011	2:49:01 AM	SiCl4 pre valve closed
9/7/2011	2:49:01 AM	SiCl4 post valve closed
9/7/2011	2:49:01 AM	Bypass valve closed
9/7/2011	2:49:01 AM	Bubbler valve closed
9/7/2011	2:49:01 AM	Main Vac valve opened
9/7/2011	2:49:01 AM	Helium MFC set to  0.000000
9/7/2011	2:49:01 AM	H2 MFC set to  0.000000
9/7/2011	2:49:01 AM	BCl3 MFC set to  0.000000
9/7/2011	2:49:01 AM	PHl3 MFC set to  0.000000
9/7/2011	2:49:01 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:49:01 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:49:01 AM	Tube furnace set to 150
9/7/2011	2:49:31 AM	H2 valve closed
9/7/2011	2:49:31 AM	BCl3 valve closed
9/7/2011	2:49:31 AM	PH3 valve closed
9/7/2011	2:49:31 AM	SiCl4 pre valve closed
9/7/2011	2:49:31 AM	SiCl4 post valve closed
9/7/2011	2:49:31 AM	Bypass valve closed
9/7/2011	2:49:31 AM	Bubbler valve closed
9/7/2011	2:49:31 AM	Helium valve opened
9/7/2011	2:49:31 AM	Main Vac valve opened
9/7/2011	2:49:31 AM	Helium MFC set to  20.000000
9/7/2011	2:49:31 AM	H2 MFC set to  0.000000
9/7/2011	2:49:31 AM	BCl3 MFC set to  0.000000
9/7/2011	2:49:31 AM	PHl3 MFC set to  0.000000
9/7/2011	2:49:31 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:49:31 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:49:31 AM	Tube furnace set to 150
9/7/2011	2:50:01 AM	Helium valve closed
9/7/2011	2:50:01 AM	H2 valve closed
9/7/2011	2:50:01 AM	BCl3 valve closed
9/7/2011	2:50:01 AM	PH3 valve closed
9/7/2011	2:50:01 AM	SiCl4 pre valve closed
9/7/2011	2:50:01 AM	SiCl4 post valve closed
9/7/2011	2:50:01 AM	Bypass valve closed
9/7/2011	2:50:01 AM	Bubbler valve closed
9/7/2011	2:50:01 AM	Main Vac valve opened
9/7/2011	2:50:01 AM	Helium MFC set to  0.000000
9/7/2011	2:50:01 AM	H2 MFC set to  0.000000
9/7/2011	2:50:01 AM	BCl3 MFC set to  0.000000
9/7/2011	2:50:01 AM	PHl3 MFC set to  0.000000
9/7/2011	2:50:01 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:50:01 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:50:01 AM	Tube furnace set to 150
9/7/2011	2:50:02 AM	Run finished at 2:50 AM
9/7/2011	2:50:31 AM	Recipe started at 2:50 AM
9/7/2011	2:50:31 AM	Helium valve closed
9/7/2011	2:50:31 AM	H2 valve closed
9/7/2011	2:50:31 AM	BCl3 valve closed
9/7/2011	2:50:31 AM	PH3 valve closed
9/7/2011	2:50:31 AM	SiCl4 pre valve closed
9/7/2011	2:50:31 AM	SiCl4 post valve closed
9/7/2011	2:50:31 AM	Main Vac valve closed
9/7/2011	2:50:31 AM	Bypass valve closed
9/7/2011	2:50:31 AM	Bubbler valve closed
9/7/2011	2:50:31 AM	Helium MFC set to  0.000000
9/7/2011	2:50:31 AM	H2 MFC set to  0.000000
9/7/2011	2:50:31 AM	BCl3 MFC set to  0.000000
9/7/2011	2:50:31 AM	PHl3 MFC set to  0.000000
9/7/2011	2:50:31 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:50:31 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:50:31 AM	Tube furnace set to 0
9/7/2011	2:50:34 AM	Helium valve closed
9/7/2011	2:50:34 AM	BCl3 valve closed
9/7/2011	2:50:34 AM	PH3 valve closed
9/7/2011	2:50:34 AM	SiCl4 pre valve closed
9/7/2011	2:50:34 AM	SiCl4 post valve closed
9/7/2011	2:50:34 AM	Main Vac valve closed
9/7/2011	2:50:34 AM	Bypass valve closed
9/7/2011	2:50:34 AM	Bubbler valve closed
9/7/2011	2:50:34 AM	H2 valve opened
9/7/2011	2:50:34 AM	Helium MFC set to  0.000000
9/7/2011	2:50:34 AM	H2 MFC set to  500.000000
9/7/2011	2:50:34 AM	BCl3 MFC set to  0.000000
9/7/2011	2:50:34 AM	PHl3 MFC set to  0.000000
9/7/2011	2:50:34 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:50:34 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:50:34 AM	Tube furnace set to 0
9/7/2011	2:51:34 AM	Helium valve closed
9/7/2011	2:51:34 AM	BCl3 valve closed
9/7/2011	2:51:34 AM	PH3 valve closed
9/7/2011	2:51:34 AM	SiCl4 pre valve closed
9/7/2011	2:51:34 AM	SiCl4 post valve closed
9/7/2011	2:51:34 AM	Main Vac valve closed
9/7/2011	2:51:34 AM	Bypass valve closed
9/7/2011	2:51:34 AM	H2 valve opened
9/7/2011	2:51:34 AM	Bubbler valve opened
9/7/2011	2:51:34 AM	Helium MFC set to  0.000000
9/7/2011	2:51:34 AM	H2 MFC set to  500.000000
9/7/2011	2:51:34 AM	BCl3 MFC set to  0.000000
9/7/2011	2:51:34 AM	PHl3 MFC set to  0.000000
9/7/2011	2:51:34 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:51:34 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:51:34 AM	Tube furnace set to 0
9/7/2011	2:51:35 AM	Helium valve closed
9/7/2011	2:51:35 AM	BCl3 valve closed
9/7/2011	2:51:35 AM	PH3 valve closed
9/7/2011	2:51:35 AM	SiCl4 pre valve closed
9/7/2011	2:51:35 AM	SiCl4 post valve closed
9/7/2011	2:51:35 AM	Main Vac valve closed
9/7/2011	2:51:35 AM	Bypass valve closed
9/7/2011	2:51:35 AM	H2 valve opened
9/7/2011	2:51:35 AM	Bubbler valve opened
9/7/2011	2:51:35 AM	Helium MFC set to  0.000000
9/7/2011	2:51:35 AM	H2 MFC set to  500.000000
9/7/2011	2:51:35 AM	BCl3 MFC set to  0.000000
9/7/2011	2:51:35 AM	PHl3 MFC set to  0.000000
9/7/2011	2:51:35 AM	SiCl4 MFC set to  0.000000
9/7/2011	2:51:35 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:51:35 AM	Tube furnace set to 1000
9/7/2011	3:11:35 AM	Helium valve closed
9/7/2011	3:11:35 AM	PH3 valve closed
9/7/2011	3:11:35 AM	Main Vac valve closed
9/7/2011	3:11:35 AM	Bypass valve closed
9/7/2011	3:11:35 AM	H2 valve opened
9/7/2011	3:11:35 AM	BCl3 valve opened
9/7/2011	3:11:35 AM	SiCl4 pre valve opened
9/7/2011	3:11:35 AM	SiCl4 post valve opened
9/7/2011	3:11:35 AM	Bubbler valve opened
9/7/2011	3:11:35 AM	Helium MFC set to  0.000000
9/7/2011	3:11:35 AM	H2 MFC set to  500.000000
9/7/2011	3:11:35 AM	BCl3 MFC set to  2.100000
9/7/2011	3:11:35 AM	PHl3 MFC set to  0.000000
9/7/2011	3:11:35 AM	SiCl4 MFC set to  50.000000
9/7/2011	3:11:35 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:11:35 AM	Tube furnace set to 1000
9/7/2011	3:28:15 AM	Helium valve closed
9/7/2011	3:28:15 AM	BCl3 valve closed
9/7/2011	3:28:15 AM	PH3 valve closed
9/7/2011	3:28:15 AM	SiCl4 pre valve closed
9/7/2011	3:28:15 AM	SiCl4 post valve closed
9/7/2011	3:28:15 AM	Main Vac valve closed
9/7/2011	3:28:15 AM	Bypass valve closed
9/7/2011	3:28:15 AM	H2 valve opened
9/7/2011	3:28:15 AM	Bubbler valve opened
9/7/2011	3:28:15 AM	Helium MFC set to  0.000000
9/7/2011	3:28:15 AM	H2 MFC set to  500.000000
9/7/2011	3:28:15 AM	BCl3 MFC set to  0.000000
9/7/2011	3:28:15 AM	PHl3 MFC set to  0.000000
9/7/2011	3:28:15 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:28:15 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:28:15 AM	Tube furnace set to 750
9/7/2011	3:33:15 AM	H2 valve closed
9/7/2011	3:33:15 AM	BCl3 valve closed
9/7/2011	3:33:15 AM	PH3 valve closed
9/7/2011	3:33:16 AM	SiCl4 pre valve closed
9/7/2011	3:33:16 AM	SiCl4 post valve closed
9/7/2011	3:33:16 AM	Main Vac valve closed
9/7/2011	3:33:16 AM	Bypass valve closed
9/7/2011	3:33:16 AM	Helium valve opened
9/7/2011	3:33:16 AM	Bubbler valve opened
9/7/2011	3:33:16 AM	Helium MFC set to  500.000000
9/7/2011	3:33:16 AM	H2 MFC set to  0.000000
9/7/2011	3:33:16 AM	BCl3 MFC set to  0.000000
9/7/2011	3:33:16 AM	PHl3 MFC set to  0.000000
9/7/2011	3:33:16 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:33:16 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:33:16 AM	Tube furnace set to 0
9/7/2011	3:34:15 AM	Helium valve closed
9/7/2011	3:34:15 AM	H2 valve closed
9/7/2011	3:34:15 AM	BCl3 valve closed
9/7/2011	3:34:15 AM	PH3 valve closed
9/7/2011	3:34:15 AM	SiCl4 pre valve closed
9/7/2011	3:34:15 AM	SiCl4 post valve closed
9/7/2011	3:34:15 AM	Main Vac valve closed
9/7/2011	3:34:15 AM	Bypass valve closed
9/7/2011	3:34:15 AM	Bubbler valve closed
9/7/2011	3:34:15 AM	Helium MFC set to  0.000000
9/7/2011	3:34:15 AM	H2 MFC set to  0.000000
9/7/2011	3:34:15 AM	BCl3 MFC set to  0.000000
9/7/2011	3:34:15 AM	PHl3 MFC set to  0.000000
9/7/2011	3:34:15 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:34:15 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:34:15 AM	Tube furnace set to 0
9/7/2011	3:34:16 AM	Run finished at 3:34 AM
9/7/2011	3:44:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	3:44:23 AM	Recipe started at 3:44 AM
9/7/2011	3:44:23 AM	Helium valve closed
9/7/2011	3:44:23 AM	H2 valve closed
9/7/2011	3:44:23 AM	BCl3 valve closed
9/7/2011	3:44:23 AM	PH3 valve closed
9/7/2011	3:44:23 AM	SiCl4 pre valve closed
9/7/2011	3:44:23 AM	SiCl4 post valve closed
9/7/2011	3:44:23 AM	Main Vac valve closed
9/7/2011	3:44:23 AM	Bubbler valve closed
9/7/2011	3:44:23 AM	Bypass valve opened
9/7/2011	3:44:23 AM	Helium MFC set to  0.000000
9/7/2011	3:44:23 AM	H2 MFC set to  0.000000
9/7/2011	3:44:23 AM	BCl3 MFC set to  0.000000
9/7/2011	3:44:23 AM	PHl3 MFC set to  0.000000
9/7/2011	3:44:23 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:44:23 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:44:24 AM	Tube furnace set to 0
9/7/2011	3:45:32 AM	Helium valve closed
9/7/2011	3:45:32 AM	H2 valve closed
9/7/2011	3:45:32 AM	BCl3 valve closed
9/7/2011	3:45:32 AM	PH3 valve closed
9/7/2011	3:45:32 AM	SiCl4 pre valve closed
9/7/2011	3:45:32 AM	SiCl4 post valve closed
9/7/2011	3:45:32 AM	Main Vac valve closed
9/7/2011	3:45:32 AM	Bubbler valve closed
9/7/2011	3:45:32 AM	Bypass valve opened
9/7/2011	3:45:32 AM	Helium MFC set to  0.000000
9/7/2011	3:45:32 AM	H2 MFC set to  0.000000
9/7/2011	3:45:32 AM	BCl3 MFC set to  0.000000
9/7/2011	3:45:32 AM	PHl3 MFC set to  0.000000
9/7/2011	3:45:32 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:45:32 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:45:33 AM	Tube furnace set to 0
9/7/2011	3:46:33 AM	Helium valve closed
9/7/2011	3:46:33 AM	H2 valve closed
9/7/2011	3:46:33 AM	BCl3 valve closed
9/7/2011	3:46:33 AM	PH3 valve closed
9/7/2011	3:46:33 AM	SiCl4 pre valve closed
9/7/2011	3:46:33 AM	SiCl4 post valve closed
9/7/2011	3:46:33 AM	Bypass valve closed
9/7/2011	3:46:33 AM	Bubbler valve closed
9/7/2011	3:46:33 AM	Main Vac valve opened
9/7/2011	3:46:33 AM	Helium MFC set to  0.000000
9/7/2011	3:46:33 AM	H2 MFC set to  0.000000
9/7/2011	3:46:33 AM	BCl3 MFC set to  0.000000
9/7/2011	3:46:33 AM	PHl3 MFC set to  0.000000
9/7/2011	3:46:33 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:46:33 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:46:33 AM	Tube furnace set to 0
9/7/2011	3:46:34 AM	Run finished at 3:46 AM
9/7/2011	3:46:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	3:47:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	3:47:41 AM	Recipe started at 3:47 AM
9/7/2011	3:47:41 AM	Helium valve closed
9/7/2011	3:47:41 AM	H2 valve closed
9/7/2011	3:47:41 AM	BCl3 valve closed
9/7/2011	3:47:41 AM	PH3 valve closed
9/7/2011	3:47:41 AM	SiCl4 pre valve closed
9/7/2011	3:47:41 AM	SiCl4 post valve closed
9/7/2011	3:47:41 AM	Main Vac valve closed
9/7/2011	3:47:41 AM	Bubbler valve closed
9/7/2011	3:47:41 AM	Bypass valve opened
9/7/2011	3:47:41 AM	Helium MFC set to  0.000000
9/7/2011	3:47:41 AM	H2 MFC set to  0.000000
9/7/2011	3:47:41 AM	BCl3 MFC set to  0.000000
9/7/2011	3:47:41 AM	PHl3 MFC set to  0.000000
9/7/2011	3:47:41 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:47:41 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:47:41 AM	Tube furnace set to 0
9/7/2011	3:47:42 AM	Helium valve closed
9/7/2011	3:47:42 AM	H2 valve closed
9/7/2011	3:47:42 AM	BCl3 valve closed
9/7/2011	3:47:42 AM	PH3 valve closed
9/7/2011	3:47:42 AM	SiCl4 pre valve closed
9/7/2011	3:47:42 AM	SiCl4 post valve closed
9/7/2011	3:47:42 AM	Main Vac valve closed
9/7/2011	3:47:42 AM	Bubbler valve closed
9/7/2011	3:47:42 AM	Bypass valve opened
9/7/2011	3:47:42 AM	Helium MFC set to  0.000000
9/7/2011	3:47:42 AM	H2 MFC set to  0.000000
9/7/2011	3:47:42 AM	BCl3 MFC set to  0.000000
9/7/2011	3:47:42 AM	PHl3 MFC set to  0.000000
9/7/2011	3:47:42 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:47:42 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:47:42 AM	Tube furnace set to 0
9/7/2011	3:48:12 AM	Helium valve closed
9/7/2011	3:48:12 AM	H2 valve closed
9/7/2011	3:48:12 AM	BCl3 valve closed
9/7/2011	3:48:12 AM	PH3 valve closed
9/7/2011	3:48:12 AM	SiCl4 pre valve closed
9/7/2011	3:48:12 AM	SiCl4 post valve closed
9/7/2011	3:48:12 AM	Bypass valve closed
9/7/2011	3:48:12 AM	Bubbler valve closed
9/7/2011	3:48:12 AM	Main Vac valve opened
9/7/2011	3:48:12 AM	Helium MFC set to  0.000000
9/7/2011	3:48:12 AM	H2 MFC set to  0.000000
9/7/2011	3:48:12 AM	BCl3 MFC set to  0.000000
9/7/2011	3:48:12 AM	PHl3 MFC set to  0.000000
9/7/2011	3:48:12 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:48:12 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:48:12 AM	Tube furnace set to 0
9/7/2011	3:48:42 AM	H2 valve closed
9/7/2011	3:48:42 AM	BCl3 valve closed
9/7/2011	3:48:42 AM	PH3 valve closed
9/7/2011	3:48:42 AM	SiCl4 pre valve closed
9/7/2011	3:48:42 AM	SiCl4 post valve closed
9/7/2011	3:48:42 AM	Bypass valve closed
9/7/2011	3:48:42 AM	Bubbler valve closed
9/7/2011	3:48:42 AM	Helium valve opened
9/7/2011	3:48:42 AM	Main Vac valve opened
9/7/2011	3:48:42 AM	Helium MFC set to  20.000000
9/7/2011	3:48:42 AM	H2 MFC set to  0.000000
9/7/2011	3:48:42 AM	BCl3 MFC set to  0.000000
9/7/2011	3:48:42 AM	PHl3 MFC set to  0.000000
9/7/2011	3:48:42 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:48:42 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:48:42 AM	Tube furnace set to 0
9/7/2011	3:49:12 AM	Helium valve closed
9/7/2011	3:49:12 AM	H2 valve closed
9/7/2011	3:49:12 AM	BCl3 valve closed
9/7/2011	3:49:12 AM	PH3 valve closed
9/7/2011	3:49:12 AM	SiCl4 pre valve closed
9/7/2011	3:49:12 AM	SiCl4 post valve closed
9/7/2011	3:49:12 AM	Bypass valve closed
9/7/2011	3:49:12 AM	Bubbler valve closed
9/7/2011	3:49:12 AM	Main Vac valve opened
9/7/2011	3:49:12 AM	Helium MFC set to  0.000000
9/7/2011	3:49:12 AM	H2 MFC set to  0.000000
9/7/2011	3:49:12 AM	BCl3 MFC set to  0.000000
9/7/2011	3:49:12 AM	PHl3 MFC set to  0.000000
9/7/2011	3:49:12 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:49:12 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:49:12 AM	Tube furnace set to 0
9/7/2011	3:49:42 AM	H2 valve closed
9/7/2011	3:49:42 AM	BCl3 valve closed
9/7/2011	3:49:42 AM	PH3 valve closed
9/7/2011	3:49:42 AM	SiCl4 pre valve closed
9/7/2011	3:49:42 AM	SiCl4 post valve closed
9/7/2011	3:49:42 AM	Bypass valve closed
9/7/2011	3:49:42 AM	Bubbler valve closed
9/7/2011	3:49:42 AM	Helium valve opened
9/7/2011	3:49:42 AM	Main Vac valve opened
9/7/2011	3:49:42 AM	Helium MFC set to  20.000000
9/7/2011	3:49:42 AM	H2 MFC set to  0.000000
9/7/2011	3:49:42 AM	BCl3 MFC set to  0.000000
9/7/2011	3:49:42 AM	PHl3 MFC set to  0.000000
9/7/2011	3:49:42 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:49:42 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:49:43 AM	Tube furnace set to 0
9/7/2011	3:50:13 AM	Helium valve closed
9/7/2011	3:50:13 AM	H2 valve closed
9/7/2011	3:50:13 AM	BCl3 valve closed
9/7/2011	3:50:13 AM	PH3 valve closed
9/7/2011	3:50:13 AM	SiCl4 pre valve closed
9/7/2011	3:50:13 AM	SiCl4 post valve closed
9/7/2011	3:50:13 AM	Bypass valve closed
9/7/2011	3:50:13 AM	Bubbler valve closed
9/7/2011	3:50:13 AM	Main Vac valve opened
9/7/2011	3:50:13 AM	Helium MFC set to  0.000000
9/7/2011	3:50:13 AM	H2 MFC set to  0.000000
9/7/2011	3:50:13 AM	BCl3 MFC set to  0.000000
9/7/2011	3:50:13 AM	PHl3 MFC set to  0.000000
9/7/2011	3:50:13 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:50:13 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:50:13 AM	Tube furnace set to 0
9/7/2011	3:50:43 AM	H2 valve closed
9/7/2011	3:50:43 AM	BCl3 valve closed
9/7/2011	3:50:43 AM	PH3 valve closed
9/7/2011	3:50:43 AM	SiCl4 pre valve closed
9/7/2011	3:50:43 AM	SiCl4 post valve closed
9/7/2011	3:50:43 AM	Bypass valve closed
9/7/2011	3:50:43 AM	Bubbler valve closed
9/7/2011	3:50:43 AM	Helium valve opened
9/7/2011	3:50:43 AM	Main Vac valve opened
9/7/2011	3:50:43 AM	Helium MFC set to  20.000000
9/7/2011	3:50:43 AM	H2 MFC set to  0.000000
9/7/2011	3:50:43 AM	BCl3 MFC set to  0.000000
9/7/2011	3:50:43 AM	PHl3 MFC set to  0.000000
9/7/2011	3:50:43 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:50:43 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:50:43 AM	Tube furnace set to 0
9/7/2011	3:51:13 AM	Helium valve closed
9/7/2011	3:51:13 AM	H2 valve closed
9/7/2011	3:51:13 AM	BCl3 valve closed
9/7/2011	3:51:13 AM	PH3 valve closed
9/7/2011	3:51:13 AM	SiCl4 pre valve closed
9/7/2011	3:51:13 AM	SiCl4 post valve closed
9/7/2011	3:51:13 AM	Bypass valve closed
9/7/2011	3:51:13 AM	Bubbler valve closed
9/7/2011	3:51:13 AM	Main Vac valve opened
9/7/2011	3:51:13 AM	Helium MFC set to  0.000000
9/7/2011	3:51:13 AM	H2 MFC set to  0.000000
9/7/2011	3:51:13 AM	BCl3 MFC set to  0.000000
9/7/2011	3:51:13 AM	PHl3 MFC set to  0.000000
9/7/2011	3:51:13 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:51:13 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:51:13 AM	Tube furnace set to 0
9/7/2011	3:51:43 AM	H2 valve closed
9/7/2011	3:51:43 AM	BCl3 valve closed
9/7/2011	3:51:43 AM	PH3 valve closed
9/7/2011	3:51:43 AM	SiCl4 pre valve closed
9/7/2011	3:51:43 AM	SiCl4 post valve closed
9/7/2011	3:51:43 AM	Bypass valve closed
9/7/2011	3:51:43 AM	Bubbler valve closed
9/7/2011	3:51:43 AM	Helium valve opened
9/7/2011	3:51:43 AM	Main Vac valve opened
9/7/2011	3:51:43 AM	Helium MFC set to  20.000000
9/7/2011	3:51:43 AM	H2 MFC set to  0.000000
9/7/2011	3:51:43 AM	BCl3 MFC set to  0.000000
9/7/2011	3:51:43 AM	PHl3 MFC set to  0.000000
9/7/2011	3:51:43 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:51:43 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	3:51:43 AM	Tube furnace set to 0
9/7/2011	3:51:44 AM	Run aborted at 3:51 AM
9/7/2011	3:51:44 AM	Helium valve closed
9/7/2011	3:51:44 AM	H2 valve closed
9/7/2011	3:51:44 AM	BCl3 valve closed
9/7/2011	3:51:44 AM	PH3 valve closed
9/7/2011	3:51:44 AM	SiCl4 pre valve closed
9/7/2011	3:51:44 AM	SiCl4 post valve closed
9/7/2011	3:51:44 AM	Bypass valve closed
9/7/2011	3:51:44 AM	Main Vac valve closed
9/7/2011	3:51:44 AM	Bubbler valve closed
9/7/2011	3:51:44 AM	Helium MFC set to  0.000000
9/7/2011	3:51:44 AM	H2 MFC set to  0.000000
9/7/2011	3:51:44 AM	BCl3 MFC set to  0.000000
9/7/2011	3:51:44 AM	PHl3 MFC set to  0.000000
9/7/2011	3:51:44 AM	SiCl4 MFC set to  0.000000
9/7/2011	3:51:44 AM	Tube furnace set to 0
9/7/2011	3:51:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	3:51:46 AM	Main Vac valve opened
9/7/2011	3:51:46 AM	Main Vac valve closed
9/7/2011	3:51:46 AM	Main Vac valve opened
9/7/2011	10:51:55 AM	Main Vac valve closed
9/7/2011	10:52:01 AM	Main Vac valve opened
9/7/2011	11:39:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	11:39:11 AM	Recipe started at 11:39 AM
9/7/2011	11:39:11 AM	Helium valve closed
9/7/2011	11:39:11 AM	H2 valve closed
9/7/2011	11:39:11 AM	BCl3 valve closed
9/7/2011	11:39:11 AM	PH3 valve closed
9/7/2011	11:39:11 AM	SiCl4 pre valve closed
9/7/2011	11:39:11 AM	SiCl4 post valve closed
9/7/2011	11:39:11 AM	Main Vac valve closed
9/7/2011	11:39:11 AM	Bypass valve closed
9/7/2011	11:39:11 AM	Bubbler valve closed
9/7/2011	11:39:11 AM	Helium MFC set to  0.000000
9/7/2011	11:39:11 AM	H2 MFC set to  0.000000
9/7/2011	11:39:11 AM	BCl3 MFC set to  0.000000
9/7/2011	11:39:11 AM	PHl3 MFC set to  0.000000
9/7/2011	11:39:11 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:39:11 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:39:11 AM	Tube furnace set to 0
9/7/2011	11:39:14 AM	H2 valve closed
9/7/2011	11:39:14 AM	BCl3 valve closed
9/7/2011	11:39:14 AM	PH3 valve closed
9/7/2011	11:39:15 AM	SiCl4 pre valve closed
9/7/2011	11:39:15 AM	SiCl4 post valve closed
9/7/2011	11:39:15 AM	Main Vac valve closed
9/7/2011	11:39:15 AM	Bypass valve closed
9/7/2011	11:39:15 AM	Bubbler valve closed
9/7/2011	11:39:15 AM	Helium valve opened
9/7/2011	11:39:15 AM	Helium MFC set to  500.000000
9/7/2011	11:39:15 AM	H2 MFC set to  0.000000
9/7/2011	11:39:15 AM	BCl3 MFC set to  0.000000
9/7/2011	11:39:15 AM	PHl3 MFC set to  0.000000
9/7/2011	11:39:15 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:39:15 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:39:15 AM	Tube furnace set to 0
9/7/2011	11:40:20 AM	Helium valve closed
9/7/2011	11:40:20 AM	H2 valve closed
9/7/2011	11:40:20 AM	BCl3 valve closed
9/7/2011	11:40:20 AM	PH3 valve closed
9/7/2011	11:40:20 AM	SiCl4 pre valve closed
9/7/2011	11:40:20 AM	SiCl4 post valve closed
9/7/2011	11:40:20 AM	Main Vac valve closed
9/7/2011	11:40:20 AM	Bypass valve closed
9/7/2011	11:40:20 AM	Bubbler valve closed
9/7/2011	11:40:20 AM	Helium MFC set to  0.000000
9/7/2011	11:40:20 AM	H2 MFC set to  0.000000
9/7/2011	11:40:20 AM	BCl3 MFC set to  0.000000
9/7/2011	11:40:20 AM	PHl3 MFC set to  0.000000
9/7/2011	11:40:20 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:40:20 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:40:20 AM	Tube furnace set to 0
9/7/2011	11:40:21 AM	Run finished at 11:40 AM
9/7/2011	11:40:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	11:46:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	11:46:43 AM	Recipe started at 11:46 AM
9/7/2011	11:46:43 AM	Helium valve closed
9/7/2011	11:46:43 AM	H2 valve closed
9/7/2011	11:46:43 AM	BCl3 valve closed
9/7/2011	11:46:43 AM	PH3 valve closed
9/7/2011	11:46:43 AM	SiCl4 pre valve closed
9/7/2011	11:46:43 AM	SiCl4 post valve closed
9/7/2011	11:46:43 AM	Main Vac valve closed
9/7/2011	11:46:43 AM	Bubbler valve closed
9/7/2011	11:46:43 AM	Bypass valve opened
9/7/2011	11:46:43 AM	Helium MFC set to  0.000000
9/7/2011	11:46:43 AM	H2 MFC set to  0.000000
9/7/2011	11:46:43 AM	BCl3 MFC set to  0.000000
9/7/2011	11:46:43 AM	PHl3 MFC set to  0.000000
9/7/2011	11:46:43 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:46:43 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:46:44 AM	Tube furnace set to 0
9/7/2011	11:47:56 AM	Helium valve closed
9/7/2011	11:47:56 AM	H2 valve closed
9/7/2011	11:47:56 AM	BCl3 valve closed
9/7/2011	11:47:56 AM	PH3 valve closed
9/7/2011	11:47:56 AM	SiCl4 pre valve closed
9/7/2011	11:47:56 AM	SiCl4 post valve closed
9/7/2011	11:47:56 AM	Main Vac valve closed
9/7/2011	11:47:56 AM	Bubbler valve closed
9/7/2011	11:47:56 AM	Bypass valve opened
9/7/2011	11:47:56 AM	Helium MFC set to  0.000000
9/7/2011	11:47:56 AM	H2 MFC set to  0.000000
9/7/2011	11:47:56 AM	BCl3 MFC set to  0.000000
9/7/2011	11:47:56 AM	PHl3 MFC set to  0.000000
9/7/2011	11:47:56 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:47:56 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:47:57 AM	Tube furnace set to 0
9/7/2011	11:48:43 AM	Helium valve closed
9/7/2011	11:48:43 AM	H2 valve closed
9/7/2011	11:48:43 AM	BCl3 valve closed
9/7/2011	11:48:43 AM	PH3 valve closed
9/7/2011	11:48:43 AM	SiCl4 pre valve closed
9/7/2011	11:48:43 AM	SiCl4 post valve closed
9/7/2011	11:48:43 AM	Bypass valve closed
9/7/2011	11:48:43 AM	Bubbler valve closed
9/7/2011	11:48:43 AM	Main Vac valve opened
9/7/2011	11:48:43 AM	Helium MFC set to  0.000000
9/7/2011	11:48:43 AM	H2 MFC set to  0.000000
9/7/2011	11:48:43 AM	BCl3 MFC set to  0.000000
9/7/2011	11:48:43 AM	PHl3 MFC set to  0.000000
9/7/2011	11:48:43 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:48:43 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:48:43 AM	Tube furnace set to 0
9/7/2011	11:48:44 AM	Run finished at 11:48 AM
9/7/2011	11:48:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	11:50:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	11:50:42 AM	Recipe started at 11:50 AM
9/7/2011	11:50:42 AM	Helium valve closed
9/7/2011	11:50:42 AM	H2 valve closed
9/7/2011	11:50:42 AM	BCl3 valve closed
9/7/2011	11:50:42 AM	PH3 valve closed
9/7/2011	11:50:42 AM	SiCl4 pre valve closed
9/7/2011	11:50:42 AM	SiCl4 post valve closed
9/7/2011	11:50:42 AM	Main Vac valve closed
9/7/2011	11:50:42 AM	Bypass valve closed
9/7/2011	11:50:42 AM	Bubbler valve closed
9/7/2011	11:50:42 AM	Helium MFC set to  0.000000
9/7/2011	11:50:42 AM	H2 MFC set to  0.000000
9/7/2011	11:50:42 AM	BCl3 MFC set to  0.000000
9/7/2011	11:50:42 AM	PHl3 MFC set to  0.000000
9/7/2011	11:50:42 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:50:42 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:50:42 AM	Tube furnace set to 0
9/7/2011	11:50:45 AM	H2 valve closed
9/7/2011	11:50:45 AM	BCl3 valve closed
9/7/2011	11:50:45 AM	PH3 valve closed
9/7/2011	11:50:45 AM	SiCl4 pre valve closed
9/7/2011	11:50:45 AM	SiCl4 post valve closed
9/7/2011	11:50:45 AM	Main Vac valve closed
9/7/2011	11:50:45 AM	Bypass valve closed
9/7/2011	11:50:45 AM	Bubbler valve closed
9/7/2011	11:50:45 AM	Helium valve opened
9/7/2011	11:50:45 AM	Helium MFC set to  500.000000
9/7/2011	11:50:45 AM	H2 MFC set to  0.000000
9/7/2011	11:50:45 AM	BCl3 MFC set to  0.000000
9/7/2011	11:50:45 AM	PHl3 MFC set to  0.000000
9/7/2011	11:50:45 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:50:45 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:50:46 AM	Tube furnace set to 0
9/7/2011	11:51:52 AM	Helium valve closed
9/7/2011	11:51:52 AM	H2 valve closed
9/7/2011	11:51:52 AM	BCl3 valve closed
9/7/2011	11:51:52 AM	PH3 valve closed
9/7/2011	11:51:52 AM	SiCl4 pre valve closed
9/7/2011	11:51:52 AM	SiCl4 post valve closed
9/7/2011	11:51:52 AM	Main Vac valve closed
9/7/2011	11:51:52 AM	Bypass valve closed
9/7/2011	11:51:52 AM	Bubbler valve closed
9/7/2011	11:51:52 AM	Helium MFC set to  0.000000
9/7/2011	11:51:52 AM	H2 MFC set to  0.000000
9/7/2011	11:51:52 AM	BCl3 MFC set to  0.000000
9/7/2011	11:51:52 AM	PHl3 MFC set to  0.000000
9/7/2011	11:51:52 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:51:52 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:51:52 AM	Tube furnace set to 0
9/7/2011	11:51:53 AM	Run finished at 11:51 AM
9/7/2011	11:51:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	11:56:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	11:56:29 AM	Recipe started at 11:56 AM
9/7/2011	11:56:29 AM	Helium valve closed
9/7/2011	11:56:29 AM	H2 valve closed
9/7/2011	11:56:29 AM	BCl3 valve closed
9/7/2011	11:56:29 AM	PH3 valve closed
9/7/2011	11:56:29 AM	SiCl4 pre valve closed
9/7/2011	11:56:29 AM	SiCl4 post valve closed
9/7/2011	11:56:29 AM	Main Vac valve closed
9/7/2011	11:56:29 AM	Bubbler valve closed
9/7/2011	11:56:29 AM	Bypass valve opened
9/7/2011	11:56:29 AM	Helium MFC set to  0.000000
9/7/2011	11:56:29 AM	H2 MFC set to  0.000000
9/7/2011	11:56:29 AM	BCl3 MFC set to  0.000000
9/7/2011	11:56:29 AM	PHl3 MFC set to  0.000000
9/7/2011	11:56:29 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:56:29 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:56:29 AM	Tube furnace set to 0
9/7/2011	11:57:39 AM	Helium valve closed
9/7/2011	11:57:39 AM	H2 valve closed
9/7/2011	11:57:39 AM	BCl3 valve closed
9/7/2011	11:57:39 AM	PH3 valve closed
9/7/2011	11:57:39 AM	SiCl4 pre valve closed
9/7/2011	11:57:39 AM	SiCl4 post valve closed
9/7/2011	11:57:39 AM	Main Vac valve closed
9/7/2011	11:57:39 AM	Bubbler valve closed
9/7/2011	11:57:39 AM	Bypass valve opened
9/7/2011	11:57:39 AM	Helium MFC set to  0.000000
9/7/2011	11:57:39 AM	H2 MFC set to  0.000000
9/7/2011	11:57:39 AM	BCl3 MFC set to  0.000000
9/7/2011	11:57:39 AM	PHl3 MFC set to  0.000000
9/7/2011	11:57:39 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:57:39 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:57:39 AM	Tube furnace set to 0
9/7/2011	11:58:39 AM	Helium valve closed
9/7/2011	11:58:39 AM	H2 valve closed
9/7/2011	11:58:39 AM	BCl3 valve closed
9/7/2011	11:58:39 AM	PH3 valve closed
9/7/2011	11:58:39 AM	SiCl4 pre valve closed
9/7/2011	11:58:39 AM	SiCl4 post valve closed
9/7/2011	11:58:39 AM	Bypass valve closed
9/7/2011	11:58:39 AM	Bubbler valve closed
9/7/2011	11:58:39 AM	Main Vac valve opened
9/7/2011	11:58:39 AM	Helium MFC set to  0.000000
9/7/2011	11:58:39 AM	H2 MFC set to  0.000000
9/7/2011	11:58:39 AM	BCl3 MFC set to  0.000000
9/7/2011	11:58:39 AM	PHl3 MFC set to  0.000000
9/7/2011	11:58:39 AM	SiCl4 MFC set to  0.000000
9/7/2011	11:58:39 AM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:58:39 AM	Tube furnace set to 0
9/7/2011	11:58:40 AM	Run finished at 11:58 AM
9/7/2011	11:58:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	12:04:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	12:05:11 PM	Recipe started at 12:05 PM
9/7/2011	12:05:11 PM	Helium valve closed
9/7/2011	12:05:11 PM	H2 valve closed
9/7/2011	12:05:11 PM	BCl3 valve closed
9/7/2011	12:05:11 PM	PH3 valve closed
9/7/2011	12:05:11 PM	SiCl4 pre valve closed
9/7/2011	12:05:11 PM	SiCl4 post valve closed
9/7/2011	12:05:11 PM	Main Vac valve closed
9/7/2011	12:05:11 PM	Bubbler valve closed
9/7/2011	12:05:11 PM	Bypass valve opened
9/7/2011	12:05:11 PM	Helium MFC set to  0.000000
9/7/2011	12:05:11 PM	H2 MFC set to  0.000000
9/7/2011	12:05:11 PM	BCl3 MFC set to  0.000000
9/7/2011	12:05:11 PM	PHl3 MFC set to  0.000000
9/7/2011	12:05:11 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:05:11 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:05:11 PM	Tube furnace set to 0
9/7/2011	12:05:12 PM	Helium valve closed
9/7/2011	12:05:12 PM	H2 valve closed
9/7/2011	12:05:12 PM	BCl3 valve closed
9/7/2011	12:05:12 PM	PH3 valve closed
9/7/2011	12:05:12 PM	SiCl4 pre valve closed
9/7/2011	12:05:12 PM	SiCl4 post valve closed
9/7/2011	12:05:12 PM	Main Vac valve closed
9/7/2011	12:05:12 PM	Bubbler valve closed
9/7/2011	12:05:12 PM	Bypass valve opened
9/7/2011	12:05:12 PM	Helium MFC set to  0.000000
9/7/2011	12:05:12 PM	H2 MFC set to  0.000000
9/7/2011	12:05:12 PM	BCl3 MFC set to  0.000000
9/7/2011	12:05:12 PM	PHl3 MFC set to  0.000000
9/7/2011	12:05:12 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:05:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:05:12 PM	Tube furnace set to 0
9/7/2011	12:05:14 PM	Helium valve closed
9/7/2011	12:05:14 PM	H2 valve closed
9/7/2011	12:05:14 PM	BCl3 valve closed
9/7/2011	12:05:14 PM	PH3 valve closed
9/7/2011	12:05:14 PM	SiCl4 pre valve closed
9/7/2011	12:05:14 PM	SiCl4 post valve closed
9/7/2011	12:05:14 PM	Bypass valve closed
9/7/2011	12:05:14 PM	Bubbler valve closed
9/7/2011	12:05:14 PM	Main Vac valve opened
9/7/2011	12:05:14 PM	Helium MFC set to  0.000000
9/7/2011	12:05:14 PM	H2 MFC set to  0.000000
9/7/2011	12:05:14 PM	BCl3 MFC set to  0.000000
9/7/2011	12:05:14 PM	PHl3 MFC set to  0.000000
9/7/2011	12:05:14 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:05:14 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:05:15 PM	Tube furnace set to 0
9/7/2011	12:05:45 PM	H2 valve closed
9/7/2011	12:05:45 PM	BCl3 valve closed
9/7/2011	12:05:45 PM	PH3 valve closed
9/7/2011	12:05:45 PM	SiCl4 pre valve closed
9/7/2011	12:05:45 PM	SiCl4 post valve closed
9/7/2011	12:05:45 PM	Bypass valve closed
9/7/2011	12:05:45 PM	Bubbler valve closed
9/7/2011	12:05:45 PM	Helium valve opened
9/7/2011	12:05:45 PM	Main Vac valve opened
9/7/2011	12:05:45 PM	Helium MFC set to  20.000000
9/7/2011	12:05:45 PM	H2 MFC set to  0.000000
9/7/2011	12:05:45 PM	BCl3 MFC set to  0.000000
9/7/2011	12:05:45 PM	PHl3 MFC set to  0.000000
9/7/2011	12:05:45 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:05:45 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:05:45 PM	Tube furnace set to 0
9/7/2011	12:06:15 PM	Helium valve closed
9/7/2011	12:06:15 PM	H2 valve closed
9/7/2011	12:06:15 PM	BCl3 valve closed
9/7/2011	12:06:15 PM	PH3 valve closed
9/7/2011	12:06:15 PM	SiCl4 pre valve closed
9/7/2011	12:06:15 PM	SiCl4 post valve closed
9/7/2011	12:06:15 PM	Bypass valve closed
9/7/2011	12:06:15 PM	Bubbler valve closed
9/7/2011	12:06:15 PM	Main Vac valve opened
9/7/2011	12:06:15 PM	Helium MFC set to  0.000000
9/7/2011	12:06:15 PM	H2 MFC set to  0.000000
9/7/2011	12:06:15 PM	BCl3 MFC set to  0.000000
9/7/2011	12:06:15 PM	PHl3 MFC set to  0.000000
9/7/2011	12:06:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:06:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:06:15 PM	Tube furnace set to 0
9/7/2011	12:06:45 PM	H2 valve closed
9/7/2011	12:06:45 PM	BCl3 valve closed
9/7/2011	12:06:45 PM	PH3 valve closed
9/7/2011	12:06:45 PM	SiCl4 pre valve closed
9/7/2011	12:06:45 PM	SiCl4 post valve closed
9/7/2011	12:06:45 PM	Bypass valve closed
9/7/2011	12:06:45 PM	Bubbler valve closed
9/7/2011	12:06:45 PM	Helium valve opened
9/7/2011	12:06:45 PM	Main Vac valve opened
9/7/2011	12:06:45 PM	Helium MFC set to  20.000000
9/7/2011	12:06:45 PM	H2 MFC set to  0.000000
9/7/2011	12:06:45 PM	BCl3 MFC set to  0.000000
9/7/2011	12:06:45 PM	PHl3 MFC set to  0.000000
9/7/2011	12:06:45 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:06:45 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:06:45 PM	Tube furnace set to 0
9/7/2011	12:07:15 PM	Helium valve closed
9/7/2011	12:07:15 PM	H2 valve closed
9/7/2011	12:07:15 PM	BCl3 valve closed
9/7/2011	12:07:15 PM	PH3 valve closed
9/7/2011	12:07:15 PM	SiCl4 pre valve closed
9/7/2011	12:07:15 PM	SiCl4 post valve closed
9/7/2011	12:07:15 PM	Bypass valve closed
9/7/2011	12:07:15 PM	Bubbler valve closed
9/7/2011	12:07:15 PM	Main Vac valve opened
9/7/2011	12:07:15 PM	Helium MFC set to  0.000000
9/7/2011	12:07:15 PM	H2 MFC set to  0.000000
9/7/2011	12:07:15 PM	BCl3 MFC set to  0.000000
9/7/2011	12:07:15 PM	PHl3 MFC set to  0.000000
9/7/2011	12:07:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:07:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:07:15 PM	Tube furnace set to 0
9/7/2011	12:07:45 PM	H2 valve closed
9/7/2011	12:07:45 PM	BCl3 valve closed
9/7/2011	12:07:45 PM	PH3 valve closed
9/7/2011	12:07:45 PM	SiCl4 pre valve closed
9/7/2011	12:07:45 PM	SiCl4 post valve closed
9/7/2011	12:07:45 PM	Bypass valve closed
9/7/2011	12:07:45 PM	Bubbler valve closed
9/7/2011	12:07:45 PM	Helium valve opened
9/7/2011	12:07:45 PM	Main Vac valve opened
9/7/2011	12:07:45 PM	Helium MFC set to  20.000000
9/7/2011	12:07:45 PM	H2 MFC set to  0.000000
9/7/2011	12:07:45 PM	BCl3 MFC set to  0.000000
9/7/2011	12:07:45 PM	PHl3 MFC set to  0.000000
9/7/2011	12:07:45 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:07:45 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:07:46 PM	Tube furnace set to 0
9/7/2011	12:08:16 PM	Helium valve closed
9/7/2011	12:08:16 PM	H2 valve closed
9/7/2011	12:08:16 PM	BCl3 valve closed
9/7/2011	12:08:16 PM	PH3 valve closed
9/7/2011	12:08:16 PM	SiCl4 pre valve closed
9/7/2011	12:08:16 PM	SiCl4 post valve closed
9/7/2011	12:08:16 PM	Bypass valve closed
9/7/2011	12:08:16 PM	Bubbler valve closed
9/7/2011	12:08:16 PM	Main Vac valve opened
9/7/2011	12:08:16 PM	Helium MFC set to  0.000000
9/7/2011	12:08:16 PM	H2 MFC set to  0.000000
9/7/2011	12:08:16 PM	BCl3 MFC set to  0.000000
9/7/2011	12:08:16 PM	PHl3 MFC set to  0.000000
9/7/2011	12:08:16 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:08:16 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:08:16 PM	Tube furnace set to 0
9/7/2011	12:08:46 PM	H2 valve closed
9/7/2011	12:08:46 PM	BCl3 valve closed
9/7/2011	12:08:46 PM	PH3 valve closed
9/7/2011	12:08:46 PM	SiCl4 pre valve closed
9/7/2011	12:08:46 PM	SiCl4 post valve closed
9/7/2011	12:08:46 PM	Bypass valve closed
9/7/2011	12:08:46 PM	Bubbler valve closed
9/7/2011	12:08:46 PM	Helium valve opened
9/7/2011	12:08:46 PM	Main Vac valve opened
9/7/2011	12:08:46 PM	Helium MFC set to  20.000000
9/7/2011	12:08:46 PM	H2 MFC set to  0.000000
9/7/2011	12:08:46 PM	BCl3 MFC set to  0.000000
9/7/2011	12:08:46 PM	PHl3 MFC set to  0.000000
9/7/2011	12:08:46 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:08:46 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:08:46 PM	Tube furnace set to 0
9/7/2011	12:09:16 PM	Helium valve closed
9/7/2011	12:09:16 PM	H2 valve closed
9/7/2011	12:09:16 PM	BCl3 valve closed
9/7/2011	12:09:16 PM	PH3 valve closed
9/7/2011	12:09:16 PM	SiCl4 pre valve closed
9/7/2011	12:09:16 PM	SiCl4 post valve closed
9/7/2011	12:09:16 PM	Bypass valve closed
9/7/2011	12:09:16 PM	Bubbler valve closed
9/7/2011	12:09:16 PM	Main Vac valve opened
9/7/2011	12:09:16 PM	Helium MFC set to  0.000000
9/7/2011	12:09:16 PM	H2 MFC set to  0.000000
9/7/2011	12:09:16 PM	BCl3 MFC set to  0.000000
9/7/2011	12:09:16 PM	PHl3 MFC set to  0.000000
9/7/2011	12:09:16 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:09:16 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:09:16 PM	Tube furnace set to 0
9/7/2011	12:09:46 PM	H2 valve closed
9/7/2011	12:09:46 PM	BCl3 valve closed
9/7/2011	12:09:46 PM	PH3 valve closed
9/7/2011	12:09:46 PM	SiCl4 pre valve closed
9/7/2011	12:09:46 PM	SiCl4 post valve closed
9/7/2011	12:09:46 PM	Bypass valve closed
9/7/2011	12:09:46 PM	Bubbler valve closed
9/7/2011	12:09:46 PM	Helium valve opened
9/7/2011	12:09:46 PM	Main Vac valve opened
9/7/2011	12:09:46 PM	Helium MFC set to  20.000000
9/7/2011	12:09:46 PM	H2 MFC set to  0.000000
9/7/2011	12:09:46 PM	BCl3 MFC set to  0.000000
9/7/2011	12:09:46 PM	PHl3 MFC set to  0.000000
9/7/2011	12:09:46 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:09:46 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:09:46 PM	Tube furnace set to 0
9/7/2011	12:10:16 PM	Helium valve closed
9/7/2011	12:10:16 PM	H2 valve closed
9/7/2011	12:10:16 PM	BCl3 valve closed
9/7/2011	12:10:16 PM	PH3 valve closed
9/7/2011	12:10:16 PM	SiCl4 pre valve closed
9/7/2011	12:10:16 PM	SiCl4 post valve closed
9/7/2011	12:10:16 PM	Bypass valve closed
9/7/2011	12:10:16 PM	Bubbler valve closed
9/7/2011	12:10:16 PM	Main Vac valve opened
9/7/2011	12:10:16 PM	Helium MFC set to  0.000000
9/7/2011	12:10:16 PM	H2 MFC set to  0.000000
9/7/2011	12:10:16 PM	BCl3 MFC set to  0.000000
9/7/2011	12:10:16 PM	PHl3 MFC set to  0.000000
9/7/2011	12:10:16 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:10:16 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:10:17 PM	Tube furnace set to 0
9/7/2011	12:10:47 PM	H2 valve closed
9/7/2011	12:10:47 PM	BCl3 valve closed
9/7/2011	12:10:47 PM	PH3 valve closed
9/7/2011	12:10:47 PM	SiCl4 pre valve closed
9/7/2011	12:10:47 PM	SiCl4 post valve closed
9/7/2011	12:10:47 PM	Bypass valve closed
9/7/2011	12:10:47 PM	Bubbler valve closed
9/7/2011	12:10:47 PM	Helium valve opened
9/7/2011	12:10:47 PM	Main Vac valve opened
9/7/2011	12:10:47 PM	Helium MFC set to  20.000000
9/7/2011	12:10:47 PM	H2 MFC set to  0.000000
9/7/2011	12:10:47 PM	BCl3 MFC set to  0.000000
9/7/2011	12:10:47 PM	PHl3 MFC set to  0.000000
9/7/2011	12:10:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:10:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:10:47 PM	Tube furnace set to 0
9/7/2011	12:11:17 PM	Helium valve closed
9/7/2011	12:11:17 PM	H2 valve closed
9/7/2011	12:11:17 PM	BCl3 valve closed
9/7/2011	12:11:17 PM	PH3 valve closed
9/7/2011	12:11:17 PM	SiCl4 pre valve closed
9/7/2011	12:11:17 PM	SiCl4 post valve closed
9/7/2011	12:11:17 PM	Bypass valve closed
9/7/2011	12:11:17 PM	Bubbler valve closed
9/7/2011	12:11:17 PM	Main Vac valve opened
9/7/2011	12:11:17 PM	Helium MFC set to  0.000000
9/7/2011	12:11:17 PM	H2 MFC set to  0.000000
9/7/2011	12:11:17 PM	BCl3 MFC set to  0.000000
9/7/2011	12:11:17 PM	PHl3 MFC set to  0.000000
9/7/2011	12:11:17 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:11:17 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:11:17 PM	Tube furnace set to 0
9/7/2011	12:11:47 PM	H2 valve closed
9/7/2011	12:11:47 PM	BCl3 valve closed
9/7/2011	12:11:47 PM	PH3 valve closed
9/7/2011	12:11:47 PM	SiCl4 pre valve closed
9/7/2011	12:11:47 PM	SiCl4 post valve closed
9/7/2011	12:11:47 PM	Bypass valve closed
9/7/2011	12:11:47 PM	Bubbler valve closed
9/7/2011	12:11:47 PM	Helium valve opened
9/7/2011	12:11:47 PM	Main Vac valve opened
9/7/2011	12:11:47 PM	Helium MFC set to  20.000000
9/7/2011	12:11:47 PM	H2 MFC set to  0.000000
9/7/2011	12:11:47 PM	BCl3 MFC set to  0.000000
9/7/2011	12:11:47 PM	PHl3 MFC set to  0.000000
9/7/2011	12:11:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:11:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:11:47 PM	Tube furnace set to 0
9/7/2011	12:12:17 PM	Helium valve closed
9/7/2011	12:12:17 PM	H2 valve closed
9/7/2011	12:12:17 PM	BCl3 valve closed
9/7/2011	12:12:17 PM	PH3 valve closed
9/7/2011	12:12:17 PM	SiCl4 pre valve closed
9/7/2011	12:12:17 PM	SiCl4 post valve closed
9/7/2011	12:12:17 PM	Bypass valve closed
9/7/2011	12:12:17 PM	Bubbler valve closed
9/7/2011	12:12:17 PM	Main Vac valve opened
9/7/2011	12:12:17 PM	Helium MFC set to  0.000000
9/7/2011	12:12:17 PM	H2 MFC set to  0.000000
9/7/2011	12:12:17 PM	BCl3 MFC set to  0.000000
9/7/2011	12:12:17 PM	PHl3 MFC set to  0.000000
9/7/2011	12:12:17 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:12:17 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:12:17 PM	Tube furnace set to 0
9/7/2011	12:12:47 PM	H2 valve closed
9/7/2011	12:12:47 PM	BCl3 valve closed
9/7/2011	12:12:47 PM	PH3 valve closed
9/7/2011	12:12:47 PM	SiCl4 pre valve closed
9/7/2011	12:12:47 PM	SiCl4 post valve closed
9/7/2011	12:12:47 PM	Bypass valve closed
9/7/2011	12:12:47 PM	Bubbler valve closed
9/7/2011	12:12:47 PM	Helium valve opened
9/7/2011	12:12:47 PM	Main Vac valve opened
9/7/2011	12:12:47 PM	Helium MFC set to  20.000000
9/7/2011	12:12:47 PM	H2 MFC set to  0.000000
9/7/2011	12:12:47 PM	BCl3 MFC set to  0.000000
9/7/2011	12:12:47 PM	PHl3 MFC set to  0.000000
9/7/2011	12:12:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:12:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:12:48 PM	Tube furnace set to 0
9/7/2011	12:13:18 PM	Helium valve closed
9/7/2011	12:13:18 PM	H2 valve closed
9/7/2011	12:13:18 PM	BCl3 valve closed
9/7/2011	12:13:18 PM	PH3 valve closed
9/7/2011	12:13:18 PM	SiCl4 pre valve closed
9/7/2011	12:13:18 PM	SiCl4 post valve closed
9/7/2011	12:13:18 PM	Bypass valve closed
9/7/2011	12:13:18 PM	Bubbler valve closed
9/7/2011	12:13:18 PM	Main Vac valve opened
9/7/2011	12:13:18 PM	Helium MFC set to  0.000000
9/7/2011	12:13:18 PM	H2 MFC set to  0.000000
9/7/2011	12:13:18 PM	BCl3 MFC set to  0.000000
9/7/2011	12:13:18 PM	PHl3 MFC set to  0.000000
9/7/2011	12:13:18 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:13:18 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:13:18 PM	Tube furnace set to 0
9/7/2011	12:13:48 PM	H2 valve closed
9/7/2011	12:13:48 PM	BCl3 valve closed
9/7/2011	12:13:48 PM	PH3 valve closed
9/7/2011	12:13:48 PM	SiCl4 pre valve closed
9/7/2011	12:13:48 PM	SiCl4 post valve closed
9/7/2011	12:13:48 PM	Bypass valve closed
9/7/2011	12:13:48 PM	Bubbler valve closed
9/7/2011	12:13:48 PM	Helium valve opened
9/7/2011	12:13:48 PM	Main Vac valve opened
9/7/2011	12:13:48 PM	Helium MFC set to  20.000000
9/7/2011	12:13:48 PM	H2 MFC set to  0.000000
9/7/2011	12:13:48 PM	BCl3 MFC set to  0.000000
9/7/2011	12:13:48 PM	PHl3 MFC set to  0.000000
9/7/2011	12:13:48 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:13:48 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:13:48 PM	Tube furnace set to 0
9/7/2011	12:14:18 PM	Helium valve closed
9/7/2011	12:14:18 PM	H2 valve closed
9/7/2011	12:14:18 PM	BCl3 valve closed
9/7/2011	12:14:18 PM	PH3 valve closed
9/7/2011	12:14:18 PM	SiCl4 pre valve closed
9/7/2011	12:14:18 PM	SiCl4 post valve closed
9/7/2011	12:14:18 PM	Bypass valve closed
9/7/2011	12:14:18 PM	Bubbler valve closed
9/7/2011	12:14:18 PM	Main Vac valve opened
9/7/2011	12:14:18 PM	Helium MFC set to  0.000000
9/7/2011	12:14:18 PM	H2 MFC set to  0.000000
9/7/2011	12:14:18 PM	BCl3 MFC set to  0.000000
9/7/2011	12:14:18 PM	PHl3 MFC set to  0.000000
9/7/2011	12:14:18 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:14:18 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:14:18 PM	Tube furnace set to 0
9/7/2011	12:14:48 PM	H2 valve closed
9/7/2011	12:14:48 PM	BCl3 valve closed
9/7/2011	12:14:48 PM	PH3 valve closed
9/7/2011	12:14:48 PM	SiCl4 pre valve closed
9/7/2011	12:14:48 PM	SiCl4 post valve closed
9/7/2011	12:14:48 PM	Bypass valve closed
9/7/2011	12:14:48 PM	Bubbler valve closed
9/7/2011	12:14:48 PM	Helium valve opened
9/7/2011	12:14:48 PM	Main Vac valve opened
9/7/2011	12:14:48 PM	Helium MFC set to  20.000000
9/7/2011	12:14:48 PM	H2 MFC set to  0.000000
9/7/2011	12:14:48 PM	BCl3 MFC set to  0.000000
9/7/2011	12:14:48 PM	PHl3 MFC set to  0.000000
9/7/2011	12:14:48 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:14:48 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:14:48 PM	Tube furnace set to 0
9/7/2011	12:15:18 PM	Helium valve closed
9/7/2011	12:15:19 PM	H2 valve closed
9/7/2011	12:15:19 PM	BCl3 valve closed
9/7/2011	12:15:19 PM	PH3 valve closed
9/7/2011	12:15:19 PM	SiCl4 pre valve closed
9/7/2011	12:15:19 PM	SiCl4 post valve closed
9/7/2011	12:15:19 PM	Bypass valve closed
9/7/2011	12:15:19 PM	Bubbler valve closed
9/7/2011	12:15:19 PM	Main Vac valve opened
9/7/2011	12:15:19 PM	Helium MFC set to  0.000000
9/7/2011	12:15:19 PM	H2 MFC set to  0.000000
9/7/2011	12:15:19 PM	BCl3 MFC set to  0.000000
9/7/2011	12:15:19 PM	PHl3 MFC set to  0.000000
9/7/2011	12:15:19 PM	SiCl4 MFC set to  0.000000
9/7/2011	12:15:19 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	12:15:19 PM	Tube furnace set to 0
9/7/2011	12:15:20 PM	Run finished at 12:15 PM
9/7/2011	12:15:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	1:15:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/7/2011	1:15:58 PM	Recipe started at 1:15 PM
9/7/2011	1:15:58 PM	Helium valve closed
9/7/2011	1:15:58 PM	H2 valve closed
9/7/2011	1:15:58 PM	BCl3 valve closed
9/7/2011	1:15:58 PM	PH3 valve closed
9/7/2011	1:15:58 PM	SiCl4 pre valve closed
9/7/2011	1:15:58 PM	SiCl4 post valve closed
9/7/2011	1:15:58 PM	Main Vac valve closed
9/7/2011	1:15:58 PM	Bypass valve closed
9/7/2011	1:15:58 PM	Bubbler valve closed
9/7/2011	1:15:58 PM	Helium MFC set to  0.000000
9/7/2011	1:15:58 PM	H2 MFC set to  0.000000
9/7/2011	1:15:58 PM	BCl3 MFC set to  0.000000
9/7/2011	1:15:58 PM	PHl3 MFC set to  0.000000
9/7/2011	1:15:58 PM	SiCl4 MFC set to  0.000000
9/7/2011	1:15:58 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:15:58 PM	Tube furnace set to 0
9/7/2011	1:15:59 PM	Run finished at 1:15 PM
9/7/2011	1:15:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/7/2011	1:16:19 PM	Main Vac valve opened
9/7/2011	1:16:19 PM	Main Vac valve closed
9/7/2011	1:16:20 PM	Main Vac valve opened
9/7/2011	1:17:41 PM	Main Vac valve closed
9/7/2011	1:17:55 PM	Main Vac valve opened
9/7/2011	1:24:01 PM	Recipe started at 1:23 PM
9/7/2011	1:24:01 PM	Helium valve closed
9/7/2011	1:24:01 PM	H2 valve closed
9/7/2011	1:24:01 PM	BCl3 valve closed
9/7/2011	1:24:01 PM	PH3 valve closed
9/7/2011	1:24:01 PM	SiCl4 pre valve closed
9/7/2011	1:24:01 PM	SiCl4 post valve closed
9/7/2011	1:24:01 PM	Main Vac valve closed
9/7/2011	1:24:01 PM	Bypass valve closed
9/7/2011	1:24:01 PM	Bubbler valve closed
9/7/2011	1:24:01 PM	Helium MFC set to  0.000000
9/7/2011	1:24:01 PM	H2 MFC set to  0.000000
9/7/2011	1:24:01 PM	BCl3 MFC set to  0.000000
9/7/2011	1:24:01 PM	PHl3 MFC set to  0.000000
9/7/2011	1:24:01 PM	SiCl4 MFC set to  0.000000
9/7/2011	1:24:01 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:24:01 PM	Tube furnace set to 0
9/7/2011	1:24:04 PM	Helium valve closed
9/7/2011	1:24:04 PM	BCl3 valve closed
9/7/2011	1:24:04 PM	PH3 valve closed
9/7/2011	1:24:04 PM	SiCl4 pre valve closed
9/7/2011	1:24:04 PM	SiCl4 post valve closed
9/7/2011	1:24:04 PM	Main Vac valve closed
9/7/2011	1:24:04 PM	Bypass valve closed
9/7/2011	1:24:04 PM	Bubbler valve closed
9/7/2011	1:24:04 PM	H2 valve opened
9/7/2011	1:24:04 PM	Helium MFC set to  0.000000
9/7/2011	1:24:04 PM	H2 MFC set to  500.000000
9/7/2011	1:24:04 PM	BCl3 MFC set to  0.000000
9/7/2011	1:24:04 PM	PHl3 MFC set to  0.000000
9/7/2011	1:24:04 PM	SiCl4 MFC set to  0.000000
9/7/2011	1:24:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:24:04 PM	Tube furnace set to 0
9/7/2011	1:25:12 PM	Helium valve closed
9/7/2011	1:25:12 PM	BCl3 valve closed
9/7/2011	1:25:12 PM	PH3 valve closed
9/7/2011	1:25:12 PM	SiCl4 pre valve closed
9/7/2011	1:25:12 PM	SiCl4 post valve closed
9/7/2011	1:25:12 PM	Main Vac valve closed
9/7/2011	1:25:12 PM	Bypass valve closed
9/7/2011	1:25:12 PM	H2 valve opened
9/7/2011	1:25:12 PM	Bubbler valve opened
9/7/2011	1:25:12 PM	Helium MFC set to  0.000000
9/7/2011	1:25:12 PM	H2 MFC set to  500.000000
9/7/2011	1:25:12 PM	BCl3 MFC set to  0.000000
9/7/2011	1:25:12 PM	PHl3 MFC set to  0.000000
9/7/2011	1:25:12 PM	SiCl4 MFC set to  0.000000
9/7/2011	1:25:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:25:12 PM	Tube furnace set to 0
9/7/2011	1:25:13 PM	Helium valve closed
9/7/2011	1:25:13 PM	BCl3 valve closed
9/7/2011	1:25:13 PM	PH3 valve closed
9/7/2011	1:25:13 PM	SiCl4 pre valve closed
9/7/2011	1:25:13 PM	SiCl4 post valve closed
9/7/2011	1:25:13 PM	Main Vac valve closed
9/7/2011	1:25:13 PM	Bypass valve closed
9/7/2011	1:25:13 PM	H2 valve opened
9/7/2011	1:25:13 PM	Bubbler valve opened
9/7/2011	1:25:13 PM	Helium MFC set to  0.000000
9/7/2011	1:25:13 PM	H2 MFC set to  500.000000
9/7/2011	1:25:13 PM	BCl3 MFC set to  0.000000
9/7/2011	1:25:13 PM	PHl3 MFC set to  0.000000
9/7/2011	1:25:13 PM	SiCl4 MFC set to  0.000000
9/7/2011	1:25:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:25:13 PM	Tube furnace set to 1000
9/7/2011	1:45:13 PM	Helium valve closed
9/7/2011	1:45:13 PM	PH3 valve closed
9/7/2011	1:45:13 PM	Main Vac valve closed
9/7/2011	1:45:13 PM	Bypass valve closed
9/7/2011	1:45:13 PM	H2 valve opened
9/7/2011	1:45:13 PM	BCl3 valve opened
9/7/2011	1:45:13 PM	SiCl4 pre valve opened
9/7/2011	1:45:13 PM	SiCl4 post valve opened
9/7/2011	1:45:13 PM	Bubbler valve opened
9/7/2011	1:45:13 PM	Helium MFC set to  0.000000
9/7/2011	1:45:13 PM	H2 MFC set to  500.000000
9/7/2011	1:45:13 PM	BCl3 MFC set to  10.000000
9/7/2011	1:45:13 PM	PHl3 MFC set to  0.000000
9/7/2011	1:45:13 PM	SiCl4 MFC set to  50.000000
9/7/2011	1:45:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	1:45:13 PM	Tube furnace set to 1000
9/7/2011	2:00:13 PM	Helium valve closed
9/7/2011	2:00:13 PM	BCl3 valve closed
9/7/2011	2:00:13 PM	PH3 valve closed
9/7/2011	2:00:13 PM	SiCl4 pre valve closed
9/7/2011	2:00:13 PM	SiCl4 post valve closed
9/7/2011	2:00:13 PM	Main Vac valve closed
9/7/2011	2:00:13 PM	Bypass valve closed
9/7/2011	2:00:13 PM	H2 valve opened
9/7/2011	2:00:13 PM	Bubbler valve opened
9/7/2011	2:00:13 PM	Helium MFC set to  0.000000
9/7/2011	2:00:13 PM	H2 MFC set to  500.000000
9/7/2011	2:00:13 PM	BCl3 MFC set to  0.000000
9/7/2011	2:00:13 PM	PHl3 MFC set to  0.000000
9/7/2011	2:00:13 PM	SiCl4 MFC set to  0.000000
9/7/2011	2:00:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:00:13 PM	Tube furnace set to 750
9/7/2011	2:05:13 PM	H2 valve closed
9/7/2011	2:05:14 PM	BCl3 valve closed
9/7/2011	2:05:14 PM	PH3 valve closed
9/7/2011	2:05:14 PM	SiCl4 pre valve closed
9/7/2011	2:05:14 PM	SiCl4 post valve closed
9/7/2011	2:05:14 PM	Main Vac valve closed
9/7/2011	2:05:14 PM	Bypass valve closed
9/7/2011	2:05:14 PM	Helium valve opened
9/7/2011	2:05:14 PM	Bubbler valve opened
9/7/2011	2:05:14 PM	Helium MFC set to  500.000000
9/7/2011	2:05:14 PM	H2 MFC set to  0.000000
9/7/2011	2:05:14 PM	BCl3 MFC set to  0.000000
9/7/2011	2:05:14 PM	PHl3 MFC set to  0.000000
9/7/2011	2:05:14 PM	SiCl4 MFC set to  0.000000
9/7/2011	2:05:14 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:05:14 PM	Tube furnace set to 0
9/7/2011	2:35:19 PM	Run aborted at 2:35 PM
9/7/2011	2:35:19 PM	Helium valve closed
9/7/2011	2:35:19 PM	H2 valve closed
9/7/2011	2:35:19 PM	BCl3 valve closed
9/7/2011	2:35:19 PM	PH3 valve closed
9/7/2011	2:35:19 PM	SiCl4 pre valve closed
9/7/2011	2:35:19 PM	SiCl4 post valve closed
9/7/2011	2:35:19 PM	Bypass valve closed
9/7/2011	2:35:19 PM	Main Vac valve closed
9/7/2011	2:35:19 PM	Bubbler valve closed
9/7/2011	2:35:19 PM	Helium MFC set to  0.000000
9/7/2011	2:35:19 PM	H2 MFC set to  0.000000
9/7/2011	2:35:19 PM	BCl3 MFC set to  0.000000
9/7/2011	2:35:19 PM	PHl3 MFC set to  0.000000
9/7/2011	2:35:19 PM	SiCl4 MFC set to  0.000000
9/7/2011	2:35:19 PM	Tube furnace set to 0
9/7/2011	2:39:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	2:39:54 PM	Recipe started at 2:39 PM
9/7/2011	2:39:54 PM	Helium valve closed
9/7/2011	2:39:54 PM	H2 valve closed
9/7/2011	2:39:54 PM	BCl3 valve closed
9/7/2011	2:39:54 PM	PH3 valve closed
9/7/2011	2:39:54 PM	SiCl4 pre valve closed
9/7/2011	2:39:54 PM	SiCl4 post valve closed
9/7/2011	2:39:54 PM	Main Vac valve closed
9/7/2011	2:39:54 PM	Bubbler valve closed
9/7/2011	2:39:54 PM	Bypass valve opened
9/7/2011	2:39:54 PM	Helium MFC set to  0.000000
9/7/2011	2:39:54 PM	H2 MFC set to  0.000000
9/7/2011	2:39:54 PM	BCl3 MFC set to  0.000000
9/7/2011	2:39:54 PM	PHl3 MFC set to  0.000000
9/7/2011	2:39:54 PM	SiCl4 MFC set to  0.000000
9/7/2011	2:39:54 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:39:54 PM	Tube furnace set to 0
9/7/2011	2:41:00 PM	Helium valve closed
9/7/2011	2:41:00 PM	H2 valve closed
9/7/2011	2:41:00 PM	BCl3 valve closed
9/7/2011	2:41:00 PM	PH3 valve closed
9/7/2011	2:41:00 PM	SiCl4 pre valve closed
9/7/2011	2:41:00 PM	SiCl4 post valve closed
9/7/2011	2:41:00 PM	Main Vac valve closed
9/7/2011	2:41:00 PM	Bubbler valve closed
9/7/2011	2:41:00 PM	Bypass valve opened
9/7/2011	2:41:00 PM	Helium MFC set to  0.000000
9/7/2011	2:41:00 PM	H2 MFC set to  0.000000
9/7/2011	2:41:00 PM	BCl3 MFC set to  0.000000
9/7/2011	2:41:00 PM	PHl3 MFC set to  0.000000
9/7/2011	2:41:00 PM	SiCl4 MFC set to  0.000000
9/7/2011	2:41:00 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:41:00 PM	Tube furnace set to 0
9/7/2011	2:42:00 PM	Helium valve closed
9/7/2011	2:42:00 PM	H2 valve closed
9/7/2011	2:42:00 PM	BCl3 valve closed
9/7/2011	2:42:00 PM	PH3 valve closed
9/7/2011	2:42:00 PM	SiCl4 pre valve closed
9/7/2011	2:42:00 PM	SiCl4 post valve closed
9/7/2011	2:42:00 PM	Bypass valve closed
9/7/2011	2:42:00 PM	Bubbler valve closed
9/7/2011	2:42:00 PM	Main Vac valve opened
9/7/2011	2:42:00 PM	Helium MFC set to  0.000000
9/7/2011	2:42:00 PM	H2 MFC set to  0.000000
9/7/2011	2:42:00 PM	BCl3 MFC set to  0.000000
9/7/2011	2:42:00 PM	PHl3 MFC set to  0.000000
9/7/2011	2:42:00 PM	SiCl4 MFC set to  0.000000
9/7/2011	2:42:00 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	2:42:00 PM	Tube furnace set to 0
9/7/2011	2:42:01 PM	Run finished at 2:42 PM
9/7/2011	2:42:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	4:04:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	4:04:19 PM	Recipe started at 4:04 PM
9/7/2011	4:04:19 PM	Helium valve closed
9/7/2011	4:04:19 PM	H2 valve closed
9/7/2011	4:04:19 PM	BCl3 valve closed
9/7/2011	4:04:19 PM	PH3 valve closed
9/7/2011	4:04:19 PM	SiCl4 pre valve closed
9/7/2011	4:04:19 PM	SiCl4 post valve closed
9/7/2011	4:04:19 PM	Main Vac valve closed
9/7/2011	4:04:19 PM	Bypass valve closed
9/7/2011	4:04:19 PM	Bubbler valve closed
9/7/2011	4:04:19 PM	Helium MFC set to  0.000000
9/7/2011	4:04:19 PM	H2 MFC set to  0.000000
9/7/2011	4:04:19 PM	BCl3 MFC set to  0.000000
9/7/2011	4:04:19 PM	PHl3 MFC set to  0.000000
9/7/2011	4:04:19 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:04:19 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:04:20 PM	Tube furnace set to 0
9/7/2011	4:04:23 PM	H2 valve closed
9/7/2011	4:04:23 PM	BCl3 valve closed
9/7/2011	4:04:23 PM	PH3 valve closed
9/7/2011	4:04:23 PM	SiCl4 pre valve closed
9/7/2011	4:04:23 PM	SiCl4 post valve closed
9/7/2011	4:04:23 PM	Main Vac valve closed
9/7/2011	4:04:23 PM	Bypass valve closed
9/7/2011	4:04:23 PM	Bubbler valve closed
9/7/2011	4:04:23 PM	Helium valve opened
9/7/2011	4:04:23 PM	Helium MFC set to  500.000000
9/7/2011	4:04:23 PM	H2 MFC set to  0.000000
9/7/2011	4:04:23 PM	BCl3 MFC set to  0.000000
9/7/2011	4:04:23 PM	PHl3 MFC set to  0.000000
9/7/2011	4:04:23 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:04:23 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:04:23 PM	Tube furnace set to 0
9/7/2011	4:05:28 PM	Helium valve closed
9/7/2011	4:05:28 PM	H2 valve closed
9/7/2011	4:05:28 PM	BCl3 valve closed
9/7/2011	4:05:28 PM	PH3 valve closed
9/7/2011	4:05:28 PM	SiCl4 pre valve closed
9/7/2011	4:05:28 PM	SiCl4 post valve closed
9/7/2011	4:05:28 PM	Main Vac valve closed
9/7/2011	4:05:28 PM	Bypass valve closed
9/7/2011	4:05:28 PM	Bubbler valve closed
9/7/2011	4:05:28 PM	Helium MFC set to  0.000000
9/7/2011	4:05:28 PM	H2 MFC set to  0.000000
9/7/2011	4:05:28 PM	BCl3 MFC set to  0.000000
9/7/2011	4:05:28 PM	PHl3 MFC set to  0.000000
9/7/2011	4:05:28 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:05:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:05:28 PM	Tube furnace set to 0
9/7/2011	4:05:29 PM	Run finished at 4:05 PM
9/7/2011	4:05:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	4:09:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	4:09:56 PM	Recipe started at 4:09 PM
9/7/2011	4:09:56 PM	Helium valve closed
9/7/2011	4:09:56 PM	H2 valve closed
9/7/2011	4:09:56 PM	BCl3 valve closed
9/7/2011	4:09:56 PM	PH3 valve closed
9/7/2011	4:09:56 PM	SiCl4 pre valve closed
9/7/2011	4:09:56 PM	SiCl4 post valve closed
9/7/2011	4:09:56 PM	Main Vac valve closed
9/7/2011	4:09:56 PM	Bubbler valve closed
9/7/2011	4:09:56 PM	Bypass valve opened
9/7/2011	4:09:56 PM	Helium MFC set to  0.000000
9/7/2011	4:09:56 PM	H2 MFC set to  0.000000
9/7/2011	4:09:56 PM	BCl3 MFC set to  0.000000
9/7/2011	4:09:56 PM	PHl3 MFC set to  0.000000
9/7/2011	4:09:56 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:09:56 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:09:56 PM	Tube furnace set to 0
9/7/2011	4:11:28 PM	Helium valve closed
9/7/2011	4:11:28 PM	H2 valve closed
9/7/2011	4:11:28 PM	BCl3 valve closed
9/7/2011	4:11:28 PM	PH3 valve closed
9/7/2011	4:11:28 PM	SiCl4 pre valve closed
9/7/2011	4:11:28 PM	SiCl4 post valve closed
9/7/2011	4:11:28 PM	Main Vac valve closed
9/7/2011	4:11:28 PM	Bubbler valve closed
9/7/2011	4:11:28 PM	Bypass valve opened
9/7/2011	4:11:28 PM	Helium MFC set to  0.000000
9/7/2011	4:11:28 PM	H2 MFC set to  0.000000
9/7/2011	4:11:28 PM	BCl3 MFC set to  0.000000
9/7/2011	4:11:28 PM	PHl3 MFC set to  0.000000
9/7/2011	4:11:28 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:11:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:11:28 PM	Tube furnace set to 0
9/7/2011	4:12:28 PM	Helium valve closed
9/7/2011	4:12:28 PM	H2 valve closed
9/7/2011	4:12:28 PM	BCl3 valve closed
9/7/2011	4:12:28 PM	PH3 valve closed
9/7/2011	4:12:28 PM	SiCl4 pre valve closed
9/7/2011	4:12:28 PM	SiCl4 post valve closed
9/7/2011	4:12:28 PM	Bypass valve closed
9/7/2011	4:12:28 PM	Bubbler valve closed
9/7/2011	4:12:28 PM	Main Vac valve opened
9/7/2011	4:12:28 PM	Helium MFC set to  0.000000
9/7/2011	4:12:28 PM	H2 MFC set to  0.000000
9/7/2011	4:12:28 PM	BCl3 MFC set to  0.000000
9/7/2011	4:12:28 PM	PHl3 MFC set to  0.000000
9/7/2011	4:12:28 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:12:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:12:28 PM	Tube furnace set to 0
9/7/2011	4:12:29 PM	Run finished at 4:12 PM
9/7/2011	4:12:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	4:19:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	4:19:46 PM	Recipe started at 4:19 PM
9/7/2011	4:19:46 PM	Helium valve closed
9/7/2011	4:19:46 PM	H2 valve closed
9/7/2011	4:19:46 PM	BCl3 valve closed
9/7/2011	4:19:46 PM	PH3 valve closed
9/7/2011	4:19:46 PM	SiCl4 pre valve closed
9/7/2011	4:19:46 PM	SiCl4 post valve closed
9/7/2011	4:19:46 PM	Main Vac valve closed
9/7/2011	4:19:46 PM	Bypass valve closed
9/7/2011	4:19:46 PM	Bubbler valve closed
9/7/2011	4:19:46 PM	Helium MFC set to  0.000000
9/7/2011	4:19:46 PM	H2 MFC set to  0.000000
9/7/2011	4:19:46 PM	BCl3 MFC set to  0.000000
9/7/2011	4:19:46 PM	PHl3 MFC set to  0.000000
9/7/2011	4:19:46 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:19:46 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:19:46 PM	Tube furnace set to 0
9/7/2011	4:19:49 PM	H2 valve closed
9/7/2011	4:19:49 PM	BCl3 valve closed
9/7/2011	4:19:49 PM	PH3 valve closed
9/7/2011	4:19:49 PM	SiCl4 pre valve closed
9/7/2011	4:19:49 PM	SiCl4 post valve closed
9/7/2011	4:19:49 PM	Main Vac valve closed
9/7/2011	4:19:49 PM	Bypass valve closed
9/7/2011	4:19:49 PM	Bubbler valve closed
9/7/2011	4:19:49 PM	Helium valve opened
9/7/2011	4:19:49 PM	Helium MFC set to  500.000000
9/7/2011	4:19:49 PM	H2 MFC set to  0.000000
9/7/2011	4:19:49 PM	BCl3 MFC set to  0.000000
9/7/2011	4:19:49 PM	PHl3 MFC set to  0.000000
9/7/2011	4:19:49 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:19:49 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:19:49 PM	Tube furnace set to 0
9/7/2011	4:20:54 PM	Helium valve closed
9/7/2011	4:20:54 PM	H2 valve closed
9/7/2011	4:20:54 PM	BCl3 valve closed
9/7/2011	4:20:54 PM	PH3 valve closed
9/7/2011	4:20:54 PM	SiCl4 pre valve closed
9/7/2011	4:20:54 PM	SiCl4 post valve closed
9/7/2011	4:20:54 PM	Main Vac valve closed
9/7/2011	4:20:54 PM	Bypass valve closed
9/7/2011	4:20:54 PM	Bubbler valve closed
9/7/2011	4:20:54 PM	Helium MFC set to  0.000000
9/7/2011	4:20:54 PM	H2 MFC set to  0.000000
9/7/2011	4:20:54 PM	BCl3 MFC set to  0.000000
9/7/2011	4:20:54 PM	PHl3 MFC set to  0.000000
9/7/2011	4:20:54 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:20:54 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:20:54 PM	Tube furnace set to 0
9/7/2011	4:20:55 PM	Run finished at 4:20 PM
9/7/2011	4:20:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	4:24:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	4:24:41 PM	Recipe started at 4:24 PM
9/7/2011	4:24:41 PM	Helium valve closed
9/7/2011	4:24:41 PM	H2 valve closed
9/7/2011	4:24:41 PM	BCl3 valve closed
9/7/2011	4:24:41 PM	PH3 valve closed
9/7/2011	4:24:41 PM	SiCl4 pre valve closed
9/7/2011	4:24:41 PM	SiCl4 post valve closed
9/7/2011	4:24:41 PM	Main Vac valve closed
9/7/2011	4:24:41 PM	Bubbler valve closed
9/7/2011	4:24:41 PM	Bypass valve opened
9/7/2011	4:24:41 PM	Helium MFC set to  0.000000
9/7/2011	4:24:41 PM	H2 MFC set to  0.000000
9/7/2011	4:24:41 PM	BCl3 MFC set to  0.000000
9/7/2011	4:24:41 PM	PHl3 MFC set to  0.000000
9/7/2011	4:24:41 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:24:41 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:24:41 PM	Tube furnace set to 0
9/7/2011	4:25:53 PM	Helium valve closed
9/7/2011	4:25:53 PM	H2 valve closed
9/7/2011	4:25:53 PM	BCl3 valve closed
9/7/2011	4:25:53 PM	PH3 valve closed
9/7/2011	4:25:53 PM	SiCl4 pre valve closed
9/7/2011	4:25:53 PM	SiCl4 post valve closed
9/7/2011	4:25:53 PM	Main Vac valve closed
9/7/2011	4:25:53 PM	Bubbler valve closed
9/7/2011	4:25:53 PM	Bypass valve opened
9/7/2011	4:25:53 PM	Helium MFC set to  0.000000
9/7/2011	4:25:53 PM	H2 MFC set to  0.000000
9/7/2011	4:25:53 PM	BCl3 MFC set to  0.000000
9/7/2011	4:25:53 PM	PHl3 MFC set to  0.000000
9/7/2011	4:25:53 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:25:53 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:25:54 PM	Tube furnace set to 0
9/7/2011	4:26:54 PM	Helium valve closed
9/7/2011	4:26:54 PM	H2 valve closed
9/7/2011	4:26:54 PM	BCl3 valve closed
9/7/2011	4:26:54 PM	PH3 valve closed
9/7/2011	4:26:54 PM	SiCl4 pre valve closed
9/7/2011	4:26:54 PM	SiCl4 post valve closed
9/7/2011	4:26:54 PM	Bypass valve closed
9/7/2011	4:26:54 PM	Bubbler valve closed
9/7/2011	4:26:54 PM	Main Vac valve opened
9/7/2011	4:26:54 PM	Helium MFC set to  0.000000
9/7/2011	4:26:54 PM	H2 MFC set to  0.000000
9/7/2011	4:26:54 PM	BCl3 MFC set to  0.000000
9/7/2011	4:26:54 PM	PHl3 MFC set to  0.000000
9/7/2011	4:26:54 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:26:54 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:26:54 PM	Tube furnace set to 0
9/7/2011	4:26:55 PM	Run finished at 4:26 PM
9/7/2011	4:26:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	4:37:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	4:37:52 PM	Recipe started at 4:37 PM
9/7/2011	4:37:52 PM	Helium valve closed
9/7/2011	4:37:52 PM	H2 valve closed
9/7/2011	4:37:52 PM	BCl3 valve closed
9/7/2011	4:37:52 PM	PH3 valve closed
9/7/2011	4:37:52 PM	SiCl4 pre valve closed
9/7/2011	4:37:52 PM	SiCl4 post valve closed
9/7/2011	4:37:52 PM	Main Vac valve closed
9/7/2011	4:37:52 PM	Bubbler valve closed
9/7/2011	4:37:52 PM	Bypass valve opened
9/7/2011	4:37:52 PM	Helium MFC set to  0.000000
9/7/2011	4:37:52 PM	H2 MFC set to  0.000000
9/7/2011	4:37:52 PM	BCl3 MFC set to  0.000000
9/7/2011	4:37:52 PM	PHl3 MFC set to  0.000000
9/7/2011	4:37:52 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:37:52 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:37:52 PM	Tube furnace set to 0
9/7/2011	4:37:52 PM	Helium valve closed
9/7/2011	4:37:52 PM	H2 valve closed
9/7/2011	4:37:52 PM	BCl3 valve closed
9/7/2011	4:37:52 PM	PH3 valve closed
9/7/2011	4:37:52 PM	SiCl4 pre valve closed
9/7/2011	4:37:52 PM	SiCl4 post valve closed
9/7/2011	4:37:52 PM	Main Vac valve closed
9/7/2011	4:37:52 PM	Bubbler valve closed
9/7/2011	4:37:52 PM	Bypass valve opened
9/7/2011	4:37:52 PM	Helium MFC set to  0.000000
9/7/2011	4:37:52 PM	H2 MFC set to  0.000000
9/7/2011	4:37:52 PM	BCl3 MFC set to  0.000000
9/7/2011	4:37:52 PM	PHl3 MFC set to  0.000000
9/7/2011	4:37:52 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:37:52 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:37:52 PM	Tube furnace set to 0
9/7/2011	4:38:22 PM	Helium valve closed
9/7/2011	4:38:22 PM	H2 valve closed
9/7/2011	4:38:22 PM	BCl3 valve closed
9/7/2011	4:38:22 PM	PH3 valve closed
9/7/2011	4:38:22 PM	SiCl4 pre valve closed
9/7/2011	4:38:22 PM	SiCl4 post valve closed
9/7/2011	4:38:22 PM	Bypass valve closed
9/7/2011	4:38:22 PM	Bubbler valve closed
9/7/2011	4:38:22 PM	Main Vac valve opened
9/7/2011	4:38:22 PM	Helium MFC set to  0.000000
9/7/2011	4:38:22 PM	H2 MFC set to  0.000000
9/7/2011	4:38:22 PM	BCl3 MFC set to  0.000000
9/7/2011	4:38:22 PM	PHl3 MFC set to  0.000000
9/7/2011	4:38:22 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:38:22 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:38:22 PM	Tube furnace set to 0
9/7/2011	4:38:52 PM	H2 valve closed
9/7/2011	4:38:52 PM	BCl3 valve closed
9/7/2011	4:38:52 PM	PH3 valve closed
9/7/2011	4:38:52 PM	SiCl4 pre valve closed
9/7/2011	4:38:52 PM	SiCl4 post valve closed
9/7/2011	4:38:52 PM	Bypass valve closed
9/7/2011	4:38:52 PM	Bubbler valve closed
9/7/2011	4:38:52 PM	Helium valve opened
9/7/2011	4:38:52 PM	Main Vac valve opened
9/7/2011	4:38:53 PM	Helium MFC set to  20.000000
9/7/2011	4:38:53 PM	H2 MFC set to  0.000000
9/7/2011	4:38:53 PM	BCl3 MFC set to  0.000000
9/7/2011	4:38:53 PM	PHl3 MFC set to  0.000000
9/7/2011	4:38:53 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:38:53 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:38:53 PM	Tube furnace set to 0
9/7/2011	4:39:23 PM	Helium valve closed
9/7/2011	4:39:23 PM	H2 valve closed
9/7/2011	4:39:23 PM	BCl3 valve closed
9/7/2011	4:39:23 PM	PH3 valve closed
9/7/2011	4:39:23 PM	SiCl4 pre valve closed
9/7/2011	4:39:23 PM	SiCl4 post valve closed
9/7/2011	4:39:23 PM	Bypass valve closed
9/7/2011	4:39:23 PM	Bubbler valve closed
9/7/2011	4:39:23 PM	Main Vac valve opened
9/7/2011	4:39:23 PM	Helium MFC set to  0.000000
9/7/2011	4:39:23 PM	H2 MFC set to  0.000000
9/7/2011	4:39:23 PM	BCl3 MFC set to  0.000000
9/7/2011	4:39:23 PM	PHl3 MFC set to  0.000000
9/7/2011	4:39:23 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:39:23 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:39:23 PM	Tube furnace set to 0
9/7/2011	4:39:53 PM	H2 valve closed
9/7/2011	4:39:53 PM	BCl3 valve closed
9/7/2011	4:39:53 PM	PH3 valve closed
9/7/2011	4:39:53 PM	SiCl4 pre valve closed
9/7/2011	4:39:53 PM	SiCl4 post valve closed
9/7/2011	4:39:53 PM	Bypass valve closed
9/7/2011	4:39:53 PM	Bubbler valve closed
9/7/2011	4:39:53 PM	Helium valve opened
9/7/2011	4:39:53 PM	Main Vac valve opened
9/7/2011	4:39:53 PM	Helium MFC set to  20.000000
9/7/2011	4:39:53 PM	H2 MFC set to  0.000000
9/7/2011	4:39:53 PM	BCl3 MFC set to  0.000000
9/7/2011	4:39:53 PM	PHl3 MFC set to  0.000000
9/7/2011	4:39:53 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:39:53 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:39:53 PM	Tube furnace set to 0
9/7/2011	4:40:23 PM	Helium valve closed
9/7/2011	4:40:23 PM	H2 valve closed
9/7/2011	4:40:23 PM	BCl3 valve closed
9/7/2011	4:40:23 PM	PH3 valve closed
9/7/2011	4:40:23 PM	SiCl4 pre valve closed
9/7/2011	4:40:23 PM	SiCl4 post valve closed
9/7/2011	4:40:23 PM	Bypass valve closed
9/7/2011	4:40:23 PM	Bubbler valve closed
9/7/2011	4:40:23 PM	Main Vac valve opened
9/7/2011	4:40:23 PM	Helium MFC set to  0.000000
9/7/2011	4:40:23 PM	H2 MFC set to  0.000000
9/7/2011	4:40:23 PM	BCl3 MFC set to  0.000000
9/7/2011	4:40:23 PM	PHl3 MFC set to  0.000000
9/7/2011	4:40:23 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:40:23 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:40:23 PM	Tube furnace set to 0
9/7/2011	4:40:53 PM	H2 valve closed
9/7/2011	4:40:53 PM	BCl3 valve closed
9/7/2011	4:40:53 PM	PH3 valve closed
9/7/2011	4:40:53 PM	SiCl4 pre valve closed
9/7/2011	4:40:53 PM	SiCl4 post valve closed
9/7/2011	4:40:53 PM	Bypass valve closed
9/7/2011	4:40:53 PM	Bubbler valve closed
9/7/2011	4:40:53 PM	Helium valve opened
9/7/2011	4:40:53 PM	Main Vac valve opened
9/7/2011	4:40:53 PM	Helium MFC set to  20.000000
9/7/2011	4:40:53 PM	H2 MFC set to  0.000000
9/7/2011	4:40:53 PM	BCl3 MFC set to  0.000000
9/7/2011	4:40:53 PM	PHl3 MFC set to  0.000000
9/7/2011	4:40:53 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:40:53 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:40:53 PM	Tube furnace set to 0
9/7/2011	4:41:23 PM	Helium valve closed
9/7/2011	4:41:23 PM	H2 valve closed
9/7/2011	4:41:23 PM	BCl3 valve closed
9/7/2011	4:41:23 PM	PH3 valve closed
9/7/2011	4:41:23 PM	SiCl4 pre valve closed
9/7/2011	4:41:23 PM	SiCl4 post valve closed
9/7/2011	4:41:23 PM	Bypass valve closed
9/7/2011	4:41:23 PM	Bubbler valve closed
9/7/2011	4:41:23 PM	Main Vac valve opened
9/7/2011	4:41:23 PM	Helium MFC set to  0.000000
9/7/2011	4:41:23 PM	H2 MFC set to  0.000000
9/7/2011	4:41:23 PM	BCl3 MFC set to  0.000000
9/7/2011	4:41:23 PM	PHl3 MFC set to  0.000000
9/7/2011	4:41:23 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:41:23 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:41:24 PM	Tube furnace set to 0
9/7/2011	4:41:54 PM	H2 valve closed
9/7/2011	4:41:54 PM	BCl3 valve closed
9/7/2011	4:41:54 PM	PH3 valve closed
9/7/2011	4:41:54 PM	SiCl4 pre valve closed
9/7/2011	4:41:54 PM	SiCl4 post valve closed
9/7/2011	4:41:54 PM	Bypass valve closed
9/7/2011	4:41:54 PM	Bubbler valve closed
9/7/2011	4:41:54 PM	Helium valve opened
9/7/2011	4:41:54 PM	Main Vac valve opened
9/7/2011	4:41:54 PM	Helium MFC set to  20.000000
9/7/2011	4:41:54 PM	H2 MFC set to  0.000000
9/7/2011	4:41:54 PM	BCl3 MFC set to  0.000000
9/7/2011	4:41:54 PM	PHl3 MFC set to  0.000000
9/7/2011	4:41:54 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:41:54 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:41:54 PM	Tube furnace set to 0
9/7/2011	4:42:24 PM	Helium valve closed
9/7/2011	4:42:24 PM	H2 valve closed
9/7/2011	4:42:24 PM	BCl3 valve closed
9/7/2011	4:42:24 PM	PH3 valve closed
9/7/2011	4:42:24 PM	SiCl4 pre valve closed
9/7/2011	4:42:24 PM	SiCl4 post valve closed
9/7/2011	4:42:24 PM	Bypass valve closed
9/7/2011	4:42:24 PM	Bubbler valve closed
9/7/2011	4:42:24 PM	Main Vac valve opened
9/7/2011	4:42:24 PM	Helium MFC set to  0.000000
9/7/2011	4:42:24 PM	H2 MFC set to  0.000000
9/7/2011	4:42:24 PM	BCl3 MFC set to  0.000000
9/7/2011	4:42:24 PM	PHl3 MFC set to  0.000000
9/7/2011	4:42:24 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:42:24 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:42:24 PM	Tube furnace set to 0
9/7/2011	4:42:54 PM	H2 valve closed
9/7/2011	4:42:54 PM	BCl3 valve closed
9/7/2011	4:42:54 PM	PH3 valve closed
9/7/2011	4:42:54 PM	SiCl4 pre valve closed
9/7/2011	4:42:54 PM	SiCl4 post valve closed
9/7/2011	4:42:54 PM	Bypass valve closed
9/7/2011	4:42:54 PM	Bubbler valve closed
9/7/2011	4:42:54 PM	Helium valve opened
9/7/2011	4:42:54 PM	Main Vac valve opened
9/7/2011	4:42:54 PM	Helium MFC set to  20.000000
9/7/2011	4:42:54 PM	H2 MFC set to  0.000000
9/7/2011	4:42:54 PM	BCl3 MFC set to  0.000000
9/7/2011	4:42:54 PM	PHl3 MFC set to  0.000000
9/7/2011	4:42:54 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:42:54 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:42:54 PM	Tube furnace set to 0
9/7/2011	4:43:24 PM	Helium valve closed
9/7/2011	4:43:24 PM	H2 valve closed
9/7/2011	4:43:24 PM	BCl3 valve closed
9/7/2011	4:43:24 PM	PH3 valve closed
9/7/2011	4:43:24 PM	SiCl4 pre valve closed
9/7/2011	4:43:24 PM	SiCl4 post valve closed
9/7/2011	4:43:24 PM	Bypass valve closed
9/7/2011	4:43:24 PM	Bubbler valve closed
9/7/2011	4:43:24 PM	Main Vac valve opened
9/7/2011	4:43:24 PM	Helium MFC set to  0.000000
9/7/2011	4:43:24 PM	H2 MFC set to  0.000000
9/7/2011	4:43:24 PM	BCl3 MFC set to  0.000000
9/7/2011	4:43:24 PM	PHl3 MFC set to  0.000000
9/7/2011	4:43:24 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:43:24 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:43:25 PM	Tube furnace set to 0
9/7/2011	4:43:55 PM	H2 valve closed
9/7/2011	4:43:55 PM	BCl3 valve closed
9/7/2011	4:43:55 PM	PH3 valve closed
9/7/2011	4:43:55 PM	SiCl4 pre valve closed
9/7/2011	4:43:55 PM	SiCl4 post valve closed
9/7/2011	4:43:55 PM	Bypass valve closed
9/7/2011	4:43:55 PM	Bubbler valve closed
9/7/2011	4:43:55 PM	Helium valve opened
9/7/2011	4:43:55 PM	Main Vac valve opened
9/7/2011	4:43:55 PM	Helium MFC set to  20.000000
9/7/2011	4:43:55 PM	H2 MFC set to  0.000000
9/7/2011	4:43:55 PM	BCl3 MFC set to  0.000000
9/7/2011	4:43:55 PM	PHl3 MFC set to  0.000000
9/7/2011	4:43:55 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:43:55 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:43:55 PM	Tube furnace set to 0
9/7/2011	4:44:25 PM	Helium valve closed
9/7/2011	4:44:25 PM	H2 valve closed
9/7/2011	4:44:25 PM	BCl3 valve closed
9/7/2011	4:44:25 PM	PH3 valve closed
9/7/2011	4:44:25 PM	SiCl4 pre valve closed
9/7/2011	4:44:25 PM	SiCl4 post valve closed
9/7/2011	4:44:25 PM	Bypass valve closed
9/7/2011	4:44:25 PM	Bubbler valve closed
9/7/2011	4:44:25 PM	Main Vac valve opened
9/7/2011	4:44:25 PM	Helium MFC set to  0.000000
9/7/2011	4:44:25 PM	H2 MFC set to  0.000000
9/7/2011	4:44:25 PM	BCl3 MFC set to  0.000000
9/7/2011	4:44:25 PM	PHl3 MFC set to  0.000000
9/7/2011	4:44:25 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:44:25 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:44:25 PM	Tube furnace set to 0
9/7/2011	4:44:55 PM	H2 valve closed
9/7/2011	4:44:55 PM	BCl3 valve closed
9/7/2011	4:44:55 PM	PH3 valve closed
9/7/2011	4:44:55 PM	SiCl4 pre valve closed
9/7/2011	4:44:55 PM	SiCl4 post valve closed
9/7/2011	4:44:55 PM	Bypass valve closed
9/7/2011	4:44:55 PM	Bubbler valve closed
9/7/2011	4:44:55 PM	Helium valve opened
9/7/2011	4:44:55 PM	Main Vac valve opened
9/7/2011	4:44:55 PM	Helium MFC set to  20.000000
9/7/2011	4:44:55 PM	H2 MFC set to  0.000000
9/7/2011	4:44:55 PM	BCl3 MFC set to  0.000000
9/7/2011	4:44:55 PM	PHl3 MFC set to  0.000000
9/7/2011	4:44:55 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:44:55 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:44:55 PM	Tube furnace set to 0
9/7/2011	4:45:25 PM	Helium valve closed
9/7/2011	4:45:25 PM	H2 valve closed
9/7/2011	4:45:25 PM	BCl3 valve closed
9/7/2011	4:45:25 PM	PH3 valve closed
9/7/2011	4:45:25 PM	SiCl4 pre valve closed
9/7/2011	4:45:25 PM	SiCl4 post valve closed
9/7/2011	4:45:25 PM	Bypass valve closed
9/7/2011	4:45:25 PM	Bubbler valve closed
9/7/2011	4:45:25 PM	Main Vac valve opened
9/7/2011	4:45:25 PM	Helium MFC set to  0.000000
9/7/2011	4:45:25 PM	H2 MFC set to  0.000000
9/7/2011	4:45:25 PM	BCl3 MFC set to  0.000000
9/7/2011	4:45:25 PM	PHl3 MFC set to  0.000000
9/7/2011	4:45:25 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:45:25 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:45:25 PM	Tube furnace set to 0
9/7/2011	4:45:55 PM	H2 valve closed
9/7/2011	4:45:55 PM	BCl3 valve closed
9/7/2011	4:45:55 PM	PH3 valve closed
9/7/2011	4:45:55 PM	SiCl4 pre valve closed
9/7/2011	4:45:55 PM	SiCl4 post valve closed
9/7/2011	4:45:55 PM	Bypass valve closed
9/7/2011	4:45:55 PM	Bubbler valve closed
9/7/2011	4:45:55 PM	Helium valve opened
9/7/2011	4:45:55 PM	Main Vac valve opened
9/7/2011	4:45:55 PM	Helium MFC set to  20.000000
9/7/2011	4:45:55 PM	H2 MFC set to  0.000000
9/7/2011	4:45:55 PM	BCl3 MFC set to  0.000000
9/7/2011	4:45:55 PM	PHl3 MFC set to  0.000000
9/7/2011	4:45:55 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:45:55 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:45:56 PM	Tube furnace set to 0
9/7/2011	4:46:26 PM	Helium valve closed
9/7/2011	4:46:26 PM	H2 valve closed
9/7/2011	4:46:26 PM	BCl3 valve closed
9/7/2011	4:46:26 PM	PH3 valve closed
9/7/2011	4:46:26 PM	SiCl4 pre valve closed
9/7/2011	4:46:26 PM	SiCl4 post valve closed
9/7/2011	4:46:26 PM	Bypass valve closed
9/7/2011	4:46:26 PM	Bubbler valve closed
9/7/2011	4:46:26 PM	Main Vac valve opened
9/7/2011	4:46:26 PM	Helium MFC set to  0.000000
9/7/2011	4:46:26 PM	H2 MFC set to  0.000000
9/7/2011	4:46:26 PM	BCl3 MFC set to  0.000000
9/7/2011	4:46:26 PM	PHl3 MFC set to  0.000000
9/7/2011	4:46:26 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:46:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:46:26 PM	Tube furnace set to 0
9/7/2011	4:46:56 PM	H2 valve closed
9/7/2011	4:46:56 PM	BCl3 valve closed
9/7/2011	4:46:56 PM	PH3 valve closed
9/7/2011	4:46:56 PM	SiCl4 pre valve closed
9/7/2011	4:46:56 PM	SiCl4 post valve closed
9/7/2011	4:46:56 PM	Bypass valve closed
9/7/2011	4:46:56 PM	Bubbler valve closed
9/7/2011	4:46:56 PM	Helium valve opened
9/7/2011	4:46:56 PM	Main Vac valve opened
9/7/2011	4:46:56 PM	Helium MFC set to  20.000000
9/7/2011	4:46:56 PM	H2 MFC set to  0.000000
9/7/2011	4:46:56 PM	BCl3 MFC set to  0.000000
9/7/2011	4:46:56 PM	PHl3 MFC set to  0.000000
9/7/2011	4:46:56 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:46:56 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:46:56 PM	Tube furnace set to 0
9/7/2011	4:47:26 PM	Helium valve closed
9/7/2011	4:47:26 PM	H2 valve closed
9/7/2011	4:47:26 PM	BCl3 valve closed
9/7/2011	4:47:26 PM	PH3 valve closed
9/7/2011	4:47:26 PM	SiCl4 pre valve closed
9/7/2011	4:47:26 PM	SiCl4 post valve closed
9/7/2011	4:47:26 PM	Bypass valve closed
9/7/2011	4:47:26 PM	Bubbler valve closed
9/7/2011	4:47:26 PM	Main Vac valve opened
9/7/2011	4:47:26 PM	Helium MFC set to  0.000000
9/7/2011	4:47:26 PM	H2 MFC set to  0.000000
9/7/2011	4:47:26 PM	BCl3 MFC set to  0.000000
9/7/2011	4:47:26 PM	PHl3 MFC set to  0.000000
9/7/2011	4:47:26 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:47:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:47:26 PM	Tube furnace set to 0
9/7/2011	4:47:56 PM	H2 valve closed
9/7/2011	4:47:56 PM	BCl3 valve closed
9/7/2011	4:47:56 PM	PH3 valve closed
9/7/2011	4:47:56 PM	SiCl4 pre valve closed
9/7/2011	4:47:56 PM	SiCl4 post valve closed
9/7/2011	4:47:56 PM	Bypass valve closed
9/7/2011	4:47:56 PM	Bubbler valve closed
9/7/2011	4:47:56 PM	Helium valve opened
9/7/2011	4:47:56 PM	Main Vac valve opened
9/7/2011	4:47:56 PM	Helium MFC set to  20.000000
9/7/2011	4:47:56 PM	H2 MFC set to  0.000000
9/7/2011	4:47:56 PM	BCl3 MFC set to  0.000000
9/7/2011	4:47:56 PM	PHl3 MFC set to  0.000000
9/7/2011	4:47:56 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:47:56 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:47:56 PM	Tube furnace set to 0
9/7/2011	4:48:26 PM	Helium valve closed
9/7/2011	4:48:26 PM	H2 valve closed
9/7/2011	4:48:26 PM	BCl3 valve closed
9/7/2011	4:48:26 PM	PH3 valve closed
9/7/2011	4:48:26 PM	SiCl4 pre valve closed
9/7/2011	4:48:26 PM	SiCl4 post valve closed
9/7/2011	4:48:26 PM	Bypass valve closed
9/7/2011	4:48:26 PM	Bubbler valve closed
9/7/2011	4:48:26 PM	Main Vac valve opened
9/7/2011	4:48:26 PM	Helium MFC set to  0.000000
9/7/2011	4:48:26 PM	H2 MFC set to  0.000000
9/7/2011	4:48:27 PM	BCl3 MFC set to  0.000000
9/7/2011	4:48:27 PM	PHl3 MFC set to  0.000000
9/7/2011	4:48:27 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:48:27 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:48:27 PM	Tube furnace set to 0
9/7/2011	4:48:28 PM	Run finished at 4:48 PM
9/7/2011	4:48:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	4:49:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	4:49:28 PM	Recipe started at 4:49 PM
9/7/2011	4:49:28 PM	Helium valve closed
9/7/2011	4:49:28 PM	H2 valve closed
9/7/2011	4:49:28 PM	BCl3 valve closed
9/7/2011	4:49:28 PM	PH3 valve closed
9/7/2011	4:49:28 PM	SiCl4 pre valve closed
9/7/2011	4:49:28 PM	SiCl4 post valve closed
9/7/2011	4:49:28 PM	Main Vac valve closed
9/7/2011	4:49:28 PM	Bubbler valve closed
9/7/2011	4:49:28 PM	Bypass valve opened
9/7/2011	4:49:28 PM	Helium MFC set to  0.000000
9/7/2011	4:49:28 PM	H2 MFC set to  0.000000
9/7/2011	4:49:28 PM	BCl3 MFC set to  0.000000
9/7/2011	4:49:28 PM	PHl3 MFC set to  0.000000
9/7/2011	4:49:28 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:49:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:49:28 PM	Tube furnace set to 0
9/7/2011	4:49:28 PM	Helium valve closed
9/7/2011	4:49:28 PM	H2 valve closed
9/7/2011	4:49:28 PM	BCl3 valve closed
9/7/2011	4:49:28 PM	PH3 valve closed
9/7/2011	4:49:28 PM	SiCl4 pre valve closed
9/7/2011	4:49:28 PM	SiCl4 post valve closed
9/7/2011	4:49:28 PM	Main Vac valve closed
9/7/2011	4:49:28 PM	Bubbler valve closed
9/7/2011	4:49:28 PM	Bypass valve opened
9/7/2011	4:49:28 PM	Helium MFC set to  0.000000
9/7/2011	4:49:28 PM	H2 MFC set to  0.000000
9/7/2011	4:49:28 PM	BCl3 MFC set to  0.000000
9/7/2011	4:49:28 PM	PHl3 MFC set to  0.000000
9/7/2011	4:49:28 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:49:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:49:28 PM	Tube furnace set to 0
9/7/2011	4:49:58 PM	Helium valve closed
9/7/2011	4:49:58 PM	H2 valve closed
9/7/2011	4:49:58 PM	BCl3 valve closed
9/7/2011	4:49:58 PM	PH3 valve closed
9/7/2011	4:49:58 PM	SiCl4 pre valve closed
9/7/2011	4:49:58 PM	SiCl4 post valve closed
9/7/2011	4:49:58 PM	Bypass valve closed
9/7/2011	4:49:58 PM	Bubbler valve closed
9/7/2011	4:49:58 PM	Main Vac valve opened
9/7/2011	4:49:58 PM	Helium MFC set to  0.000000
9/7/2011	4:49:58 PM	H2 MFC set to  0.000000
9/7/2011	4:49:58 PM	BCl3 MFC set to  0.000000
9/7/2011	4:49:58 PM	PHl3 MFC set to  0.000000
9/7/2011	4:49:58 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:49:58 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:49:58 PM	Tube furnace set to 0
9/7/2011	4:50:28 PM	H2 valve closed
9/7/2011	4:50:28 PM	BCl3 valve closed
9/7/2011	4:50:28 PM	PH3 valve closed
9/7/2011	4:50:28 PM	SiCl4 pre valve closed
9/7/2011	4:50:28 PM	SiCl4 post valve closed
9/7/2011	4:50:28 PM	Bypass valve closed
9/7/2011	4:50:28 PM	Bubbler valve closed
9/7/2011	4:50:28 PM	Helium valve opened
9/7/2011	4:50:28 PM	Main Vac valve opened
9/7/2011	4:50:28 PM	Helium MFC set to  20.000000
9/7/2011	4:50:28 PM	H2 MFC set to  0.000000
9/7/2011	4:50:28 PM	BCl3 MFC set to  0.000000
9/7/2011	4:50:28 PM	PHl3 MFC set to  0.000000
9/7/2011	4:50:28 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:50:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:50:29 PM	Tube furnace set to 0
9/7/2011	4:50:59 PM	Helium valve closed
9/7/2011	4:50:59 PM	H2 valve closed
9/7/2011	4:50:59 PM	BCl3 valve closed
9/7/2011	4:50:59 PM	PH3 valve closed
9/7/2011	4:50:59 PM	SiCl4 pre valve closed
9/7/2011	4:50:59 PM	SiCl4 post valve closed
9/7/2011	4:50:59 PM	Bypass valve closed
9/7/2011	4:50:59 PM	Bubbler valve closed
9/7/2011	4:50:59 PM	Main Vac valve opened
9/7/2011	4:50:59 PM	Helium MFC set to  0.000000
9/7/2011	4:50:59 PM	H2 MFC set to  0.000000
9/7/2011	4:50:59 PM	BCl3 MFC set to  0.000000
9/7/2011	4:50:59 PM	PHl3 MFC set to  0.000000
9/7/2011	4:50:59 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:50:59 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:50:59 PM	Tube furnace set to 0
9/7/2011	4:51:29 PM	H2 valve closed
9/7/2011	4:51:29 PM	BCl3 valve closed
9/7/2011	4:51:29 PM	PH3 valve closed
9/7/2011	4:51:29 PM	SiCl4 pre valve closed
9/7/2011	4:51:29 PM	SiCl4 post valve closed
9/7/2011	4:51:29 PM	Bypass valve closed
9/7/2011	4:51:29 PM	Bubbler valve closed
9/7/2011	4:51:29 PM	Helium valve opened
9/7/2011	4:51:29 PM	Main Vac valve opened
9/7/2011	4:51:29 PM	Helium MFC set to  20.000000
9/7/2011	4:51:29 PM	H2 MFC set to  0.000000
9/7/2011	4:51:29 PM	BCl3 MFC set to  0.000000
9/7/2011	4:51:29 PM	PHl3 MFC set to  0.000000
9/7/2011	4:51:29 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:51:29 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:51:29 PM	Tube furnace set to 0
9/7/2011	4:51:59 PM	Helium valve closed
9/7/2011	4:51:59 PM	H2 valve closed
9/7/2011	4:51:59 PM	BCl3 valve closed
9/7/2011	4:51:59 PM	PH3 valve closed
9/7/2011	4:51:59 PM	SiCl4 pre valve closed
9/7/2011	4:51:59 PM	SiCl4 post valve closed
9/7/2011	4:51:59 PM	Bypass valve closed
9/7/2011	4:51:59 PM	Bubbler valve closed
9/7/2011	4:51:59 PM	Main Vac valve opened
9/7/2011	4:51:59 PM	Helium MFC set to  0.000000
9/7/2011	4:51:59 PM	H2 MFC set to  0.000000
9/7/2011	4:51:59 PM	BCl3 MFC set to  0.000000
9/7/2011	4:51:59 PM	PHl3 MFC set to  0.000000
9/7/2011	4:51:59 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:51:59 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:51:59 PM	Tube furnace set to 0
9/7/2011	4:52:29 PM	H2 valve closed
9/7/2011	4:52:29 PM	BCl3 valve closed
9/7/2011	4:52:29 PM	PH3 valve closed
9/7/2011	4:52:29 PM	SiCl4 pre valve closed
9/7/2011	4:52:29 PM	SiCl4 post valve closed
9/7/2011	4:52:29 PM	Bypass valve closed
9/7/2011	4:52:29 PM	Bubbler valve closed
9/7/2011	4:52:29 PM	Helium valve opened
9/7/2011	4:52:29 PM	Main Vac valve opened
9/7/2011	4:52:29 PM	Helium MFC set to  20.000000
9/7/2011	4:52:29 PM	H2 MFC set to  0.000000
9/7/2011	4:52:29 PM	BCl3 MFC set to  0.000000
9/7/2011	4:52:29 PM	PHl3 MFC set to  0.000000
9/7/2011	4:52:29 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:52:29 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:52:29 PM	Tube furnace set to 0
9/7/2011	4:52:42 PM	Helium valve closed
9/7/2011	4:52:42 PM	H2 valve closed
9/7/2011	4:52:42 PM	BCl3 valve closed
9/7/2011	4:52:42 PM	PH3 valve closed
9/7/2011	4:52:42 PM	SiCl4 pre valve closed
9/7/2011	4:52:42 PM	SiCl4 post valve closed
9/7/2011	4:52:42 PM	Bypass valve closed
9/7/2011	4:52:42 PM	Bubbler valve closed
9/7/2011	4:52:42 PM	Main Vac valve opened
9/7/2011	4:52:42 PM	Helium MFC set to  0.000000
9/7/2011	4:52:42 PM	H2 MFC set to  0.000000
9/7/2011	4:52:42 PM	BCl3 MFC set to  0.000000
9/7/2011	4:52:42 PM	PHl3 MFC set to  0.000000
9/7/2011	4:52:42 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:52:42 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:52:43 PM	Tube furnace set to 0
9/7/2011	4:53:07 PM	Run aborted at 4:53 PM
9/7/2011	4:53:07 PM	Helium valve closed
9/7/2011	4:53:07 PM	H2 valve closed
9/7/2011	4:53:07 PM	BCl3 valve closed
9/7/2011	4:53:07 PM	PH3 valve closed
9/7/2011	4:53:07 PM	SiCl4 pre valve closed
9/7/2011	4:53:07 PM	SiCl4 post valve closed
9/7/2011	4:53:07 PM	Bypass valve closed
9/7/2011	4:53:07 PM	Main Vac valve closed
9/7/2011	4:53:07 PM	Bubbler valve closed
9/7/2011	4:53:07 PM	Helium MFC set to  0.000000
9/7/2011	4:53:07 PM	H2 MFC set to  0.000000
9/7/2011	4:53:07 PM	BCl3 MFC set to  0.000000
9/7/2011	4:53:07 PM	PHl3 MFC set to  0.000000
9/7/2011	4:53:07 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:53:08 PM	Tube furnace set to 0
9/7/2011	4:53:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	4:53:22 PM	Main Vac valve opened
9/7/2011	4:54:29 PM	Recipe started at 4:54 PM
9/7/2011	4:54:29 PM	Helium valve closed
9/7/2011	4:54:29 PM	H2 valve closed
9/7/2011	4:54:29 PM	BCl3 valve closed
9/7/2011	4:54:29 PM	PH3 valve closed
9/7/2011	4:54:29 PM	SiCl4 pre valve closed
9/7/2011	4:54:29 PM	SiCl4 post valve closed
9/7/2011	4:54:29 PM	Bypass valve closed
9/7/2011	4:54:29 PM	Bubbler valve closed
9/7/2011	4:54:29 PM	Main Vac valve opened
9/7/2011	4:54:29 PM	Helium MFC set to  0.000000
9/7/2011	4:54:29 PM	H2 MFC set to  0.000000
9/7/2011	4:54:29 PM	BCl3 MFC set to  0.000000
9/7/2011	4:54:29 PM	PHl3 MFC set to  0.000000
9/7/2011	4:54:29 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:54:29 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:54:29 PM	Tube furnace set to 150
9/7/2011	4:54:59 PM	H2 valve closed
9/7/2011	4:54:59 PM	BCl3 valve closed
9/7/2011	4:54:59 PM	PH3 valve closed
9/7/2011	4:54:59 PM	SiCl4 pre valve closed
9/7/2011	4:54:59 PM	SiCl4 post valve closed
9/7/2011	4:54:59 PM	Bypass valve closed
9/7/2011	4:54:59 PM	Bubbler valve closed
9/7/2011	4:54:59 PM	Helium valve opened
9/7/2011	4:54:59 PM	Main Vac valve opened
9/7/2011	4:54:59 PM	Helium MFC set to  20.000000
9/7/2011	4:54:59 PM	H2 MFC set to  0.000000
9/7/2011	4:54:59 PM	BCl3 MFC set to  0.000000
9/7/2011	4:54:59 PM	PHl3 MFC set to  0.000000
9/7/2011	4:54:59 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:54:59 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:55:00 PM	Tube furnace set to 150
9/7/2011	4:55:30 PM	Helium valve closed
9/7/2011	4:55:30 PM	H2 valve closed
9/7/2011	4:55:30 PM	BCl3 valve closed
9/7/2011	4:55:30 PM	PH3 valve closed
9/7/2011	4:55:30 PM	SiCl4 pre valve closed
9/7/2011	4:55:30 PM	SiCl4 post valve closed
9/7/2011	4:55:30 PM	Bypass valve closed
9/7/2011	4:55:30 PM	Bubbler valve closed
9/7/2011	4:55:30 PM	Main Vac valve opened
9/7/2011	4:55:30 PM	Helium MFC set to  0.000000
9/7/2011	4:55:30 PM	H2 MFC set to  0.000000
9/7/2011	4:55:30 PM	BCl3 MFC set to  0.000000
9/7/2011	4:55:30 PM	PHl3 MFC set to  0.000000
9/7/2011	4:55:30 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:55:30 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:55:30 PM	Tube furnace set to 150
9/7/2011	4:56:00 PM	H2 valve closed
9/7/2011	4:56:00 PM	BCl3 valve closed
9/7/2011	4:56:00 PM	PH3 valve closed
9/7/2011	4:56:00 PM	SiCl4 pre valve closed
9/7/2011	4:56:00 PM	SiCl4 post valve closed
9/7/2011	4:56:00 PM	Bypass valve closed
9/7/2011	4:56:00 PM	Bubbler valve closed
9/7/2011	4:56:00 PM	Helium valve opened
9/7/2011	4:56:00 PM	Main Vac valve opened
9/7/2011	4:56:00 PM	Helium MFC set to  20.000000
9/7/2011	4:56:00 PM	H2 MFC set to  0.000000
9/7/2011	4:56:00 PM	BCl3 MFC set to  0.000000
9/7/2011	4:56:00 PM	PHl3 MFC set to  0.000000
9/7/2011	4:56:00 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:56:00 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:56:00 PM	Tube furnace set to 150
9/7/2011	4:56:30 PM	Helium valve closed
9/7/2011	4:56:30 PM	H2 valve closed
9/7/2011	4:56:30 PM	BCl3 valve closed
9/7/2011	4:56:30 PM	PH3 valve closed
9/7/2011	4:56:30 PM	SiCl4 pre valve closed
9/7/2011	4:56:30 PM	SiCl4 post valve closed
9/7/2011	4:56:30 PM	Bypass valve closed
9/7/2011	4:56:30 PM	Bubbler valve closed
9/7/2011	4:56:30 PM	Main Vac valve opened
9/7/2011	4:56:30 PM	Helium MFC set to  0.000000
9/7/2011	4:56:30 PM	H2 MFC set to  0.000000
9/7/2011	4:56:30 PM	BCl3 MFC set to  0.000000
9/7/2011	4:56:30 PM	PHl3 MFC set to  0.000000
9/7/2011	4:56:30 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:56:30 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:56:30 PM	Tube furnace set to 150
9/7/2011	4:57:00 PM	H2 valve closed
9/7/2011	4:57:00 PM	BCl3 valve closed
9/7/2011	4:57:00 PM	PH3 valve closed
9/7/2011	4:57:00 PM	SiCl4 pre valve closed
9/7/2011	4:57:00 PM	SiCl4 post valve closed
9/7/2011	4:57:00 PM	Bypass valve closed
9/7/2011	4:57:00 PM	Bubbler valve closed
9/7/2011	4:57:00 PM	Helium valve opened
9/7/2011	4:57:00 PM	Main Vac valve opened
9/7/2011	4:57:00 PM	Helium MFC set to  20.000000
9/7/2011	4:57:00 PM	H2 MFC set to  0.000000
9/7/2011	4:57:00 PM	BCl3 MFC set to  0.000000
9/7/2011	4:57:00 PM	PHl3 MFC set to  0.000000
9/7/2011	4:57:00 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:57:00 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:57:00 PM	Tube furnace set to 150
9/7/2011	4:57:30 PM	Helium valve closed
9/7/2011	4:57:30 PM	H2 valve closed
9/7/2011	4:57:30 PM	BCl3 valve closed
9/7/2011	4:57:30 PM	PH3 valve closed
9/7/2011	4:57:30 PM	SiCl4 pre valve closed
9/7/2011	4:57:30 PM	SiCl4 post valve closed
9/7/2011	4:57:30 PM	Bypass valve closed
9/7/2011	4:57:30 PM	Bubbler valve closed
9/7/2011	4:57:30 PM	Main Vac valve opened
9/7/2011	4:57:30 PM	Helium MFC set to  0.000000
9/7/2011	4:57:30 PM	H2 MFC set to  0.000000
9/7/2011	4:57:30 PM	BCl3 MFC set to  0.000000
9/7/2011	4:57:30 PM	PHl3 MFC set to  0.000000
9/7/2011	4:57:30 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:57:30 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:57:31 PM	Tube furnace set to 150
9/7/2011	4:58:01 PM	H2 valve closed
9/7/2011	4:58:01 PM	BCl3 valve closed
9/7/2011	4:58:01 PM	PH3 valve closed
9/7/2011	4:58:01 PM	SiCl4 pre valve closed
9/7/2011	4:58:01 PM	SiCl4 post valve closed
9/7/2011	4:58:01 PM	Bypass valve closed
9/7/2011	4:58:01 PM	Bubbler valve closed
9/7/2011	4:58:01 PM	Helium valve opened
9/7/2011	4:58:01 PM	Main Vac valve opened
9/7/2011	4:58:01 PM	Helium MFC set to  20.000000
9/7/2011	4:58:01 PM	H2 MFC set to  0.000000
9/7/2011	4:58:01 PM	BCl3 MFC set to  0.000000
9/7/2011	4:58:01 PM	PHl3 MFC set to  0.000000
9/7/2011	4:58:01 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:58:01 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:58:01 PM	Tube furnace set to 150
9/7/2011	4:58:31 PM	Helium valve closed
9/7/2011	4:58:31 PM	H2 valve closed
9/7/2011	4:58:31 PM	BCl3 valve closed
9/7/2011	4:58:31 PM	PH3 valve closed
9/7/2011	4:58:31 PM	SiCl4 pre valve closed
9/7/2011	4:58:31 PM	SiCl4 post valve closed
9/7/2011	4:58:31 PM	Bypass valve closed
9/7/2011	4:58:31 PM	Bubbler valve closed
9/7/2011	4:58:31 PM	Main Vac valve opened
9/7/2011	4:58:31 PM	Helium MFC set to  0.000000
9/7/2011	4:58:31 PM	H2 MFC set to  0.000000
9/7/2011	4:58:31 PM	BCl3 MFC set to  0.000000
9/7/2011	4:58:31 PM	PHl3 MFC set to  0.000000
9/7/2011	4:58:31 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:58:31 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:58:31 PM	Tube furnace set to 150
9/7/2011	4:59:01 PM	H2 valve closed
9/7/2011	4:59:01 PM	BCl3 valve closed
9/7/2011	4:59:01 PM	PH3 valve closed
9/7/2011	4:59:01 PM	SiCl4 pre valve closed
9/7/2011	4:59:01 PM	SiCl4 post valve closed
9/7/2011	4:59:01 PM	Bypass valve closed
9/7/2011	4:59:01 PM	Bubbler valve closed
9/7/2011	4:59:01 PM	Helium valve opened
9/7/2011	4:59:01 PM	Main Vac valve opened
9/7/2011	4:59:01 PM	Helium MFC set to  20.000000
9/7/2011	4:59:01 PM	H2 MFC set to  0.000000
9/7/2011	4:59:01 PM	BCl3 MFC set to  0.000000
9/7/2011	4:59:01 PM	PHl3 MFC set to  0.000000
9/7/2011	4:59:01 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:59:01 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:59:01 PM	Tube furnace set to 150
9/7/2011	4:59:31 PM	Helium valve closed
9/7/2011	4:59:31 PM	H2 valve closed
9/7/2011	4:59:31 PM	BCl3 valve closed
9/7/2011	4:59:31 PM	PH3 valve closed
9/7/2011	4:59:31 PM	SiCl4 pre valve closed
9/7/2011	4:59:31 PM	SiCl4 post valve closed
9/7/2011	4:59:31 PM	Bypass valve closed
9/7/2011	4:59:31 PM	Bubbler valve closed
9/7/2011	4:59:31 PM	Main Vac valve opened
9/7/2011	4:59:31 PM	Helium MFC set to  0.000000
9/7/2011	4:59:31 PM	H2 MFC set to  0.000000
9/7/2011	4:59:31 PM	BCl3 MFC set to  0.000000
9/7/2011	4:59:31 PM	PHl3 MFC set to  0.000000
9/7/2011	4:59:31 PM	SiCl4 MFC set to  0.000000
9/7/2011	4:59:31 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	4:59:31 PM	Tube furnace set to 150
9/7/2011	5:00:01 PM	H2 valve closed
9/7/2011	5:00:01 PM	BCl3 valve closed
9/7/2011	5:00:01 PM	PH3 valve closed
9/7/2011	5:00:01 PM	SiCl4 pre valve closed
9/7/2011	5:00:01 PM	SiCl4 post valve closed
9/7/2011	5:00:01 PM	Bypass valve closed
9/7/2011	5:00:01 PM	Bubbler valve closed
9/7/2011	5:00:01 PM	Helium valve opened
9/7/2011	5:00:01 PM	Main Vac valve opened
9/7/2011	5:00:01 PM	Helium MFC set to  20.000000
9/7/2011	5:00:01 PM	H2 MFC set to  0.000000
9/7/2011	5:00:01 PM	BCl3 MFC set to  0.000000
9/7/2011	5:00:01 PM	PHl3 MFC set to  0.000000
9/7/2011	5:00:01 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:00:01 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:00:02 PM	Tube furnace set to 150
9/7/2011	5:00:32 PM	Helium valve closed
9/7/2011	5:00:32 PM	H2 valve closed
9/7/2011	5:00:32 PM	BCl3 valve closed
9/7/2011	5:00:32 PM	PH3 valve closed
9/7/2011	5:00:32 PM	SiCl4 pre valve closed
9/7/2011	5:00:32 PM	SiCl4 post valve closed
9/7/2011	5:00:32 PM	Bypass valve closed
9/7/2011	5:00:32 PM	Bubbler valve closed
9/7/2011	5:00:32 PM	Main Vac valve opened
9/7/2011	5:00:32 PM	Helium MFC set to  0.000000
9/7/2011	5:00:32 PM	H2 MFC set to  0.000000
9/7/2011	5:00:32 PM	BCl3 MFC set to  0.000000
9/7/2011	5:00:32 PM	PHl3 MFC set to  0.000000
9/7/2011	5:00:32 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:00:32 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:00:32 PM	Tube furnace set to 150
9/7/2011	5:01:02 PM	H2 valve closed
9/7/2011	5:01:02 PM	BCl3 valve closed
9/7/2011	5:01:02 PM	PH3 valve closed
9/7/2011	5:01:02 PM	SiCl4 pre valve closed
9/7/2011	5:01:02 PM	SiCl4 post valve closed
9/7/2011	5:01:02 PM	Bypass valve closed
9/7/2011	5:01:02 PM	Bubbler valve closed
9/7/2011	5:01:02 PM	Helium valve opened
9/7/2011	5:01:02 PM	Main Vac valve opened
9/7/2011	5:01:02 PM	Helium MFC set to  20.000000
9/7/2011	5:01:02 PM	H2 MFC set to  0.000000
9/7/2011	5:01:02 PM	BCl3 MFC set to  0.000000
9/7/2011	5:01:02 PM	PHl3 MFC set to  0.000000
9/7/2011	5:01:02 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:01:02 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:01:02 PM	Tube furnace set to 150
9/7/2011	5:01:32 PM	Helium valve closed
9/7/2011	5:01:32 PM	H2 valve closed
9/7/2011	5:01:32 PM	BCl3 valve closed
9/7/2011	5:01:32 PM	PH3 valve closed
9/7/2011	5:01:32 PM	SiCl4 pre valve closed
9/7/2011	5:01:32 PM	SiCl4 post valve closed
9/7/2011	5:01:32 PM	Bypass valve closed
9/7/2011	5:01:32 PM	Bubbler valve closed
9/7/2011	5:01:32 PM	Main Vac valve opened
9/7/2011	5:01:32 PM	Helium MFC set to  0.000000
9/7/2011	5:01:32 PM	H2 MFC set to  0.000000
9/7/2011	5:01:32 PM	BCl3 MFC set to  0.000000
9/7/2011	5:01:32 PM	PHl3 MFC set to  0.000000
9/7/2011	5:01:32 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:01:32 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:01:32 PM	Tube furnace set to 150
9/7/2011	5:02:02 PM	H2 valve closed
9/7/2011	5:02:02 PM	BCl3 valve closed
9/7/2011	5:02:02 PM	PH3 valve closed
9/7/2011	5:02:02 PM	SiCl4 pre valve closed
9/7/2011	5:02:02 PM	SiCl4 post valve closed
9/7/2011	5:02:02 PM	Bypass valve closed
9/7/2011	5:02:02 PM	Bubbler valve closed
9/7/2011	5:02:02 PM	Helium valve opened
9/7/2011	5:02:02 PM	Main Vac valve opened
9/7/2011	5:02:02 PM	Helium MFC set to  20.000000
9/7/2011	5:02:02 PM	H2 MFC set to  0.000000
9/7/2011	5:02:02 PM	BCl3 MFC set to  0.000000
9/7/2011	5:02:02 PM	PHl3 MFC set to  0.000000
9/7/2011	5:02:02 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:02:02 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:02:02 PM	Tube furnace set to 150
9/7/2011	5:02:33 PM	Helium valve closed
9/7/2011	5:02:33 PM	H2 valve closed
9/7/2011	5:02:33 PM	BCl3 valve closed
9/7/2011	5:02:33 PM	PH3 valve closed
9/7/2011	5:02:33 PM	SiCl4 pre valve closed
9/7/2011	5:02:33 PM	SiCl4 post valve closed
9/7/2011	5:02:33 PM	Bypass valve closed
9/7/2011	5:02:33 PM	Bubbler valve closed
9/7/2011	5:02:33 PM	Main Vac valve opened
9/7/2011	5:02:33 PM	Helium MFC set to  0.000000
9/7/2011	5:02:33 PM	H2 MFC set to  0.000000
9/7/2011	5:02:33 PM	BCl3 MFC set to  0.000000
9/7/2011	5:02:33 PM	PHl3 MFC set to  0.000000
9/7/2011	5:02:33 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:02:33 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:02:33 PM	Tube furnace set to 150
9/7/2011	5:03:03 PM	H2 valve closed
9/7/2011	5:03:03 PM	BCl3 valve closed
9/7/2011	5:03:03 PM	PH3 valve closed
9/7/2011	5:03:03 PM	SiCl4 pre valve closed
9/7/2011	5:03:03 PM	SiCl4 post valve closed
9/7/2011	5:03:03 PM	Bypass valve closed
9/7/2011	5:03:03 PM	Bubbler valve closed
9/7/2011	5:03:03 PM	Helium valve opened
9/7/2011	5:03:03 PM	Main Vac valve opened
9/7/2011	5:03:03 PM	Helium MFC set to  20.000000
9/7/2011	5:03:03 PM	H2 MFC set to  0.000000
9/7/2011	5:03:03 PM	BCl3 MFC set to  0.000000
9/7/2011	5:03:03 PM	PHl3 MFC set to  0.000000
9/7/2011	5:03:03 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:03:03 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:03:03 PM	Tube furnace set to 150
9/7/2011	5:03:33 PM	Helium valve closed
9/7/2011	5:03:33 PM	H2 valve closed
9/7/2011	5:03:33 PM	BCl3 valve closed
9/7/2011	5:03:33 PM	PH3 valve closed
9/7/2011	5:03:33 PM	SiCl4 pre valve closed
9/7/2011	5:03:33 PM	SiCl4 post valve closed
9/7/2011	5:03:33 PM	Bypass valve closed
9/7/2011	5:03:33 PM	Bubbler valve closed
9/7/2011	5:03:33 PM	Main Vac valve opened
9/7/2011	5:03:33 PM	Helium MFC set to  0.000000
9/7/2011	5:03:33 PM	H2 MFC set to  0.000000
9/7/2011	5:03:33 PM	BCl3 MFC set to  0.000000
9/7/2011	5:03:33 PM	PHl3 MFC set to  0.000000
9/7/2011	5:03:33 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:03:33 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:03:33 PM	Tube furnace set to 150
9/7/2011	5:04:03 PM	H2 valve closed
9/7/2011	5:04:03 PM	BCl3 valve closed
9/7/2011	5:04:03 PM	PH3 valve closed
9/7/2011	5:04:03 PM	SiCl4 pre valve closed
9/7/2011	5:04:03 PM	SiCl4 post valve closed
9/7/2011	5:04:03 PM	Bypass valve closed
9/7/2011	5:04:03 PM	Bubbler valve closed
9/7/2011	5:04:03 PM	Helium valve opened
9/7/2011	5:04:03 PM	Main Vac valve opened
9/7/2011	5:04:03 PM	Helium MFC set to  20.000000
9/7/2011	5:04:03 PM	H2 MFC set to  0.000000
9/7/2011	5:04:03 PM	BCl3 MFC set to  0.000000
9/7/2011	5:04:03 PM	PHl3 MFC set to  0.000000
9/7/2011	5:04:03 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:04:03 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:04:03 PM	Tube furnace set to 150
9/7/2011	5:04:33 PM	Helium valve closed
9/7/2011	5:04:33 PM	H2 valve closed
9/7/2011	5:04:33 PM	BCl3 valve closed
9/7/2011	5:04:33 PM	PH3 valve closed
9/7/2011	5:04:33 PM	SiCl4 pre valve closed
9/7/2011	5:04:33 PM	SiCl4 post valve closed
9/7/2011	5:04:33 PM	Bypass valve closed
9/7/2011	5:04:33 PM	Bubbler valve closed
9/7/2011	5:04:33 PM	Main Vac valve opened
9/7/2011	5:04:33 PM	Helium MFC set to  0.000000
9/7/2011	5:04:33 PM	H2 MFC set to  0.000000
9/7/2011	5:04:33 PM	BCl3 MFC set to  0.000000
9/7/2011	5:04:33 PM	PHl3 MFC set to  0.000000
9/7/2011	5:04:33 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:04:33 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:04:34 PM	Tube furnace set to 150
9/7/2011	5:04:35 PM	Run finished at 5:04 PM
9/7/2011	5:20:38 PM	Main Vac valve closed
9/7/2011	5:20:48 PM	Main Vac valve opened
9/7/2011	5:20:56 PM	Main Vac valve closed
9/7/2011	5:21:05 PM	Main Vac valve opened
9/7/2011	5:22:27 PM	Recipe started at 5:22 PM
9/7/2011	5:22:27 PM	Helium valve closed
9/7/2011	5:22:27 PM	H2 valve closed
9/7/2011	5:22:27 PM	BCl3 valve closed
9/7/2011	5:22:27 PM	PH3 valve closed
9/7/2011	5:22:27 PM	SiCl4 pre valve closed
9/7/2011	5:22:27 PM	SiCl4 post valve closed
9/7/2011	5:22:27 PM	Main Vac valve closed
9/7/2011	5:22:27 PM	Bypass valve closed
9/7/2011	5:22:27 PM	Bubbler valve closed
9/7/2011	5:22:27 PM	Helium MFC set to  0.000000
9/7/2011	5:22:27 PM	H2 MFC set to  0.000000
9/7/2011	5:22:27 PM	BCl3 MFC set to  0.000000
9/7/2011	5:22:27 PM	PHl3 MFC set to  0.000000
9/7/2011	5:22:27 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:22:27 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:22:27 PM	Tube furnace set to 0
9/7/2011	5:22:30 PM	Helium valve closed
9/7/2011	5:22:30 PM	BCl3 valve closed
9/7/2011	5:22:30 PM	PH3 valve closed
9/7/2011	5:22:30 PM	SiCl4 pre valve closed
9/7/2011	5:22:30 PM	SiCl4 post valve closed
9/7/2011	5:22:30 PM	Main Vac valve closed
9/7/2011	5:22:30 PM	Bypass valve closed
9/7/2011	5:22:30 PM	Bubbler valve closed
9/7/2011	5:22:30 PM	H2 valve opened
9/7/2011	5:22:30 PM	Helium MFC set to  0.000000
9/7/2011	5:22:30 PM	H2 MFC set to  500.000000
9/7/2011	5:22:30 PM	BCl3 MFC set to  0.000000
9/7/2011	5:22:30 PM	PHl3 MFC set to  0.000000
9/7/2011	5:22:30 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:22:30 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:22:30 PM	Tube furnace set to 0
9/7/2011	5:23:34 PM	Helium valve closed
9/7/2011	5:23:34 PM	BCl3 valve closed
9/7/2011	5:23:34 PM	PH3 valve closed
9/7/2011	5:23:34 PM	SiCl4 pre valve closed
9/7/2011	5:23:34 PM	SiCl4 post valve closed
9/7/2011	5:23:34 PM	Main Vac valve closed
9/7/2011	5:23:34 PM	Bypass valve closed
9/7/2011	5:23:34 PM	H2 valve opened
9/7/2011	5:23:34 PM	Bubbler valve opened
9/7/2011	5:23:34 PM	Helium MFC set to  0.000000
9/7/2011	5:23:34 PM	H2 MFC set to  500.000000
9/7/2011	5:23:34 PM	BCl3 MFC set to  0.000000
9/7/2011	5:23:34 PM	PHl3 MFC set to  0.000000
9/7/2011	5:23:34 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:23:34 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:23:34 PM	Tube furnace set to 0
9/7/2011	5:23:35 PM	Helium valve closed
9/7/2011	5:23:35 PM	BCl3 valve closed
9/7/2011	5:23:35 PM	PH3 valve closed
9/7/2011	5:23:35 PM	SiCl4 pre valve closed
9/7/2011	5:23:35 PM	SiCl4 post valve closed
9/7/2011	5:23:35 PM	Main Vac valve closed
9/7/2011	5:23:35 PM	Bypass valve closed
9/7/2011	5:23:35 PM	H2 valve opened
9/7/2011	5:23:35 PM	Bubbler valve opened
9/7/2011	5:23:35 PM	Helium MFC set to  0.000000
9/7/2011	5:23:35 PM	H2 MFC set to  500.000000
9/7/2011	5:23:35 PM	BCl3 MFC set to  0.000000
9/7/2011	5:23:35 PM	PHl3 MFC set to  0.000000
9/7/2011	5:23:35 PM	SiCl4 MFC set to  0.000000
9/7/2011	5:23:35 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:23:35 PM	Tube furnace set to 1000
9/7/2011	5:43:35 PM	Helium valve closed
9/7/2011	5:43:35 PM	PH3 valve closed
9/7/2011	5:43:35 PM	Main Vac valve closed
9/7/2011	5:43:35 PM	Bypass valve closed
9/7/2011	5:43:35 PM	H2 valve opened
9/7/2011	5:43:35 PM	BCl3 valve opened
9/7/2011	5:43:35 PM	SiCl4 pre valve opened
9/7/2011	5:43:35 PM	SiCl4 post valve opened
9/7/2011	5:43:35 PM	Bubbler valve opened
9/7/2011	5:43:35 PM	Helium MFC set to  0.000000
9/7/2011	5:43:35 PM	H2 MFC set to  500.000000
9/7/2011	5:43:35 PM	BCl3 MFC set to  2.000000
9/7/2011	5:43:35 PM	PHl3 MFC set to  0.000000
9/7/2011	5:43:35 PM	SiCl4 MFC set to  50.000000
9/7/2011	5:43:35 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	5:43:35 PM	Tube furnace set to 1000
9/7/2011	6:00:15 PM	Helium valve closed
9/7/2011	6:00:15 PM	BCl3 valve closed
9/7/2011	6:00:15 PM	PH3 valve closed
9/7/2011	6:00:15 PM	SiCl4 pre valve closed
9/7/2011	6:00:15 PM	SiCl4 post valve closed
9/7/2011	6:00:15 PM	Main Vac valve closed
9/7/2011	6:00:15 PM	Bypass valve closed
9/7/2011	6:00:15 PM	H2 valve opened
9/7/2011	6:00:15 PM	Bubbler valve opened
9/7/2011	6:00:15 PM	Helium MFC set to  0.000000
9/7/2011	6:00:15 PM	H2 MFC set to  500.000000
9/7/2011	6:00:15 PM	BCl3 MFC set to  0.000000
9/7/2011	6:00:15 PM	PHl3 MFC set to  0.000000
9/7/2011	6:00:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:00:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:00:15 PM	Tube furnace set to 750
9/7/2011	6:05:15 PM	H2 valve closed
9/7/2011	6:05:15 PM	BCl3 valve closed
9/7/2011	6:05:15 PM	PH3 valve closed
9/7/2011	6:05:15 PM	SiCl4 pre valve closed
9/7/2011	6:05:15 PM	SiCl4 post valve closed
9/7/2011	6:05:15 PM	Main Vac valve closed
9/7/2011	6:05:15 PM	Bypass valve closed
9/7/2011	6:05:15 PM	Helium valve opened
9/7/2011	6:05:15 PM	Bubbler valve opened
9/7/2011	6:05:15 PM	Helium MFC set to  500.000000
9/7/2011	6:05:15 PM	H2 MFC set to  0.000000
9/7/2011	6:05:15 PM	BCl3 MFC set to  0.000000
9/7/2011	6:05:15 PM	PHl3 MFC set to  0.000000
9/7/2011	6:05:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:05:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:05:16 PM	Tube furnace set to 0
9/7/2011	6:06:43 PM	Run aborted at 6:06 PM
9/7/2011	6:06:43 PM	Helium valve closed
9/7/2011	6:06:43 PM	H2 valve closed
9/7/2011	6:06:43 PM	BCl3 valve closed
9/7/2011	6:06:43 PM	PH3 valve closed
9/7/2011	6:06:43 PM	SiCl4 pre valve closed
9/7/2011	6:06:43 PM	SiCl4 post valve closed
9/7/2011	6:06:43 PM	Bypass valve closed
9/7/2011	6:06:43 PM	Main Vac valve closed
9/7/2011	6:06:43 PM	Bubbler valve closed
9/7/2011	6:06:43 PM	Helium MFC set to  0.000000
9/7/2011	6:06:43 PM	H2 MFC set to  0.000000
9/7/2011	6:06:43 PM	BCl3 MFC set to  0.000000
9/7/2011	6:06:43 PM	PHl3 MFC set to  0.000000
9/7/2011	6:06:43 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:06:43 PM	Tube furnace set to 0
9/7/2011	6:14:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	6:14:12 PM	Recipe started at 6:14 PM
9/7/2011	6:14:12 PM	Helium valve closed
9/7/2011	6:14:12 PM	H2 valve closed
9/7/2011	6:14:12 PM	BCl3 valve closed
9/7/2011	6:14:12 PM	PH3 valve closed
9/7/2011	6:14:12 PM	SiCl4 pre valve closed
9/7/2011	6:14:12 PM	SiCl4 post valve closed
9/7/2011	6:14:12 PM	Main Vac valve closed
9/7/2011	6:14:12 PM	Bubbler valve closed
9/7/2011	6:14:12 PM	Bypass valve opened
9/7/2011	6:14:12 PM	Helium MFC set to  0.000000
9/7/2011	6:14:12 PM	H2 MFC set to  0.000000
9/7/2011	6:14:12 PM	BCl3 MFC set to  0.000000
9/7/2011	6:14:12 PM	PHl3 MFC set to  0.000000
9/7/2011	6:14:12 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:14:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:14:12 PM	Tube furnace set to 0
9/7/2011	6:15:12 PM	Helium valve closed
9/7/2011	6:15:12 PM	H2 valve closed
9/7/2011	6:15:12 PM	BCl3 valve closed
9/7/2011	6:15:12 PM	PH3 valve closed
9/7/2011	6:15:12 PM	SiCl4 pre valve closed
9/7/2011	6:15:12 PM	SiCl4 post valve closed
9/7/2011	6:15:12 PM	Main Vac valve closed
9/7/2011	6:15:12 PM	Bubbler valve closed
9/7/2011	6:15:12 PM	Bypass valve opened
9/7/2011	6:15:12 PM	Helium MFC set to  0.000000
9/7/2011	6:15:12 PM	H2 MFC set to  0.000000
9/7/2011	6:15:12 PM	BCl3 MFC set to  0.000000
9/7/2011	6:15:12 PM	PHl3 MFC set to  0.000000
9/7/2011	6:15:12 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:15:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:15:12 PM	Tube furnace set to 0
9/7/2011	6:16:12 PM	Helium valve closed
9/7/2011	6:16:12 PM	H2 valve closed
9/7/2011	6:16:12 PM	BCl3 valve closed
9/7/2011	6:16:12 PM	PH3 valve closed
9/7/2011	6:16:12 PM	SiCl4 pre valve closed
9/7/2011	6:16:12 PM	SiCl4 post valve closed
9/7/2011	6:16:12 PM	Bypass valve closed
9/7/2011	6:16:12 PM	Bubbler valve closed
9/7/2011	6:16:12 PM	Main Vac valve opened
9/7/2011	6:16:12 PM	Helium MFC set to  0.000000
9/7/2011	6:16:12 PM	H2 MFC set to  0.000000
9/7/2011	6:16:12 PM	BCl3 MFC set to  0.000000
9/7/2011	6:16:12 PM	PHl3 MFC set to  0.000000
9/7/2011	6:16:12 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:16:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:16:13 PM	Tube furnace set to 0
9/7/2011	6:16:14 PM	Run finished at 6:16 PM
9/7/2011	6:16:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	6:16:28 PM	H2 MFC set to  11.000000
9/7/2011	6:16:30 PM	H2 valve opened
9/7/2011	6:17:13 PM	H2 valve closed
9/7/2011	6:17:15 PM	H2 MFC set to  0.000000
9/7/2011	6:17:20 PM	Helium MFC set to  20.000000
9/7/2011	6:17:26 PM	Helium valve opened
9/7/2011	6:19:13 PM	Helium valve closed
9/7/2011	6:19:15 PM	Helium MFC set to  0.000000
9/7/2011	6:19:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	6:20:09 PM	Recipe started at 6:20 PM
9/7/2011	6:20:09 PM	Helium valve closed
9/7/2011	6:20:09 PM	H2 valve closed
9/7/2011	6:20:09 PM	BCl3 valve closed
9/7/2011	6:20:09 PM	PH3 valve closed
9/7/2011	6:20:09 PM	SiCl4 pre valve closed
9/7/2011	6:20:09 PM	SiCl4 post valve closed
9/7/2011	6:20:09 PM	Main Vac valve closed
9/7/2011	6:20:09 PM	Bubbler valve closed
9/7/2011	6:20:09 PM	Bypass valve opened
9/7/2011	6:20:09 PM	Helium MFC set to  0.000000
9/7/2011	6:20:09 PM	H2 MFC set to  0.000000
9/7/2011	6:20:09 PM	BCl3 MFC set to  0.000000
9/7/2011	6:20:09 PM	PHl3 MFC set to  0.000000
9/7/2011	6:20:09 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:20:09 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:20:09 PM	Tube furnace set to 0
9/7/2011	6:20:09 PM	Helium valve closed
9/7/2011	6:20:09 PM	H2 valve closed
9/7/2011	6:20:09 PM	BCl3 valve closed
9/7/2011	6:20:09 PM	PH3 valve closed
9/7/2011	6:20:09 PM	SiCl4 pre valve closed
9/7/2011	6:20:09 PM	SiCl4 post valve closed
9/7/2011	6:20:09 PM	Main Vac valve closed
9/7/2011	6:20:09 PM	Bubbler valve closed
9/7/2011	6:20:09 PM	Bypass valve opened
9/7/2011	6:20:09 PM	Helium MFC set to  0.000000
9/7/2011	6:20:09 PM	H2 MFC set to  0.000000
9/7/2011	6:20:09 PM	BCl3 MFC set to  0.000000
9/7/2011	6:20:09 PM	PHl3 MFC set to  0.000000
9/7/2011	6:20:09 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:20:09 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:20:09 PM	Tube furnace set to 0
9/7/2011	6:20:39 PM	Helium valve closed
9/7/2011	6:20:39 PM	H2 valve closed
9/7/2011	6:20:39 PM	BCl3 valve closed
9/7/2011	6:20:39 PM	PH3 valve closed
9/7/2011	6:20:39 PM	SiCl4 pre valve closed
9/7/2011	6:20:39 PM	SiCl4 post valve closed
9/7/2011	6:20:39 PM	Bypass valve closed
9/7/2011	6:20:39 PM	Bubbler valve closed
9/7/2011	6:20:39 PM	Main Vac valve opened
9/7/2011	6:20:39 PM	Helium MFC set to  0.000000
9/7/2011	6:20:39 PM	H2 MFC set to  0.000000
9/7/2011	6:20:39 PM	BCl3 MFC set to  0.000000
9/7/2011	6:20:39 PM	PHl3 MFC set to  0.000000
9/7/2011	6:20:39 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:20:39 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:20:39 PM	Tube furnace set to 0
9/7/2011	6:21:09 PM	H2 valve closed
9/7/2011	6:21:09 PM	BCl3 valve closed
9/7/2011	6:21:09 PM	PH3 valve closed
9/7/2011	6:21:09 PM	SiCl4 pre valve closed
9/7/2011	6:21:09 PM	SiCl4 post valve closed
9/7/2011	6:21:09 PM	Bypass valve closed
9/7/2011	6:21:09 PM	Bubbler valve closed
9/7/2011	6:21:09 PM	Helium valve opened
9/7/2011	6:21:09 PM	Main Vac valve opened
9/7/2011	6:21:09 PM	Helium MFC set to  20.000000
9/7/2011	6:21:09 PM	H2 MFC set to  0.000000
9/7/2011	6:21:09 PM	BCl3 MFC set to  0.000000
9/7/2011	6:21:09 PM	PHl3 MFC set to  0.000000
9/7/2011	6:21:09 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:21:09 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:21:10 PM	Tube furnace set to 0
9/7/2011	6:21:40 PM	Helium valve closed
9/7/2011	6:21:40 PM	H2 valve closed
9/7/2011	6:21:40 PM	BCl3 valve closed
9/7/2011	6:21:40 PM	PH3 valve closed
9/7/2011	6:21:40 PM	SiCl4 pre valve closed
9/7/2011	6:21:40 PM	SiCl4 post valve closed
9/7/2011	6:21:40 PM	Bypass valve closed
9/7/2011	6:21:40 PM	Bubbler valve closed
9/7/2011	6:21:40 PM	Main Vac valve opened
9/7/2011	6:21:40 PM	Helium MFC set to  0.000000
9/7/2011	6:21:40 PM	H2 MFC set to  0.000000
9/7/2011	6:21:40 PM	BCl3 MFC set to  0.000000
9/7/2011	6:21:40 PM	PHl3 MFC set to  0.000000
9/7/2011	6:21:40 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:21:40 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:21:40 PM	Tube furnace set to 0
9/7/2011	6:22:10 PM	H2 valve closed
9/7/2011	6:22:10 PM	BCl3 valve closed
9/7/2011	6:22:10 PM	PH3 valve closed
9/7/2011	6:22:10 PM	SiCl4 pre valve closed
9/7/2011	6:22:10 PM	SiCl4 post valve closed
9/7/2011	6:22:10 PM	Bypass valve closed
9/7/2011	6:22:10 PM	Bubbler valve closed
9/7/2011	6:22:10 PM	Helium valve opened
9/7/2011	6:22:10 PM	Main Vac valve opened
9/7/2011	6:22:10 PM	Helium MFC set to  20.000000
9/7/2011	6:22:10 PM	H2 MFC set to  0.000000
9/7/2011	6:22:10 PM	BCl3 MFC set to  0.000000
9/7/2011	6:22:10 PM	PHl3 MFC set to  0.000000
9/7/2011	6:22:10 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:22:10 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:22:10 PM	Tube furnace set to 0
9/7/2011	6:22:40 PM	Helium valve closed
9/7/2011	6:22:40 PM	H2 valve closed
9/7/2011	6:22:40 PM	BCl3 valve closed
9/7/2011	6:22:40 PM	PH3 valve closed
9/7/2011	6:22:40 PM	SiCl4 pre valve closed
9/7/2011	6:22:40 PM	SiCl4 post valve closed
9/7/2011	6:22:40 PM	Bypass valve closed
9/7/2011	6:22:40 PM	Bubbler valve closed
9/7/2011	6:22:40 PM	Main Vac valve opened
9/7/2011	6:22:40 PM	Helium MFC set to  0.000000
9/7/2011	6:22:40 PM	H2 MFC set to  0.000000
9/7/2011	6:22:40 PM	BCl3 MFC set to  0.000000
9/7/2011	6:22:40 PM	PHl3 MFC set to  0.000000
9/7/2011	6:22:40 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:22:40 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:22:40 PM	Tube furnace set to 0
9/7/2011	6:23:10 PM	H2 valve closed
9/7/2011	6:23:10 PM	BCl3 valve closed
9/7/2011	6:23:10 PM	PH3 valve closed
9/7/2011	6:23:10 PM	SiCl4 pre valve closed
9/7/2011	6:23:10 PM	SiCl4 post valve closed
9/7/2011	6:23:10 PM	Bypass valve closed
9/7/2011	6:23:10 PM	Bubbler valve closed
9/7/2011	6:23:10 PM	Helium valve opened
9/7/2011	6:23:10 PM	Main Vac valve opened
9/7/2011	6:23:10 PM	Helium MFC set to  20.000000
9/7/2011	6:23:10 PM	H2 MFC set to  0.000000
9/7/2011	6:23:10 PM	BCl3 MFC set to  0.000000
9/7/2011	6:23:10 PM	PHl3 MFC set to  0.000000
9/7/2011	6:23:10 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:23:10 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:23:10 PM	Tube furnace set to 0
9/7/2011	6:23:40 PM	Helium valve closed
9/7/2011	6:23:40 PM	H2 valve closed
9/7/2011	6:23:40 PM	BCl3 valve closed
9/7/2011	6:23:40 PM	PH3 valve closed
9/7/2011	6:23:40 PM	SiCl4 pre valve closed
9/7/2011	6:23:40 PM	SiCl4 post valve closed
9/7/2011	6:23:40 PM	Bypass valve closed
9/7/2011	6:23:40 PM	Bubbler valve closed
9/7/2011	6:23:40 PM	Main Vac valve opened
9/7/2011	6:23:40 PM	Helium MFC set to  0.000000
9/7/2011	6:23:40 PM	H2 MFC set to  0.000000
9/7/2011	6:23:40 PM	BCl3 MFC set to  0.000000
9/7/2011	6:23:40 PM	PHl3 MFC set to  0.000000
9/7/2011	6:23:40 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:23:40 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:23:41 PM	Tube furnace set to 0
9/7/2011	6:24:11 PM	H2 valve closed
9/7/2011	6:24:11 PM	BCl3 valve closed
9/7/2011	6:24:11 PM	PH3 valve closed
9/7/2011	6:24:11 PM	SiCl4 pre valve closed
9/7/2011	6:24:11 PM	SiCl4 post valve closed
9/7/2011	6:24:11 PM	Bypass valve closed
9/7/2011	6:24:11 PM	Bubbler valve closed
9/7/2011	6:24:11 PM	Helium valve opened
9/7/2011	6:24:11 PM	Main Vac valve opened
9/7/2011	6:24:11 PM	Helium MFC set to  20.000000
9/7/2011	6:24:11 PM	H2 MFC set to  0.000000
9/7/2011	6:24:11 PM	BCl3 MFC set to  0.000000
9/7/2011	6:24:11 PM	PHl3 MFC set to  0.000000
9/7/2011	6:24:11 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:24:11 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:24:11 PM	Tube furnace set to 0
9/7/2011	6:24:41 PM	Helium valve closed
9/7/2011	6:24:41 PM	H2 valve closed
9/7/2011	6:24:41 PM	BCl3 valve closed
9/7/2011	6:24:41 PM	PH3 valve closed
9/7/2011	6:24:41 PM	SiCl4 pre valve closed
9/7/2011	6:24:41 PM	SiCl4 post valve closed
9/7/2011	6:24:41 PM	Bypass valve closed
9/7/2011	6:24:41 PM	Bubbler valve closed
9/7/2011	6:24:41 PM	Main Vac valve opened
9/7/2011	6:24:41 PM	Helium MFC set to  0.000000
9/7/2011	6:24:41 PM	H2 MFC set to  0.000000
9/7/2011	6:24:41 PM	BCl3 MFC set to  0.000000
9/7/2011	6:24:41 PM	PHl3 MFC set to  0.000000
9/7/2011	6:24:41 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:24:41 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:24:41 PM	Tube furnace set to 0
9/7/2011	6:25:11 PM	H2 valve closed
9/7/2011	6:25:11 PM	BCl3 valve closed
9/7/2011	6:25:11 PM	PH3 valve closed
9/7/2011	6:25:11 PM	SiCl4 pre valve closed
9/7/2011	6:25:11 PM	SiCl4 post valve closed
9/7/2011	6:25:11 PM	Bypass valve closed
9/7/2011	6:25:11 PM	Bubbler valve closed
9/7/2011	6:25:11 PM	Helium valve opened
9/7/2011	6:25:11 PM	Main Vac valve opened
9/7/2011	6:25:11 PM	Helium MFC set to  20.000000
9/7/2011	6:25:11 PM	H2 MFC set to  0.000000
9/7/2011	6:25:11 PM	BCl3 MFC set to  0.000000
9/7/2011	6:25:11 PM	PHl3 MFC set to  0.000000
9/7/2011	6:25:11 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:25:11 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:25:11 PM	Tube furnace set to 0
9/7/2011	6:25:41 PM	Helium valve closed
9/7/2011	6:25:41 PM	H2 valve closed
9/7/2011	6:25:41 PM	BCl3 valve closed
9/7/2011	6:25:41 PM	PH3 valve closed
9/7/2011	6:25:41 PM	SiCl4 pre valve closed
9/7/2011	6:25:41 PM	SiCl4 post valve closed
9/7/2011	6:25:41 PM	Bypass valve closed
9/7/2011	6:25:41 PM	Bubbler valve closed
9/7/2011	6:25:41 PM	Main Vac valve opened
9/7/2011	6:25:41 PM	Helium MFC set to  0.000000
9/7/2011	6:25:41 PM	H2 MFC set to  0.000000
9/7/2011	6:25:41 PM	BCl3 MFC set to  0.000000
9/7/2011	6:25:41 PM	PHl3 MFC set to  0.000000
9/7/2011	6:25:41 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:25:41 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:25:41 PM	Tube furnace set to 0
9/7/2011	6:26:11 PM	H2 valve closed
9/7/2011	6:26:11 PM	BCl3 valve closed
9/7/2011	6:26:11 PM	PH3 valve closed
9/7/2011	6:26:11 PM	SiCl4 pre valve closed
9/7/2011	6:26:11 PM	SiCl4 post valve closed
9/7/2011	6:26:11 PM	Bypass valve closed
9/7/2011	6:26:11 PM	Bubbler valve closed
9/7/2011	6:26:11 PM	Helium valve opened
9/7/2011	6:26:11 PM	Main Vac valve opened
9/7/2011	6:26:11 PM	Helium MFC set to  20.000000
9/7/2011	6:26:11 PM	H2 MFC set to  0.000000
9/7/2011	6:26:11 PM	BCl3 MFC set to  0.000000
9/7/2011	6:26:11 PM	PHl3 MFC set to  0.000000
9/7/2011	6:26:11 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:26:11 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:26:12 PM	Tube furnace set to 0
9/7/2011	6:26:42 PM	Helium valve closed
9/7/2011	6:26:42 PM	H2 valve closed
9/7/2011	6:26:42 PM	BCl3 valve closed
9/7/2011	6:26:42 PM	PH3 valve closed
9/7/2011	6:26:42 PM	SiCl4 pre valve closed
9/7/2011	6:26:42 PM	SiCl4 post valve closed
9/7/2011	6:26:42 PM	Bypass valve closed
9/7/2011	6:26:42 PM	Bubbler valve closed
9/7/2011	6:26:42 PM	Main Vac valve opened
9/7/2011	6:26:42 PM	Helium MFC set to  0.000000
9/7/2011	6:26:42 PM	H2 MFC set to  0.000000
9/7/2011	6:26:42 PM	BCl3 MFC set to  0.000000
9/7/2011	6:26:42 PM	PHl3 MFC set to  0.000000
9/7/2011	6:26:42 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:26:42 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:26:42 PM	Tube furnace set to 0
9/7/2011	6:27:12 PM	H2 valve closed
9/7/2011	6:27:12 PM	BCl3 valve closed
9/7/2011	6:27:12 PM	PH3 valve closed
9/7/2011	6:27:12 PM	SiCl4 pre valve closed
9/7/2011	6:27:12 PM	SiCl4 post valve closed
9/7/2011	6:27:12 PM	Bypass valve closed
9/7/2011	6:27:12 PM	Bubbler valve closed
9/7/2011	6:27:12 PM	Helium valve opened
9/7/2011	6:27:12 PM	Main Vac valve opened
9/7/2011	6:27:12 PM	Helium MFC set to  20.000000
9/7/2011	6:27:12 PM	H2 MFC set to  0.000000
9/7/2011	6:27:12 PM	BCl3 MFC set to  0.000000
9/7/2011	6:27:12 PM	PHl3 MFC set to  0.000000
9/7/2011	6:27:12 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:27:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:27:12 PM	Tube furnace set to 0
9/7/2011	6:27:42 PM	Helium valve closed
9/7/2011	6:27:42 PM	H2 valve closed
9/7/2011	6:27:42 PM	BCl3 valve closed
9/7/2011	6:27:42 PM	PH3 valve closed
9/7/2011	6:27:42 PM	SiCl4 pre valve closed
9/7/2011	6:27:42 PM	SiCl4 post valve closed
9/7/2011	6:27:42 PM	Bypass valve closed
9/7/2011	6:27:42 PM	Bubbler valve closed
9/7/2011	6:27:42 PM	Main Vac valve opened
9/7/2011	6:27:42 PM	Helium MFC set to  0.000000
9/7/2011	6:27:42 PM	H2 MFC set to  0.000000
9/7/2011	6:27:42 PM	BCl3 MFC set to  0.000000
9/7/2011	6:27:42 PM	PHl3 MFC set to  0.000000
9/7/2011	6:27:42 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:27:42 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:27:42 PM	Tube furnace set to 0
9/7/2011	6:28:12 PM	H2 valve closed
9/7/2011	6:28:12 PM	BCl3 valve closed
9/7/2011	6:28:12 PM	PH3 valve closed
9/7/2011	6:28:12 PM	SiCl4 pre valve closed
9/7/2011	6:28:12 PM	SiCl4 post valve closed
9/7/2011	6:28:12 PM	Bypass valve closed
9/7/2011	6:28:12 PM	Bubbler valve closed
9/7/2011	6:28:12 PM	Helium valve opened
9/7/2011	6:28:12 PM	Main Vac valve opened
9/7/2011	6:28:12 PM	Helium MFC set to  20.000000
9/7/2011	6:28:12 PM	H2 MFC set to  0.000000
9/7/2011	6:28:12 PM	BCl3 MFC set to  0.000000
9/7/2011	6:28:12 PM	PHl3 MFC set to  0.000000
9/7/2011	6:28:12 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:28:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:28:12 PM	Tube furnace set to 0
9/7/2011	6:28:42 PM	Helium valve closed
9/7/2011	6:28:42 PM	H2 valve closed
9/7/2011	6:28:42 PM	BCl3 valve closed
9/7/2011	6:28:42 PM	PH3 valve closed
9/7/2011	6:28:42 PM	SiCl4 pre valve closed
9/7/2011	6:28:43 PM	SiCl4 post valve closed
9/7/2011	6:28:43 PM	Bypass valve closed
9/7/2011	6:28:43 PM	Bubbler valve closed
9/7/2011	6:28:43 PM	Main Vac valve opened
9/7/2011	6:28:43 PM	Helium MFC set to  0.000000
9/7/2011	6:28:43 PM	H2 MFC set to  0.000000
9/7/2011	6:28:43 PM	BCl3 MFC set to  0.000000
9/7/2011	6:28:43 PM	PHl3 MFC set to  0.000000
9/7/2011	6:28:43 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:28:43 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:28:43 PM	Tube furnace set to 0
9/7/2011	6:29:13 PM	H2 valve closed
9/7/2011	6:29:13 PM	BCl3 valve closed
9/7/2011	6:29:13 PM	PH3 valve closed
9/7/2011	6:29:13 PM	SiCl4 pre valve closed
9/7/2011	6:29:13 PM	SiCl4 post valve closed
9/7/2011	6:29:13 PM	Bypass valve closed
9/7/2011	6:29:13 PM	Bubbler valve closed
9/7/2011	6:29:13 PM	Helium valve opened
9/7/2011	6:29:13 PM	Main Vac valve opened
9/7/2011	6:29:13 PM	Helium MFC set to  20.000000
9/7/2011	6:29:13 PM	H2 MFC set to  0.000000
9/7/2011	6:29:13 PM	BCl3 MFC set to  0.000000
9/7/2011	6:29:13 PM	PHl3 MFC set to  0.000000
9/7/2011	6:29:13 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:29:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:29:13 PM	Tube furnace set to 0
9/7/2011	6:29:43 PM	Helium valve closed
9/7/2011	6:29:43 PM	H2 valve closed
9/7/2011	6:29:43 PM	BCl3 valve closed
9/7/2011	6:29:43 PM	PH3 valve closed
9/7/2011	6:29:43 PM	SiCl4 pre valve closed
9/7/2011	6:29:43 PM	SiCl4 post valve closed
9/7/2011	6:29:43 PM	Bypass valve closed
9/7/2011	6:29:43 PM	Bubbler valve closed
9/7/2011	6:29:43 PM	Main Vac valve opened
9/7/2011	6:29:43 PM	Helium MFC set to  0.000000
9/7/2011	6:29:43 PM	H2 MFC set to  0.000000
9/7/2011	6:29:43 PM	BCl3 MFC set to  0.000000
9/7/2011	6:29:43 PM	PHl3 MFC set to  0.000000
9/7/2011	6:29:43 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:29:43 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:29:43 PM	Tube furnace set to 0
9/7/2011	6:30:13 PM	H2 valve closed
9/7/2011	6:30:13 PM	BCl3 valve closed
9/7/2011	6:30:13 PM	PH3 valve closed
9/7/2011	6:30:13 PM	SiCl4 pre valve closed
9/7/2011	6:30:13 PM	SiCl4 post valve closed
9/7/2011	6:30:13 PM	Bypass valve closed
9/7/2011	6:30:13 PM	Bubbler valve closed
9/7/2011	6:30:13 PM	Helium valve opened
9/7/2011	6:30:13 PM	Main Vac valve opened
9/7/2011	6:30:13 PM	Helium MFC set to  20.000000
9/7/2011	6:30:13 PM	H2 MFC set to  0.000000
9/7/2011	6:30:13 PM	BCl3 MFC set to  0.000000
9/7/2011	6:30:13 PM	PHl3 MFC set to  0.000000
9/7/2011	6:30:13 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:30:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:30:13 PM	Tube furnace set to 0
9/7/2011	6:30:43 PM	Helium valve closed
9/7/2011	6:30:43 PM	H2 valve closed
9/7/2011	6:30:43 PM	BCl3 valve closed
9/7/2011	6:30:43 PM	PH3 valve closed
9/7/2011	6:30:43 PM	SiCl4 pre valve closed
9/7/2011	6:30:43 PM	SiCl4 post valve closed
9/7/2011	6:30:43 PM	Bypass valve closed
9/7/2011	6:30:43 PM	Bubbler valve closed
9/7/2011	6:30:43 PM	Main Vac valve opened
9/7/2011	6:30:43 PM	Helium MFC set to  0.000000
9/7/2011	6:30:43 PM	H2 MFC set to  0.000000
9/7/2011	6:30:43 PM	BCl3 MFC set to  0.000000
9/7/2011	6:30:43 PM	PHl3 MFC set to  0.000000
9/7/2011	6:30:43 PM	SiCl4 MFC set to  0.000000
9/7/2011	6:30:43 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	6:30:44 PM	Tube furnace set to 0
9/7/2011	6:30:45 PM	Run finished at 6:30 PM
9/7/2011	6:30:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	7:03:48 PM	Main Vac valve closed
9/7/2011	7:03:54 PM	Main Vac valve opened
9/7/2011	7:03:55 PM	Main Vac valve closed
9/7/2011	7:03:55 PM	Main Vac valve opened
9/7/2011	7:04:47 PM	Recipe started at 7:04 PM
9/7/2011	7:04:47 PM	Helium valve closed
9/7/2011	7:04:47 PM	H2 valve closed
9/7/2011	7:04:47 PM	BCl3 valve closed
9/7/2011	7:04:47 PM	PH3 valve closed
9/7/2011	7:04:47 PM	SiCl4 pre valve closed
9/7/2011	7:04:47 PM	SiCl4 post valve closed
9/7/2011	7:04:47 PM	Main Vac valve closed
9/7/2011	7:04:47 PM	Bypass valve closed
9/7/2011	7:04:47 PM	Bubbler valve closed
9/7/2011	7:04:47 PM	Helium MFC set to  0.000000
9/7/2011	7:04:47 PM	H2 MFC set to  0.000000
9/7/2011	7:04:47 PM	BCl3 MFC set to  0.000000
9/7/2011	7:04:47 PM	PHl3 MFC set to  0.000000
9/7/2011	7:04:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	7:04:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	7:04:48 PM	Tube furnace set to 0
9/7/2011	7:04:51 PM	Helium valve closed
9/7/2011	7:04:51 PM	BCl3 valve closed
9/7/2011	7:04:51 PM	PH3 valve closed
9/7/2011	7:04:51 PM	SiCl4 pre valve closed
9/7/2011	7:04:51 PM	SiCl4 post valve closed
9/7/2011	7:04:51 PM	Main Vac valve closed
9/7/2011	7:04:51 PM	Bypass valve closed
9/7/2011	7:04:51 PM	Bubbler valve closed
9/7/2011	7:04:51 PM	H2 valve opened
9/7/2011	7:04:51 PM	Helium MFC set to  0.000000
9/7/2011	7:04:51 PM	H2 MFC set to  500.000000
9/7/2011	7:04:51 PM	BCl3 MFC set to  0.000000
9/7/2011	7:04:51 PM	PHl3 MFC set to  0.000000
9/7/2011	7:04:51 PM	SiCl4 MFC set to  0.000000
9/7/2011	7:04:51 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	7:04:51 PM	Tube furnace set to 0
9/7/2011	7:05:53 PM	Helium valve closed
9/7/2011	7:05:53 PM	BCl3 valve closed
9/7/2011	7:05:53 PM	PH3 valve closed
9/7/2011	7:05:53 PM	SiCl4 pre valve closed
9/7/2011	7:05:53 PM	SiCl4 post valve closed
9/7/2011	7:05:53 PM	Main Vac valve closed
9/7/2011	7:05:53 PM	Bypass valve closed
9/7/2011	7:05:53 PM	H2 valve opened
9/7/2011	7:05:53 PM	Bubbler valve opened
9/7/2011	7:05:53 PM	Helium MFC set to  0.000000
9/7/2011	7:05:53 PM	H2 MFC set to  500.000000
9/7/2011	7:05:53 PM	BCl3 MFC set to  0.000000
9/7/2011	7:05:53 PM	PHl3 MFC set to  0.000000
9/7/2011	7:05:53 PM	SiCl4 MFC set to  0.000000
9/7/2011	7:05:53 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	7:05:53 PM	Tube furnace set to 0
9/7/2011	7:05:54 PM	Helium valve closed
9/7/2011	7:05:54 PM	BCl3 valve closed
9/7/2011	7:05:54 PM	PH3 valve closed
9/7/2011	7:05:54 PM	SiCl4 pre valve closed
9/7/2011	7:05:54 PM	SiCl4 post valve closed
9/7/2011	7:05:54 PM	Main Vac valve closed
9/7/2011	7:05:54 PM	Bypass valve closed
9/7/2011	7:05:54 PM	H2 valve opened
9/7/2011	7:05:54 PM	Bubbler valve opened
9/7/2011	7:05:54 PM	Helium MFC set to  0.000000
9/7/2011	7:05:54 PM	H2 MFC set to  500.000000
9/7/2011	7:05:54 PM	BCl3 MFC set to  0.000000
9/7/2011	7:05:54 PM	PHl3 MFC set to  0.000000
9/7/2011	7:05:54 PM	SiCl4 MFC set to  0.000000
9/7/2011	7:05:54 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	7:05:54 PM	Tube furnace set to 1000
9/7/2011	7:25:54 PM	Helium valve closed
9/7/2011	7:25:54 PM	PH3 valve closed
9/7/2011	7:25:54 PM	Main Vac valve closed
9/7/2011	7:25:54 PM	Bypass valve closed
9/7/2011	7:25:54 PM	H2 valve opened
9/7/2011	7:25:54 PM	BCl3 valve opened
9/7/2011	7:25:54 PM	SiCl4 pre valve opened
9/7/2011	7:25:54 PM	SiCl4 post valve opened
9/7/2011	7:25:54 PM	Bubbler valve opened
9/7/2011	7:25:54 PM	Helium MFC set to  0.000000
9/7/2011	7:25:54 PM	H2 MFC set to  500.000000
9/7/2011	7:25:54 PM	BCl3 MFC set to  2.200000
9/7/2011	7:25:54 PM	PHl3 MFC set to  0.000000
9/7/2011	7:25:54 PM	SiCl4 MFC set to  50.000000
9/7/2011	7:25:54 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	7:25:54 PM	Tube furnace set to 1000
9/7/2011	7:42:34 PM	Helium valve closed
9/7/2011	7:42:34 PM	BCl3 valve closed
9/7/2011	7:42:34 PM	PH3 valve closed
9/7/2011	7:42:34 PM	SiCl4 pre valve closed
9/7/2011	7:42:34 PM	SiCl4 post valve closed
9/7/2011	7:42:34 PM	Main Vac valve closed
9/7/2011	7:42:34 PM	Bypass valve closed
9/7/2011	7:42:34 PM	H2 valve opened
9/7/2011	7:42:34 PM	Bubbler valve opened
9/7/2011	7:42:34 PM	Helium MFC set to  0.000000
9/7/2011	7:42:34 PM	H2 MFC set to  500.000000
9/7/2011	7:42:34 PM	BCl3 MFC set to  0.000000
9/7/2011	7:42:34 PM	PHl3 MFC set to  0.000000
9/7/2011	7:42:34 PM	SiCl4 MFC set to  0.000000
9/7/2011	7:42:34 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	7:42:34 PM	Tube furnace set to 750
9/7/2011	7:47:34 PM	H2 valve closed
9/7/2011	7:47:34 PM	BCl3 valve closed
9/7/2011	7:47:34 PM	PH3 valve closed
9/7/2011	7:47:34 PM	SiCl4 pre valve closed
9/7/2011	7:47:34 PM	SiCl4 post valve closed
9/7/2011	7:47:34 PM	Main Vac valve closed
9/7/2011	7:47:34 PM	Bypass valve closed
9/7/2011	7:47:34 PM	Helium valve opened
9/7/2011	7:47:34 PM	Bubbler valve opened
9/7/2011	7:47:34 PM	Helium MFC set to  500.000000
9/7/2011	7:47:34 PM	H2 MFC set to  0.000000
9/7/2011	7:47:34 PM	BCl3 MFC set to  0.000000
9/7/2011	7:47:34 PM	PHl3 MFC set to  0.000000
9/7/2011	7:47:34 PM	SiCl4 MFC set to  0.000000
9/7/2011	7:47:34 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	7:47:34 PM	Tube furnace set to 0
9/7/2011	8:07:34 PM	Helium valve closed
9/7/2011	8:07:34 PM	H2 valve closed
9/7/2011	8:07:34 PM	BCl3 valve closed
9/7/2011	8:07:34 PM	PH3 valve closed
9/7/2011	8:07:34 PM	SiCl4 pre valve closed
9/7/2011	8:07:34 PM	SiCl4 post valve closed
9/7/2011	8:07:34 PM	Main Vac valve closed
9/7/2011	8:07:34 PM	Bypass valve closed
9/7/2011	8:07:34 PM	Bubbler valve closed
9/7/2011	8:07:34 PM	Helium MFC set to  0.000000
9/7/2011	8:07:34 PM	H2 MFC set to  0.000000
9/7/2011	8:07:34 PM	BCl3 MFC set to  0.000000
9/7/2011	8:07:34 PM	PHl3 MFC set to  0.000000
9/7/2011	8:07:34 PM	SiCl4 MFC set to  0.000000
9/7/2011	8:07:34 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	8:07:35 PM	Tube furnace set to 0
9/7/2011	8:07:36 PM	Run finished at 8:07 PM
9/7/2011	9:12:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	9:12:55 PM	Recipe started at 9:12 PM
9/7/2011	9:12:55 PM	Helium valve closed
9/7/2011	9:12:55 PM	H2 valve closed
9/7/2011	9:12:55 PM	BCl3 valve closed
9/7/2011	9:12:55 PM	PH3 valve closed
9/7/2011	9:12:55 PM	SiCl4 pre valve closed
9/7/2011	9:12:55 PM	SiCl4 post valve closed
9/7/2011	9:12:55 PM	Main Vac valve closed
9/7/2011	9:12:55 PM	Bypass valve closed
9/7/2011	9:12:55 PM	Bubbler valve closed
9/7/2011	9:12:55 PM	Helium MFC set to  0.000000
9/7/2011	9:12:55 PM	H2 MFC set to  0.000000
9/7/2011	9:12:55 PM	BCl3 MFC set to  0.000000
9/7/2011	9:12:55 PM	PHl3 MFC set to  0.000000
9/7/2011	9:12:55 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:12:55 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:12:56 PM	Tube furnace set to 0
9/7/2011	9:12:59 PM	H2 valve closed
9/7/2011	9:12:59 PM	BCl3 valve closed
9/7/2011	9:12:59 PM	PH3 valve closed
9/7/2011	9:12:59 PM	SiCl4 pre valve closed
9/7/2011	9:12:59 PM	SiCl4 post valve closed
9/7/2011	9:12:59 PM	Main Vac valve closed
9/7/2011	9:12:59 PM	Bypass valve closed
9/7/2011	9:12:59 PM	Bubbler valve closed
9/7/2011	9:12:59 PM	Helium valve opened
9/7/2011	9:12:59 PM	Helium MFC set to  500.000000
9/7/2011	9:12:59 PM	H2 MFC set to  0.000000
9/7/2011	9:12:59 PM	BCl3 MFC set to  0.000000
9/7/2011	9:12:59 PM	PHl3 MFC set to  0.000000
9/7/2011	9:12:59 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:12:59 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:12:59 PM	Tube furnace set to 0
9/7/2011	9:13:02 PM	Helium valve closed
9/7/2011	9:13:02 PM	H2 valve closed
9/7/2011	9:13:02 PM	BCl3 valve closed
9/7/2011	9:13:02 PM	PH3 valve closed
9/7/2011	9:13:02 PM	SiCl4 pre valve closed
9/7/2011	9:13:02 PM	SiCl4 post valve closed
9/7/2011	9:13:02 PM	Main Vac valve closed
9/7/2011	9:13:02 PM	Bypass valve closed
9/7/2011	9:13:02 PM	Bubbler valve closed
9/7/2011	9:13:02 PM	Helium MFC set to  0.000000
9/7/2011	9:13:02 PM	H2 MFC set to  0.000000
9/7/2011	9:13:02 PM	BCl3 MFC set to  0.000000
9/7/2011	9:13:02 PM	PHl3 MFC set to  0.000000
9/7/2011	9:13:02 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:13:02 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:13:02 PM	Tube furnace set to 0
9/7/2011	9:13:03 PM	Run finished at 9:13 PM
9/7/2011	9:13:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	9:20:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	9:20:47 PM	Recipe started at 9:20 PM
9/7/2011	9:20:47 PM	Helium valve closed
9/7/2011	9:20:47 PM	H2 valve closed
9/7/2011	9:20:47 PM	BCl3 valve closed
9/7/2011	9:20:47 PM	PH3 valve closed
9/7/2011	9:20:47 PM	SiCl4 pre valve closed
9/7/2011	9:20:47 PM	SiCl4 post valve closed
9/7/2011	9:20:47 PM	Main Vac valve closed
9/7/2011	9:20:47 PM	Bubbler valve closed
9/7/2011	9:20:47 PM	Bypass valve opened
9/7/2011	9:20:47 PM	Helium MFC set to  0.000000
9/7/2011	9:20:47 PM	H2 MFC set to  0.000000
9/7/2011	9:20:47 PM	BCl3 MFC set to  0.000000
9/7/2011	9:20:47 PM	PHl3 MFC set to  0.000000
9/7/2011	9:20:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:20:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:20:47 PM	Tube furnace set to 0
9/7/2011	9:21:51 PM	Helium valve closed
9/7/2011	9:21:51 PM	H2 valve closed
9/7/2011	9:21:51 PM	BCl3 valve closed
9/7/2011	9:21:51 PM	PH3 valve closed
9/7/2011	9:21:51 PM	SiCl4 pre valve closed
9/7/2011	9:21:51 PM	SiCl4 post valve closed
9/7/2011	9:21:51 PM	Main Vac valve closed
9/7/2011	9:21:51 PM	Bubbler valve closed
9/7/2011	9:21:51 PM	Bypass valve opened
9/7/2011	9:21:51 PM	Helium MFC set to  0.000000
9/7/2011	9:21:51 PM	H2 MFC set to  0.000000
9/7/2011	9:21:51 PM	BCl3 MFC set to  0.000000
9/7/2011	9:21:51 PM	PHl3 MFC set to  0.000000
9/7/2011	9:21:51 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:21:51 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:21:51 PM	Tube furnace set to 0
9/7/2011	9:22:51 PM	Helium valve closed
9/7/2011	9:22:51 PM	H2 valve closed
9/7/2011	9:22:51 PM	BCl3 valve closed
9/7/2011	9:22:51 PM	PH3 valve closed
9/7/2011	9:22:51 PM	SiCl4 pre valve closed
9/7/2011	9:22:51 PM	SiCl4 post valve closed
9/7/2011	9:22:51 PM	Bypass valve closed
9/7/2011	9:22:51 PM	Bubbler valve closed
9/7/2011	9:22:51 PM	Main Vac valve opened
9/7/2011	9:22:51 PM	Helium MFC set to  0.000000
9/7/2011	9:22:51 PM	H2 MFC set to  0.000000
9/7/2011	9:22:51 PM	BCl3 MFC set to  0.000000
9/7/2011	9:22:51 PM	PHl3 MFC set to  0.000000
9/7/2011	9:22:51 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:22:51 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:22:51 PM	Tube furnace set to 0
9/7/2011	9:22:52 PM	Run finished at 9:22 PM
9/7/2011	9:22:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	9:23:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	9:23:25 PM	Recipe started at 9:23 PM
9/7/2011	9:23:25 PM	Helium valve closed
9/7/2011	9:23:25 PM	H2 valve closed
9/7/2011	9:23:25 PM	BCl3 valve closed
9/7/2011	9:23:25 PM	PH3 valve closed
9/7/2011	9:23:25 PM	SiCl4 pre valve closed
9/7/2011	9:23:25 PM	SiCl4 post valve closed
9/7/2011	9:23:25 PM	Main Vac valve closed
9/7/2011	9:23:25 PM	Bubbler valve closed
9/7/2011	9:23:25 PM	Bypass valve opened
9/7/2011	9:23:25 PM	Helium MFC set to  0.000000
9/7/2011	9:23:25 PM	H2 MFC set to  0.000000
9/7/2011	9:23:25 PM	BCl3 MFC set to  0.000000
9/7/2011	9:23:25 PM	PHl3 MFC set to  0.000000
9/7/2011	9:23:25 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:23:25 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:23:25 PM	Tube furnace set to 0
9/7/2011	9:23:26 PM	Helium valve closed
9/7/2011	9:23:26 PM	H2 valve closed
9/7/2011	9:23:26 PM	BCl3 valve closed
9/7/2011	9:23:26 PM	PH3 valve closed
9/7/2011	9:23:26 PM	SiCl4 pre valve closed
9/7/2011	9:23:26 PM	SiCl4 post valve closed
9/7/2011	9:23:26 PM	Main Vac valve closed
9/7/2011	9:23:26 PM	Bubbler valve closed
9/7/2011	9:23:26 PM	Bypass valve opened
9/7/2011	9:23:26 PM	Helium MFC set to  0.000000
9/7/2011	9:23:26 PM	H2 MFC set to  0.000000
9/7/2011	9:23:26 PM	BCl3 MFC set to  0.000000
9/7/2011	9:23:26 PM	PHl3 MFC set to  0.000000
9/7/2011	9:23:26 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:23:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:23:26 PM	Tube furnace set to 0
9/7/2011	9:23:56 PM	Helium valve closed
9/7/2011	9:23:56 PM	H2 valve closed
9/7/2011	9:23:56 PM	BCl3 valve closed
9/7/2011	9:23:56 PM	PH3 valve closed
9/7/2011	9:23:56 PM	SiCl4 pre valve closed
9/7/2011	9:23:56 PM	SiCl4 post valve closed
9/7/2011	9:23:56 PM	Bypass valve closed
9/7/2011	9:23:56 PM	Bubbler valve closed
9/7/2011	9:23:56 PM	Main Vac valve opened
9/7/2011	9:23:56 PM	Helium MFC set to  0.000000
9/7/2011	9:23:56 PM	H2 MFC set to  0.000000
9/7/2011	9:23:56 PM	BCl3 MFC set to  0.000000
9/7/2011	9:23:56 PM	PHl3 MFC set to  0.000000
9/7/2011	9:23:56 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:23:56 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:23:56 PM	Tube furnace set to 0
9/7/2011	9:24:26 PM	H2 valve closed
9/7/2011	9:24:26 PM	BCl3 valve closed
9/7/2011	9:24:26 PM	PH3 valve closed
9/7/2011	9:24:26 PM	SiCl4 pre valve closed
9/7/2011	9:24:26 PM	SiCl4 post valve closed
9/7/2011	9:24:26 PM	Bypass valve closed
9/7/2011	9:24:26 PM	Bubbler valve closed
9/7/2011	9:24:26 PM	Helium valve opened
9/7/2011	9:24:26 PM	Main Vac valve opened
9/7/2011	9:24:26 PM	Helium MFC set to  20.000000
9/7/2011	9:24:26 PM	H2 MFC set to  0.000000
9/7/2011	9:24:26 PM	BCl3 MFC set to  0.000000
9/7/2011	9:24:26 PM	PHl3 MFC set to  0.000000
9/7/2011	9:24:26 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:24:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:24:26 PM	Tube furnace set to 0
9/7/2011	9:24:56 PM	Helium valve closed
9/7/2011	9:24:56 PM	H2 valve closed
9/7/2011	9:24:56 PM	BCl3 valve closed
9/7/2011	9:24:56 PM	PH3 valve closed
9/7/2011	9:24:56 PM	SiCl4 pre valve closed
9/7/2011	9:24:56 PM	SiCl4 post valve closed
9/7/2011	9:24:56 PM	Bypass valve closed
9/7/2011	9:24:56 PM	Bubbler valve closed
9/7/2011	9:24:56 PM	Main Vac valve opened
9/7/2011	9:24:56 PM	Helium MFC set to  0.000000
9/7/2011	9:24:56 PM	H2 MFC set to  0.000000
9/7/2011	9:24:56 PM	BCl3 MFC set to  0.000000
9/7/2011	9:24:56 PM	PHl3 MFC set to  0.000000
9/7/2011	9:24:56 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:24:56 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:24:56 PM	Tube furnace set to 0
9/7/2011	9:25:26 PM	H2 valve closed
9/7/2011	9:25:26 PM	BCl3 valve closed
9/7/2011	9:25:26 PM	PH3 valve closed
9/7/2011	9:25:26 PM	SiCl4 pre valve closed
9/7/2011	9:25:26 PM	SiCl4 post valve closed
9/7/2011	9:25:26 PM	Bypass valve closed
9/7/2011	9:25:26 PM	Bubbler valve closed
9/7/2011	9:25:26 PM	Helium valve opened
9/7/2011	9:25:26 PM	Main Vac valve opened
9/7/2011	9:25:26 PM	Helium MFC set to  20.000000
9/7/2011	9:25:26 PM	H2 MFC set to  0.000000
9/7/2011	9:25:26 PM	BCl3 MFC set to  0.000000
9/7/2011	9:25:26 PM	PHl3 MFC set to  0.000000
9/7/2011	9:25:26 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:25:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:25:27 PM	Tube furnace set to 0
9/7/2011	9:25:57 PM	Helium valve closed
9/7/2011	9:25:57 PM	H2 valve closed
9/7/2011	9:25:57 PM	BCl3 valve closed
9/7/2011	9:25:57 PM	PH3 valve closed
9/7/2011	9:25:57 PM	SiCl4 pre valve closed
9/7/2011	9:25:57 PM	SiCl4 post valve closed
9/7/2011	9:25:57 PM	Bypass valve closed
9/7/2011	9:25:57 PM	Bubbler valve closed
9/7/2011	9:25:57 PM	Main Vac valve opened
9/7/2011	9:25:57 PM	Helium MFC set to  0.000000
9/7/2011	9:25:57 PM	H2 MFC set to  0.000000
9/7/2011	9:25:57 PM	BCl3 MFC set to  0.000000
9/7/2011	9:25:57 PM	PHl3 MFC set to  0.000000
9/7/2011	9:25:57 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:25:57 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:25:57 PM	Tube furnace set to 0
9/7/2011	9:26:27 PM	H2 valve closed
9/7/2011	9:26:27 PM	BCl3 valve closed
9/7/2011	9:26:27 PM	PH3 valve closed
9/7/2011	9:26:27 PM	SiCl4 pre valve closed
9/7/2011	9:26:27 PM	SiCl4 post valve closed
9/7/2011	9:26:27 PM	Bypass valve closed
9/7/2011	9:26:27 PM	Bubbler valve closed
9/7/2011	9:26:27 PM	Helium valve opened
9/7/2011	9:26:27 PM	Main Vac valve opened
9/7/2011	9:26:27 PM	Helium MFC set to  20.000000
9/7/2011	9:26:27 PM	H2 MFC set to  0.000000
9/7/2011	9:26:27 PM	BCl3 MFC set to  0.000000
9/7/2011	9:26:27 PM	PHl3 MFC set to  0.000000
9/7/2011	9:26:27 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:26:27 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:26:27 PM	Tube furnace set to 0
9/7/2011	9:26:57 PM	Helium valve closed
9/7/2011	9:26:57 PM	H2 valve closed
9/7/2011	9:26:57 PM	BCl3 valve closed
9/7/2011	9:26:57 PM	PH3 valve closed
9/7/2011	9:26:57 PM	SiCl4 pre valve closed
9/7/2011	9:26:57 PM	SiCl4 post valve closed
9/7/2011	9:26:57 PM	Bypass valve closed
9/7/2011	9:26:57 PM	Bubbler valve closed
9/7/2011	9:26:57 PM	Main Vac valve opened
9/7/2011	9:26:57 PM	Helium MFC set to  0.000000
9/7/2011	9:26:57 PM	H2 MFC set to  0.000000
9/7/2011	9:26:57 PM	BCl3 MFC set to  0.000000
9/7/2011	9:26:57 PM	PHl3 MFC set to  0.000000
9/7/2011	9:26:57 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:26:57 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:26:57 PM	Tube furnace set to 0
9/7/2011	9:27:27 PM	H2 valve closed
9/7/2011	9:27:27 PM	BCl3 valve closed
9/7/2011	9:27:27 PM	PH3 valve closed
9/7/2011	9:27:27 PM	SiCl4 pre valve closed
9/7/2011	9:27:27 PM	SiCl4 post valve closed
9/7/2011	9:27:27 PM	Bypass valve closed
9/7/2011	9:27:27 PM	Bubbler valve closed
9/7/2011	9:27:27 PM	Helium valve opened
9/7/2011	9:27:27 PM	Main Vac valve opened
9/7/2011	9:27:27 PM	Helium MFC set to  20.000000
9/7/2011	9:27:27 PM	H2 MFC set to  0.000000
9/7/2011	9:27:27 PM	BCl3 MFC set to  0.000000
9/7/2011	9:27:27 PM	PHl3 MFC set to  0.000000
9/7/2011	9:27:27 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:27:27 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:27:27 PM	Tube furnace set to 0
9/7/2011	9:27:57 PM	Helium valve closed
9/7/2011	9:27:57 PM	H2 valve closed
9/7/2011	9:27:57 PM	BCl3 valve closed
9/7/2011	9:27:57 PM	PH3 valve closed
9/7/2011	9:27:57 PM	SiCl4 pre valve closed
9/7/2011	9:27:57 PM	SiCl4 post valve closed
9/7/2011	9:27:57 PM	Bypass valve closed
9/7/2011	9:27:57 PM	Bubbler valve closed
9/7/2011	9:27:57 PM	Main Vac valve opened
9/7/2011	9:27:57 PM	Helium MFC set to  0.000000
9/7/2011	9:27:57 PM	H2 MFC set to  0.000000
9/7/2011	9:27:57 PM	BCl3 MFC set to  0.000000
9/7/2011	9:27:57 PM	PHl3 MFC set to  0.000000
9/7/2011	9:27:57 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:27:57 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:27:58 PM	Tube furnace set to 0
9/7/2011	9:28:28 PM	H2 valve closed
9/7/2011	9:28:28 PM	BCl3 valve closed
9/7/2011	9:28:28 PM	PH3 valve closed
9/7/2011	9:28:28 PM	SiCl4 pre valve closed
9/7/2011	9:28:28 PM	SiCl4 post valve closed
9/7/2011	9:28:28 PM	Bypass valve closed
9/7/2011	9:28:28 PM	Bubbler valve closed
9/7/2011	9:28:28 PM	Helium valve opened
9/7/2011	9:28:28 PM	Main Vac valve opened
9/7/2011	9:28:28 PM	Helium MFC set to  20.000000
9/7/2011	9:28:28 PM	H2 MFC set to  0.000000
9/7/2011	9:28:28 PM	BCl3 MFC set to  0.000000
9/7/2011	9:28:28 PM	PHl3 MFC set to  0.000000
9/7/2011	9:28:28 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:28:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:28:28 PM	Tube furnace set to 0
9/7/2011	9:28:58 PM	Helium valve closed
9/7/2011	9:28:58 PM	H2 valve closed
9/7/2011	9:28:58 PM	BCl3 valve closed
9/7/2011	9:28:58 PM	PH3 valve closed
9/7/2011	9:28:58 PM	SiCl4 pre valve closed
9/7/2011	9:28:58 PM	SiCl4 post valve closed
9/7/2011	9:28:58 PM	Bypass valve closed
9/7/2011	9:28:58 PM	Bubbler valve closed
9/7/2011	9:28:58 PM	Main Vac valve opened
9/7/2011	9:28:58 PM	Helium MFC set to  0.000000
9/7/2011	9:28:58 PM	H2 MFC set to  0.000000
9/7/2011	9:28:58 PM	BCl3 MFC set to  0.000000
9/7/2011	9:28:58 PM	PHl3 MFC set to  0.000000
9/7/2011	9:28:58 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:28:58 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:28:58 PM	Tube furnace set to 0
9/7/2011	9:29:28 PM	H2 valve closed
9/7/2011	9:29:28 PM	BCl3 valve closed
9/7/2011	9:29:28 PM	PH3 valve closed
9/7/2011	9:29:28 PM	SiCl4 pre valve closed
9/7/2011	9:29:28 PM	SiCl4 post valve closed
9/7/2011	9:29:28 PM	Bypass valve closed
9/7/2011	9:29:28 PM	Bubbler valve closed
9/7/2011	9:29:28 PM	Helium valve opened
9/7/2011	9:29:28 PM	Main Vac valve opened
9/7/2011	9:29:28 PM	Helium MFC set to  20.000000
9/7/2011	9:29:28 PM	H2 MFC set to  0.000000
9/7/2011	9:29:28 PM	BCl3 MFC set to  0.000000
9/7/2011	9:29:28 PM	PHl3 MFC set to  0.000000
9/7/2011	9:29:28 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:29:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:29:28 PM	Tube furnace set to 0
9/7/2011	9:29:58 PM	Helium valve closed
9/7/2011	9:29:58 PM	H2 valve closed
9/7/2011	9:29:58 PM	BCl3 valve closed
9/7/2011	9:29:58 PM	PH3 valve closed
9/7/2011	9:29:58 PM	SiCl4 pre valve closed
9/7/2011	9:29:58 PM	SiCl4 post valve closed
9/7/2011	9:29:58 PM	Bypass valve closed
9/7/2011	9:29:58 PM	Bubbler valve closed
9/7/2011	9:29:58 PM	Main Vac valve opened
9/7/2011	9:29:58 PM	Helium MFC set to  0.000000
9/7/2011	9:29:58 PM	H2 MFC set to  0.000000
9/7/2011	9:29:58 PM	BCl3 MFC set to  0.000000
9/7/2011	9:29:58 PM	PHl3 MFC set to  0.000000
9/7/2011	9:29:58 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:29:58 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:29:58 PM	Tube furnace set to 0
9/7/2011	9:30:28 PM	H2 valve closed
9/7/2011	9:30:28 PM	BCl3 valve closed
9/7/2011	9:30:29 PM	PH3 valve closed
9/7/2011	9:30:29 PM	SiCl4 pre valve closed
9/7/2011	9:30:29 PM	SiCl4 post valve closed
9/7/2011	9:30:29 PM	Bypass valve closed
9/7/2011	9:30:29 PM	Bubbler valve closed
9/7/2011	9:30:29 PM	Helium valve opened
9/7/2011	9:30:29 PM	Main Vac valve opened
9/7/2011	9:30:29 PM	Helium MFC set to  20.000000
9/7/2011	9:30:29 PM	H2 MFC set to  0.000000
9/7/2011	9:30:29 PM	BCl3 MFC set to  0.000000
9/7/2011	9:30:29 PM	PHl3 MFC set to  0.000000
9/7/2011	9:30:29 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:30:29 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:30:29 PM	Tube furnace set to 0
9/7/2011	9:30:59 PM	Helium valve closed
9/7/2011	9:30:59 PM	H2 valve closed
9/7/2011	9:30:59 PM	BCl3 valve closed
9/7/2011	9:30:59 PM	PH3 valve closed
9/7/2011	9:30:59 PM	SiCl4 pre valve closed
9/7/2011	9:30:59 PM	SiCl4 post valve closed
9/7/2011	9:30:59 PM	Bypass valve closed
9/7/2011	9:30:59 PM	Bubbler valve closed
9/7/2011	9:30:59 PM	Main Vac valve opened
9/7/2011	9:30:59 PM	Helium MFC set to  0.000000
9/7/2011	9:30:59 PM	H2 MFC set to  0.000000
9/7/2011	9:30:59 PM	BCl3 MFC set to  0.000000
9/7/2011	9:30:59 PM	PHl3 MFC set to  0.000000
9/7/2011	9:30:59 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:30:59 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:30:59 PM	Tube furnace set to 0
9/7/2011	9:31:29 PM	H2 valve closed
9/7/2011	9:31:29 PM	BCl3 valve closed
9/7/2011	9:31:29 PM	PH3 valve closed
9/7/2011	9:31:29 PM	SiCl4 pre valve closed
9/7/2011	9:31:29 PM	SiCl4 post valve closed
9/7/2011	9:31:29 PM	Bypass valve closed
9/7/2011	9:31:29 PM	Bubbler valve closed
9/7/2011	9:31:29 PM	Helium valve opened
9/7/2011	9:31:29 PM	Main Vac valve opened
9/7/2011	9:31:29 PM	Helium MFC set to  20.000000
9/7/2011	9:31:29 PM	H2 MFC set to  0.000000
9/7/2011	9:31:29 PM	BCl3 MFC set to  0.000000
9/7/2011	9:31:29 PM	PHl3 MFC set to  0.000000
9/7/2011	9:31:29 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:31:29 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:31:29 PM	Tube furnace set to 0
9/7/2011	9:31:59 PM	Helium valve closed
9/7/2011	9:31:59 PM	H2 valve closed
9/7/2011	9:31:59 PM	BCl3 valve closed
9/7/2011	9:31:59 PM	PH3 valve closed
9/7/2011	9:31:59 PM	SiCl4 pre valve closed
9/7/2011	9:31:59 PM	SiCl4 post valve closed
9/7/2011	9:31:59 PM	Bypass valve closed
9/7/2011	9:31:59 PM	Bubbler valve closed
9/7/2011	9:31:59 PM	Main Vac valve opened
9/7/2011	9:31:59 PM	Helium MFC set to  0.000000
9/7/2011	9:31:59 PM	H2 MFC set to  0.000000
9/7/2011	9:31:59 PM	BCl3 MFC set to  0.000000
9/7/2011	9:31:59 PM	PHl3 MFC set to  0.000000
9/7/2011	9:31:59 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:31:59 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:31:59 PM	Tube furnace set to 0
9/7/2011	9:32:29 PM	H2 valve closed
9/7/2011	9:32:29 PM	BCl3 valve closed
9/7/2011	9:32:29 PM	PH3 valve closed
9/7/2011	9:32:29 PM	SiCl4 pre valve closed
9/7/2011	9:32:29 PM	SiCl4 post valve closed
9/7/2011	9:32:29 PM	Bypass valve closed
9/7/2011	9:32:29 PM	Bubbler valve closed
9/7/2011	9:32:29 PM	Helium valve opened
9/7/2011	9:32:29 PM	Main Vac valve opened
9/7/2011	9:32:29 PM	Helium MFC set to  20.000000
9/7/2011	9:32:29 PM	H2 MFC set to  0.000000
9/7/2011	9:32:29 PM	BCl3 MFC set to  0.000000
9/7/2011	9:32:29 PM	PHl3 MFC set to  0.000000
9/7/2011	9:32:29 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:32:29 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:32:30 PM	Tube furnace set to 0
9/7/2011	9:33:00 PM	Helium valve closed
9/7/2011	9:33:00 PM	H2 valve closed
9/7/2011	9:33:00 PM	BCl3 valve closed
9/7/2011	9:33:00 PM	PH3 valve closed
9/7/2011	9:33:00 PM	SiCl4 pre valve closed
9/7/2011	9:33:00 PM	SiCl4 post valve closed
9/7/2011	9:33:00 PM	Bypass valve closed
9/7/2011	9:33:00 PM	Bubbler valve closed
9/7/2011	9:33:00 PM	Main Vac valve opened
9/7/2011	9:33:00 PM	Helium MFC set to  0.000000
9/7/2011	9:33:00 PM	H2 MFC set to  0.000000
9/7/2011	9:33:00 PM	BCl3 MFC set to  0.000000
9/7/2011	9:33:00 PM	PHl3 MFC set to  0.000000
9/7/2011	9:33:00 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:33:00 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:33:00 PM	Tube furnace set to 0
9/7/2011	9:33:30 PM	H2 valve closed
9/7/2011	9:33:30 PM	BCl3 valve closed
9/7/2011	9:33:30 PM	PH3 valve closed
9/7/2011	9:33:30 PM	SiCl4 pre valve closed
9/7/2011	9:33:30 PM	SiCl4 post valve closed
9/7/2011	9:33:30 PM	Bypass valve closed
9/7/2011	9:33:30 PM	Bubbler valve closed
9/7/2011	9:33:30 PM	Helium valve opened
9/7/2011	9:33:30 PM	Main Vac valve opened
9/7/2011	9:33:30 PM	Helium MFC set to  20.000000
9/7/2011	9:33:30 PM	H2 MFC set to  0.000000
9/7/2011	9:33:30 PM	BCl3 MFC set to  0.000000
9/7/2011	9:33:30 PM	PHl3 MFC set to  0.000000
9/7/2011	9:33:30 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:33:30 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:33:30 PM	Tube furnace set to 0
9/7/2011	9:34:00 PM	Helium valve closed
9/7/2011	9:34:00 PM	H2 valve closed
9/7/2011	9:34:00 PM	BCl3 valve closed
9/7/2011	9:34:00 PM	PH3 valve closed
9/7/2011	9:34:00 PM	SiCl4 pre valve closed
9/7/2011	9:34:00 PM	SiCl4 post valve closed
9/7/2011	9:34:00 PM	Bypass valve closed
9/7/2011	9:34:00 PM	Bubbler valve closed
9/7/2011	9:34:00 PM	Main Vac valve opened
9/7/2011	9:34:00 PM	Helium MFC set to  0.000000
9/7/2011	9:34:00 PM	H2 MFC set to  0.000000
9/7/2011	9:34:00 PM	BCl3 MFC set to  0.000000
9/7/2011	9:34:00 PM	PHl3 MFC set to  0.000000
9/7/2011	9:34:00 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:34:00 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:34:00 PM	Tube furnace set to 0
9/7/2011	9:34:01 PM	Run finished at 9:34 PM
9/7/2011	9:34:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	9:34:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	9:35:03 PM	Recipe started at 9:34 PM
9/7/2011	9:35:03 PM	Helium valve closed
9/7/2011	9:35:03 PM	H2 valve closed
9/7/2011	9:35:03 PM	BCl3 valve closed
9/7/2011	9:35:03 PM	PH3 valve closed
9/7/2011	9:35:03 PM	SiCl4 pre valve closed
9/7/2011	9:35:03 PM	SiCl4 post valve closed
9/7/2011	9:35:04 PM	Main Vac valve closed
9/7/2011	9:35:04 PM	Bubbler valve closed
9/7/2011	9:35:04 PM	Bypass valve opened
9/7/2011	9:35:04 PM	Helium MFC set to  0.000000
9/7/2011	9:35:04 PM	H2 MFC set to  0.000000
9/7/2011	9:35:04 PM	BCl3 MFC set to  0.000000
9/7/2011	9:35:04 PM	PHl3 MFC set to  0.000000
9/7/2011	9:35:04 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:35:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:35:04 PM	Tube furnace set to 0
9/7/2011	9:35:04 PM	Helium valve closed
9/7/2011	9:35:04 PM	H2 valve closed
9/7/2011	9:35:04 PM	BCl3 valve closed
9/7/2011	9:35:04 PM	PH3 valve closed
9/7/2011	9:35:04 PM	SiCl4 pre valve closed
9/7/2011	9:35:04 PM	SiCl4 post valve closed
9/7/2011	9:35:04 PM	Main Vac valve closed
9/7/2011	9:35:04 PM	Bubbler valve closed
9/7/2011	9:35:04 PM	Bypass valve opened
9/7/2011	9:35:04 PM	Helium MFC set to  0.000000
9/7/2011	9:35:04 PM	H2 MFC set to  0.000000
9/7/2011	9:35:04 PM	BCl3 MFC set to  0.000000
9/7/2011	9:35:04 PM	PHl3 MFC set to  0.000000
9/7/2011	9:35:04 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:35:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:35:04 PM	Tube furnace set to 0
9/7/2011	9:35:34 PM	Helium valve closed
9/7/2011	9:35:34 PM	H2 valve closed
9/7/2011	9:35:34 PM	BCl3 valve closed
9/7/2011	9:35:34 PM	PH3 valve closed
9/7/2011	9:35:34 PM	SiCl4 pre valve closed
9/7/2011	9:35:34 PM	SiCl4 post valve closed
9/7/2011	9:35:34 PM	Bypass valve closed
9/7/2011	9:35:34 PM	Bubbler valve closed
9/7/2011	9:35:34 PM	Main Vac valve opened
9/7/2011	9:35:34 PM	Helium MFC set to  0.000000
9/7/2011	9:35:34 PM	H2 MFC set to  0.000000
9/7/2011	9:35:34 PM	BCl3 MFC set to  0.000000
9/7/2011	9:35:34 PM	PHl3 MFC set to  0.000000
9/7/2011	9:35:34 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:35:34 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:35:34 PM	Tube furnace set to 0
9/7/2011	9:36:04 PM	H2 valve closed
9/7/2011	9:36:04 PM	BCl3 valve closed
9/7/2011	9:36:04 PM	PH3 valve closed
9/7/2011	9:36:04 PM	SiCl4 pre valve closed
9/7/2011	9:36:04 PM	SiCl4 post valve closed
9/7/2011	9:36:04 PM	Bypass valve closed
9/7/2011	9:36:04 PM	Bubbler valve closed
9/7/2011	9:36:04 PM	Helium valve opened
9/7/2011	9:36:04 PM	Main Vac valve opened
9/7/2011	9:36:04 PM	Helium MFC set to  20.000000
9/7/2011	9:36:04 PM	H2 MFC set to  0.000000
9/7/2011	9:36:04 PM	BCl3 MFC set to  0.000000
9/7/2011	9:36:04 PM	PHl3 MFC set to  0.000000
9/7/2011	9:36:04 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:36:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:36:05 PM	Tube furnace set to 0
9/7/2011	9:36:35 PM	Helium valve closed
9/7/2011	9:36:35 PM	H2 valve closed
9/7/2011	9:36:35 PM	BCl3 valve closed
9/7/2011	9:36:35 PM	PH3 valve closed
9/7/2011	9:36:35 PM	SiCl4 pre valve closed
9/7/2011	9:36:35 PM	SiCl4 post valve closed
9/7/2011	9:36:35 PM	Bypass valve closed
9/7/2011	9:36:35 PM	Bubbler valve closed
9/7/2011	9:36:35 PM	Main Vac valve opened
9/7/2011	9:36:35 PM	Helium MFC set to  0.000000
9/7/2011	9:36:35 PM	H2 MFC set to  0.000000
9/7/2011	9:36:35 PM	BCl3 MFC set to  0.000000
9/7/2011	9:36:35 PM	PHl3 MFC set to  0.000000
9/7/2011	9:36:35 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:36:35 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:36:35 PM	Tube furnace set to 0
9/7/2011	9:37:05 PM	H2 valve closed
9/7/2011	9:37:05 PM	BCl3 valve closed
9/7/2011	9:37:05 PM	PH3 valve closed
9/7/2011	9:37:05 PM	SiCl4 pre valve closed
9/7/2011	9:37:05 PM	SiCl4 post valve closed
9/7/2011	9:37:05 PM	Bypass valve closed
9/7/2011	9:37:05 PM	Bubbler valve closed
9/7/2011	9:37:05 PM	Helium valve opened
9/7/2011	9:37:05 PM	Main Vac valve opened
9/7/2011	9:37:05 PM	Helium MFC set to  20.000000
9/7/2011	9:37:05 PM	H2 MFC set to  0.000000
9/7/2011	9:37:05 PM	BCl3 MFC set to  0.000000
9/7/2011	9:37:05 PM	PHl3 MFC set to  0.000000
9/7/2011	9:37:05 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:37:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:37:05 PM	Tube furnace set to 0
9/7/2011	9:37:35 PM	Helium valve closed
9/7/2011	9:37:35 PM	H2 valve closed
9/7/2011	9:37:35 PM	BCl3 valve closed
9/7/2011	9:37:35 PM	PH3 valve closed
9/7/2011	9:37:35 PM	SiCl4 pre valve closed
9/7/2011	9:37:35 PM	SiCl4 post valve closed
9/7/2011	9:37:35 PM	Bypass valve closed
9/7/2011	9:37:35 PM	Bubbler valve closed
9/7/2011	9:37:35 PM	Main Vac valve opened
9/7/2011	9:37:35 PM	Helium MFC set to  0.000000
9/7/2011	9:37:35 PM	H2 MFC set to  0.000000
9/7/2011	9:37:35 PM	BCl3 MFC set to  0.000000
9/7/2011	9:37:35 PM	PHl3 MFC set to  0.000000
9/7/2011	9:37:35 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:37:35 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:37:35 PM	Tube furnace set to 0
9/7/2011	9:38:05 PM	H2 valve closed
9/7/2011	9:38:05 PM	BCl3 valve closed
9/7/2011	9:38:05 PM	PH3 valve closed
9/7/2011	9:38:05 PM	SiCl4 pre valve closed
9/7/2011	9:38:05 PM	SiCl4 post valve closed
9/7/2011	9:38:05 PM	Bypass valve closed
9/7/2011	9:38:05 PM	Bubbler valve closed
9/7/2011	9:38:05 PM	Helium valve opened
9/7/2011	9:38:05 PM	Main Vac valve opened
9/7/2011	9:38:05 PM	Helium MFC set to  20.000000
9/7/2011	9:38:05 PM	H2 MFC set to  0.000000
9/7/2011	9:38:05 PM	BCl3 MFC set to  0.000000
9/7/2011	9:38:05 PM	PHl3 MFC set to  0.000000
9/7/2011	9:38:05 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:38:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:38:05 PM	Tube furnace set to 0
9/7/2011	9:38:35 PM	Helium valve closed
9/7/2011	9:38:35 PM	H2 valve closed
9/7/2011	9:38:35 PM	BCl3 valve closed
9/7/2011	9:38:35 PM	PH3 valve closed
9/7/2011	9:38:35 PM	SiCl4 pre valve closed
9/7/2011	9:38:35 PM	SiCl4 post valve closed
9/7/2011	9:38:35 PM	Bypass valve closed
9/7/2011	9:38:35 PM	Bubbler valve closed
9/7/2011	9:38:35 PM	Main Vac valve opened
9/7/2011	9:38:35 PM	Helium MFC set to  0.000000
9/7/2011	9:38:35 PM	H2 MFC set to  0.000000
9/7/2011	9:38:35 PM	BCl3 MFC set to  0.000000
9/7/2011	9:38:35 PM	PHl3 MFC set to  0.000000
9/7/2011	9:38:35 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:38:35 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:38:36 PM	Tube furnace set to 0
9/7/2011	9:39:06 PM	H2 valve closed
9/7/2011	9:39:06 PM	BCl3 valve closed
9/7/2011	9:39:06 PM	PH3 valve closed
9/7/2011	9:39:06 PM	SiCl4 pre valve closed
9/7/2011	9:39:06 PM	SiCl4 post valve closed
9/7/2011	9:39:06 PM	Bypass valve closed
9/7/2011	9:39:06 PM	Bubbler valve closed
9/7/2011	9:39:06 PM	Helium valve opened
9/7/2011	9:39:06 PM	Main Vac valve opened
9/7/2011	9:39:06 PM	Helium MFC set to  20.000000
9/7/2011	9:39:06 PM	H2 MFC set to  0.000000
9/7/2011	9:39:06 PM	BCl3 MFC set to  0.000000
9/7/2011	9:39:06 PM	PHl3 MFC set to  0.000000
9/7/2011	9:39:06 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:39:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:39:06 PM	Tube furnace set to 0
9/7/2011	9:39:36 PM	Helium valve closed
9/7/2011	9:39:36 PM	H2 valve closed
9/7/2011	9:39:36 PM	BCl3 valve closed
9/7/2011	9:39:36 PM	PH3 valve closed
9/7/2011	9:39:36 PM	SiCl4 pre valve closed
9/7/2011	9:39:36 PM	SiCl4 post valve closed
9/7/2011	9:39:36 PM	Bypass valve closed
9/7/2011	9:39:36 PM	Bubbler valve closed
9/7/2011	9:39:36 PM	Main Vac valve opened
9/7/2011	9:39:36 PM	Helium MFC set to  0.000000
9/7/2011	9:39:36 PM	H2 MFC set to  0.000000
9/7/2011	9:39:36 PM	BCl3 MFC set to  0.000000
9/7/2011	9:39:36 PM	PHl3 MFC set to  0.000000
9/7/2011	9:39:36 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:39:36 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:39:36 PM	Tube furnace set to 0
9/7/2011	9:40:06 PM	H2 valve closed
9/7/2011	9:40:06 PM	BCl3 valve closed
9/7/2011	9:40:06 PM	PH3 valve closed
9/7/2011	9:40:06 PM	SiCl4 pre valve closed
9/7/2011	9:40:06 PM	SiCl4 post valve closed
9/7/2011	9:40:06 PM	Bypass valve closed
9/7/2011	9:40:06 PM	Bubbler valve closed
9/7/2011	9:40:06 PM	Helium valve opened
9/7/2011	9:40:06 PM	Main Vac valve opened
9/7/2011	9:40:06 PM	Helium MFC set to  20.000000
9/7/2011	9:40:06 PM	H2 MFC set to  0.000000
9/7/2011	9:40:06 PM	BCl3 MFC set to  0.000000
9/7/2011	9:40:06 PM	PHl3 MFC set to  0.000000
9/7/2011	9:40:06 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:40:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:40:06 PM	Tube furnace set to 0
9/7/2011	9:40:36 PM	Helium valve closed
9/7/2011	9:40:36 PM	H2 valve closed
9/7/2011	9:40:36 PM	BCl3 valve closed
9/7/2011	9:40:36 PM	PH3 valve closed
9/7/2011	9:40:36 PM	SiCl4 pre valve closed
9/7/2011	9:40:36 PM	SiCl4 post valve closed
9/7/2011	9:40:36 PM	Bypass valve closed
9/7/2011	9:40:36 PM	Bubbler valve closed
9/7/2011	9:40:36 PM	Main Vac valve opened
9/7/2011	9:40:36 PM	Helium MFC set to  0.000000
9/7/2011	9:40:36 PM	H2 MFC set to  0.000000
9/7/2011	9:40:36 PM	BCl3 MFC set to  0.000000
9/7/2011	9:40:36 PM	PHl3 MFC set to  0.000000
9/7/2011	9:40:36 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:40:36 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:40:36 PM	Tube furnace set to 0
9/7/2011	9:41:06 PM	H2 valve closed
9/7/2011	9:41:06 PM	BCl3 valve closed
9/7/2011	9:41:07 PM	PH3 valve closed
9/7/2011	9:41:07 PM	SiCl4 pre valve closed
9/7/2011	9:41:07 PM	SiCl4 post valve closed
9/7/2011	9:41:07 PM	Bypass valve closed
9/7/2011	9:41:07 PM	Bubbler valve closed
9/7/2011	9:41:07 PM	Helium valve opened
9/7/2011	9:41:07 PM	Main Vac valve opened
9/7/2011	9:41:07 PM	Helium MFC set to  20.000000
9/7/2011	9:41:07 PM	H2 MFC set to  0.000000
9/7/2011	9:41:07 PM	BCl3 MFC set to  0.000000
9/7/2011	9:41:07 PM	PHl3 MFC set to  0.000000
9/7/2011	9:41:07 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:41:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:41:07 PM	Tube furnace set to 0
9/7/2011	9:41:37 PM	Helium valve closed
9/7/2011	9:41:37 PM	H2 valve closed
9/7/2011	9:41:37 PM	BCl3 valve closed
9/7/2011	9:41:37 PM	PH3 valve closed
9/7/2011	9:41:37 PM	SiCl4 pre valve closed
9/7/2011	9:41:37 PM	SiCl4 post valve closed
9/7/2011	9:41:37 PM	Bypass valve closed
9/7/2011	9:41:37 PM	Bubbler valve closed
9/7/2011	9:41:37 PM	Main Vac valve opened
9/7/2011	9:41:37 PM	Helium MFC set to  0.000000
9/7/2011	9:41:37 PM	H2 MFC set to  0.000000
9/7/2011	9:41:37 PM	BCl3 MFC set to  0.000000
9/7/2011	9:41:37 PM	PHl3 MFC set to  0.000000
9/7/2011	9:41:37 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:41:37 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:41:37 PM	Tube furnace set to 0
9/7/2011	9:41:48 PM	Run aborted at 9:41 PM
9/7/2011	9:41:48 PM	Helium valve closed
9/7/2011	9:41:48 PM	H2 valve closed
9/7/2011	9:41:48 PM	BCl3 valve closed
9/7/2011	9:41:48 PM	PH3 valve closed
9/7/2011	9:41:48 PM	SiCl4 pre valve closed
9/7/2011	9:41:48 PM	SiCl4 post valve closed
9/7/2011	9:41:48 PM	Bypass valve closed
9/7/2011	9:41:48 PM	Main Vac valve closed
9/7/2011	9:41:48 PM	Bubbler valve closed
9/7/2011	9:41:48 PM	Helium MFC set to  0.000000
9/7/2011	9:41:48 PM	H2 MFC set to  0.000000
9/7/2011	9:41:48 PM	BCl3 MFC set to  0.000000
9/7/2011	9:41:48 PM	PHl3 MFC set to  0.000000
9/7/2011	9:41:48 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:41:48 PM	Tube furnace set to 0
9/7/2011	9:41:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	9:42:01 PM	Main Vac valve opened
9/7/2011	9:42:09 PM	Main Vac valve closed
9/7/2011	9:42:18 PM	Main Vac valve opened
9/7/2011	9:42:19 PM	Main Vac valve closed
9/7/2011	9:42:19 PM	Main Vac valve opened
9/7/2011	9:42:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	9:42:43 PM	Recipe started at 9:42 PM
9/7/2011	9:42:43 PM	Helium valve closed
9/7/2011	9:42:43 PM	H2 valve closed
9/7/2011	9:42:43 PM	BCl3 valve closed
9/7/2011	9:42:44 PM	PH3 valve closed
9/7/2011	9:42:44 PM	SiCl4 pre valve closed
9/7/2011	9:42:44 PM	SiCl4 post valve closed
9/7/2011	9:42:44 PM	Main Vac valve closed
9/7/2011	9:42:44 PM	Bubbler valve closed
9/7/2011	9:42:44 PM	Bypass valve opened
9/7/2011	9:42:44 PM	Helium MFC set to  0.000000
9/7/2011	9:42:44 PM	H2 MFC set to  0.000000
9/7/2011	9:42:44 PM	BCl3 MFC set to  0.000000
9/7/2011	9:42:44 PM	PHl3 MFC set to  0.000000
9/7/2011	9:42:44 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:42:44 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:42:44 PM	Tube furnace set to 0
9/7/2011	9:42:44 PM	Helium valve closed
9/7/2011	9:42:44 PM	H2 valve closed
9/7/2011	9:42:44 PM	BCl3 valve closed
9/7/2011	9:42:44 PM	PH3 valve closed
9/7/2011	9:42:44 PM	SiCl4 pre valve closed
9/7/2011	9:42:44 PM	SiCl4 post valve closed
9/7/2011	9:42:44 PM	Main Vac valve closed
9/7/2011	9:42:44 PM	Bubbler valve closed
9/7/2011	9:42:44 PM	Bypass valve opened
9/7/2011	9:42:44 PM	Helium MFC set to  0.000000
9/7/2011	9:42:44 PM	H2 MFC set to  0.000000
9/7/2011	9:42:44 PM	BCl3 MFC set to  0.000000
9/7/2011	9:42:44 PM	PHl3 MFC set to  0.000000
9/7/2011	9:42:44 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:42:44 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:42:44 PM	Tube furnace set to 0
9/7/2011	9:43:14 PM	Helium valve closed
9/7/2011	9:43:14 PM	H2 valve closed
9/7/2011	9:43:14 PM	BCl3 valve closed
9/7/2011	9:43:14 PM	PH3 valve closed
9/7/2011	9:43:14 PM	SiCl4 pre valve closed
9/7/2011	9:43:14 PM	SiCl4 post valve closed
9/7/2011	9:43:14 PM	Bypass valve closed
9/7/2011	9:43:14 PM	Bubbler valve closed
9/7/2011	9:43:14 PM	Main Vac valve opened
9/7/2011	9:43:14 PM	Helium MFC set to  0.000000
9/7/2011	9:43:14 PM	H2 MFC set to  0.000000
9/7/2011	9:43:14 PM	BCl3 MFC set to  0.000000
9/7/2011	9:43:14 PM	PHl3 MFC set to  0.000000
9/7/2011	9:43:14 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:43:14 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:43:14 PM	Tube furnace set to 0
9/7/2011	9:43:44 PM	H2 valve closed
9/7/2011	9:43:44 PM	BCl3 valve closed
9/7/2011	9:43:44 PM	PH3 valve closed
9/7/2011	9:43:44 PM	SiCl4 pre valve closed
9/7/2011	9:43:44 PM	SiCl4 post valve closed
9/7/2011	9:43:44 PM	Bypass valve closed
9/7/2011	9:43:44 PM	Bubbler valve closed
9/7/2011	9:43:44 PM	Helium valve opened
9/7/2011	9:43:44 PM	Main Vac valve opened
9/7/2011	9:43:44 PM	Helium MFC set to  20.000000
9/7/2011	9:43:44 PM	H2 MFC set to  0.000000
9/7/2011	9:43:44 PM	BCl3 MFC set to  0.000000
9/7/2011	9:43:44 PM	PHl3 MFC set to  0.000000
9/7/2011	9:43:44 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:43:44 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:43:45 PM	Tube furnace set to 0
9/7/2011	9:44:15 PM	Helium valve closed
9/7/2011	9:44:15 PM	H2 valve closed
9/7/2011	9:44:15 PM	BCl3 valve closed
9/7/2011	9:44:15 PM	PH3 valve closed
9/7/2011	9:44:15 PM	SiCl4 pre valve closed
9/7/2011	9:44:15 PM	SiCl4 post valve closed
9/7/2011	9:44:15 PM	Bypass valve closed
9/7/2011	9:44:15 PM	Bubbler valve closed
9/7/2011	9:44:15 PM	Main Vac valve opened
9/7/2011	9:44:15 PM	Helium MFC set to  0.000000
9/7/2011	9:44:15 PM	H2 MFC set to  0.000000
9/7/2011	9:44:15 PM	BCl3 MFC set to  0.000000
9/7/2011	9:44:15 PM	PHl3 MFC set to  0.000000
9/7/2011	9:44:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:44:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:44:15 PM	Tube furnace set to 0
9/7/2011	9:44:45 PM	H2 valve closed
9/7/2011	9:44:45 PM	BCl3 valve closed
9/7/2011	9:44:45 PM	PH3 valve closed
9/7/2011	9:44:45 PM	SiCl4 pre valve closed
9/7/2011	9:44:45 PM	SiCl4 post valve closed
9/7/2011	9:44:45 PM	Bypass valve closed
9/7/2011	9:44:45 PM	Bubbler valve closed
9/7/2011	9:44:45 PM	Helium valve opened
9/7/2011	9:44:45 PM	Main Vac valve opened
9/7/2011	9:44:45 PM	Helium MFC set to  20.000000
9/7/2011	9:44:45 PM	H2 MFC set to  0.000000
9/7/2011	9:44:45 PM	BCl3 MFC set to  0.000000
9/7/2011	9:44:45 PM	PHl3 MFC set to  0.000000
9/7/2011	9:44:45 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:44:45 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:44:45 PM	Tube furnace set to 0
9/7/2011	9:45:15 PM	Helium valve closed
9/7/2011	9:45:15 PM	H2 valve closed
9/7/2011	9:45:15 PM	BCl3 valve closed
9/7/2011	9:45:15 PM	PH3 valve closed
9/7/2011	9:45:15 PM	SiCl4 pre valve closed
9/7/2011	9:45:15 PM	SiCl4 post valve closed
9/7/2011	9:45:15 PM	Bypass valve closed
9/7/2011	9:45:15 PM	Bubbler valve closed
9/7/2011	9:45:15 PM	Main Vac valve opened
9/7/2011	9:45:15 PM	Helium MFC set to  0.000000
9/7/2011	9:45:15 PM	H2 MFC set to  0.000000
9/7/2011	9:45:15 PM	BCl3 MFC set to  0.000000
9/7/2011	9:45:15 PM	PHl3 MFC set to  0.000000
9/7/2011	9:45:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:45:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:45:15 PM	Tube furnace set to 0
9/7/2011	9:45:45 PM	H2 valve closed
9/7/2011	9:45:45 PM	BCl3 valve closed
9/7/2011	9:45:45 PM	PH3 valve closed
9/7/2011	9:45:45 PM	SiCl4 pre valve closed
9/7/2011	9:45:45 PM	SiCl4 post valve closed
9/7/2011	9:45:45 PM	Bypass valve closed
9/7/2011	9:45:45 PM	Bubbler valve closed
9/7/2011	9:45:45 PM	Helium valve opened
9/7/2011	9:45:45 PM	Main Vac valve opened
9/7/2011	9:45:45 PM	Helium MFC set to  20.000000
9/7/2011	9:45:45 PM	H2 MFC set to  0.000000
9/7/2011	9:45:45 PM	BCl3 MFC set to  0.000000
9/7/2011	9:45:45 PM	PHl3 MFC set to  0.000000
9/7/2011	9:45:45 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:45:45 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:45:45 PM	Tube furnace set to 0
9/7/2011	9:46:15 PM	Helium valve closed
9/7/2011	9:46:15 PM	H2 valve closed
9/7/2011	9:46:15 PM	BCl3 valve closed
9/7/2011	9:46:15 PM	PH3 valve closed
9/7/2011	9:46:15 PM	SiCl4 pre valve closed
9/7/2011	9:46:15 PM	SiCl4 post valve closed
9/7/2011	9:46:15 PM	Bypass valve closed
9/7/2011	9:46:15 PM	Bubbler valve closed
9/7/2011	9:46:15 PM	Main Vac valve opened
9/7/2011	9:46:15 PM	Helium MFC set to  0.000000
9/7/2011	9:46:15 PM	H2 MFC set to  0.000000
9/7/2011	9:46:15 PM	BCl3 MFC set to  0.000000
9/7/2011	9:46:15 PM	PHl3 MFC set to  0.000000
9/7/2011	9:46:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:46:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:46:15 PM	Tube furnace set to 0
9/7/2011	9:46:46 PM	H2 valve closed
9/7/2011	9:46:46 PM	BCl3 valve closed
9/7/2011	9:46:46 PM	PH3 valve closed
9/7/2011	9:46:46 PM	SiCl4 pre valve closed
9/7/2011	9:46:46 PM	SiCl4 post valve closed
9/7/2011	9:46:46 PM	Bypass valve closed
9/7/2011	9:46:46 PM	Bubbler valve closed
9/7/2011	9:46:46 PM	Helium valve opened
9/7/2011	9:46:46 PM	Main Vac valve opened
9/7/2011	9:46:46 PM	Helium MFC set to  20.000000
9/7/2011	9:46:46 PM	H2 MFC set to  0.000000
9/7/2011	9:46:46 PM	BCl3 MFC set to  0.000000
9/7/2011	9:46:46 PM	PHl3 MFC set to  0.000000
9/7/2011	9:46:46 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:46:46 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:46:46 PM	Tube furnace set to 0
9/7/2011	9:47:16 PM	Helium valve closed
9/7/2011	9:47:16 PM	H2 valve closed
9/7/2011	9:47:16 PM	BCl3 valve closed
9/7/2011	9:47:16 PM	PH3 valve closed
9/7/2011	9:47:16 PM	SiCl4 pre valve closed
9/7/2011	9:47:16 PM	SiCl4 post valve closed
9/7/2011	9:47:16 PM	Bypass valve closed
9/7/2011	9:47:16 PM	Bubbler valve closed
9/7/2011	9:47:16 PM	Main Vac valve opened
9/7/2011	9:47:16 PM	Helium MFC set to  0.000000
9/7/2011	9:47:16 PM	H2 MFC set to  0.000000
9/7/2011	9:47:16 PM	BCl3 MFC set to  0.000000
9/7/2011	9:47:16 PM	PHl3 MFC set to  0.000000
9/7/2011	9:47:16 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:47:16 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:47:16 PM	Tube furnace set to 0
9/7/2011	9:47:46 PM	H2 valve closed
9/7/2011	9:47:46 PM	BCl3 valve closed
9/7/2011	9:47:46 PM	PH3 valve closed
9/7/2011	9:47:46 PM	SiCl4 pre valve closed
9/7/2011	9:47:46 PM	SiCl4 post valve closed
9/7/2011	9:47:46 PM	Bypass valve closed
9/7/2011	9:47:46 PM	Bubbler valve closed
9/7/2011	9:47:46 PM	Helium valve opened
9/7/2011	9:47:46 PM	Main Vac valve opened
9/7/2011	9:47:46 PM	Helium MFC set to  20.000000
9/7/2011	9:47:46 PM	H2 MFC set to  0.000000
9/7/2011	9:47:46 PM	BCl3 MFC set to  0.000000
9/7/2011	9:47:46 PM	PHl3 MFC set to  0.000000
9/7/2011	9:47:46 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:47:46 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:47:46 PM	Tube furnace set to 0
9/7/2011	9:48:16 PM	Helium valve closed
9/7/2011	9:48:16 PM	H2 valve closed
9/7/2011	9:48:16 PM	BCl3 valve closed
9/7/2011	9:48:16 PM	PH3 valve closed
9/7/2011	9:48:16 PM	SiCl4 pre valve closed
9/7/2011	9:48:16 PM	SiCl4 post valve closed
9/7/2011	9:48:16 PM	Bypass valve closed
9/7/2011	9:48:16 PM	Bubbler valve closed
9/7/2011	9:48:16 PM	Main Vac valve opened
9/7/2011	9:48:16 PM	Helium MFC set to  0.000000
9/7/2011	9:48:16 PM	H2 MFC set to  0.000000
9/7/2011	9:48:16 PM	BCl3 MFC set to  0.000000
9/7/2011	9:48:16 PM	PHl3 MFC set to  0.000000
9/7/2011	9:48:16 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:48:16 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:48:16 PM	Tube furnace set to 0
9/7/2011	9:48:46 PM	H2 valve closed
9/7/2011	9:48:46 PM	BCl3 valve closed
9/7/2011	9:48:46 PM	PH3 valve closed
9/7/2011	9:48:46 PM	SiCl4 pre valve closed
9/7/2011	9:48:46 PM	SiCl4 post valve closed
9/7/2011	9:48:46 PM	Bypass valve closed
9/7/2011	9:48:46 PM	Bubbler valve closed
9/7/2011	9:48:46 PM	Helium valve opened
9/7/2011	9:48:46 PM	Main Vac valve opened
9/7/2011	9:48:46 PM	Helium MFC set to  20.000000
9/7/2011	9:48:46 PM	H2 MFC set to  0.000000
9/7/2011	9:48:46 PM	BCl3 MFC set to  0.000000
9/7/2011	9:48:46 PM	PHl3 MFC set to  0.000000
9/7/2011	9:48:46 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:48:46 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:48:46 PM	Tube furnace set to 0
9/7/2011	9:49:16 PM	Helium valve closed
9/7/2011	9:49:16 PM	H2 valve closed
9/7/2011	9:49:17 PM	BCl3 valve closed
9/7/2011	9:49:17 PM	PH3 valve closed
9/7/2011	9:49:17 PM	SiCl4 pre valve closed
9/7/2011	9:49:17 PM	SiCl4 post valve closed
9/7/2011	9:49:17 PM	Bypass valve closed
9/7/2011	9:49:17 PM	Bubbler valve closed
9/7/2011	9:49:17 PM	Main Vac valve opened
9/7/2011	9:49:17 PM	Helium MFC set to  0.000000
9/7/2011	9:49:17 PM	H2 MFC set to  0.000000
9/7/2011	9:49:17 PM	BCl3 MFC set to  0.000000
9/7/2011	9:49:17 PM	PHl3 MFC set to  0.000000
9/7/2011	9:49:17 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:49:17 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:49:17 PM	Tube furnace set to 0
9/7/2011	9:49:47 PM	H2 valve closed
9/7/2011	9:49:47 PM	BCl3 valve closed
9/7/2011	9:49:47 PM	PH3 valve closed
9/7/2011	9:49:47 PM	SiCl4 pre valve closed
9/7/2011	9:49:47 PM	SiCl4 post valve closed
9/7/2011	9:49:47 PM	Bypass valve closed
9/7/2011	9:49:47 PM	Bubbler valve closed
9/7/2011	9:49:47 PM	Helium valve opened
9/7/2011	9:49:47 PM	Main Vac valve opened
9/7/2011	9:49:47 PM	Helium MFC set to  20.000000
9/7/2011	9:49:47 PM	H2 MFC set to  0.000000
9/7/2011	9:49:47 PM	BCl3 MFC set to  0.000000
9/7/2011	9:49:47 PM	PHl3 MFC set to  0.000000
9/7/2011	9:49:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:49:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:49:47 PM	Tube furnace set to 0
9/7/2011	9:50:17 PM	Helium valve closed
9/7/2011	9:50:17 PM	H2 valve closed
9/7/2011	9:50:17 PM	BCl3 valve closed
9/7/2011	9:50:17 PM	PH3 valve closed
9/7/2011	9:50:17 PM	SiCl4 pre valve closed
9/7/2011	9:50:17 PM	SiCl4 post valve closed
9/7/2011	9:50:17 PM	Bypass valve closed
9/7/2011	9:50:17 PM	Bubbler valve closed
9/7/2011	9:50:17 PM	Main Vac valve opened
9/7/2011	9:50:17 PM	Helium MFC set to  0.000000
9/7/2011	9:50:17 PM	H2 MFC set to  0.000000
9/7/2011	9:50:17 PM	BCl3 MFC set to  0.000000
9/7/2011	9:50:17 PM	PHl3 MFC set to  0.000000
9/7/2011	9:50:17 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:50:17 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:50:17 PM	Tube furnace set to 0
9/7/2011	9:50:47 PM	H2 valve closed
9/7/2011	9:50:47 PM	BCl3 valve closed
9/7/2011	9:50:47 PM	PH3 valve closed
9/7/2011	9:50:47 PM	SiCl4 pre valve closed
9/7/2011	9:50:47 PM	SiCl4 post valve closed
9/7/2011	9:50:47 PM	Bypass valve closed
9/7/2011	9:50:47 PM	Bubbler valve closed
9/7/2011	9:50:47 PM	Helium valve opened
9/7/2011	9:50:47 PM	Main Vac valve opened
9/7/2011	9:50:47 PM	Helium MFC set to  20.000000
9/7/2011	9:50:47 PM	H2 MFC set to  0.000000
9/7/2011	9:50:47 PM	BCl3 MFC set to  0.000000
9/7/2011	9:50:47 PM	PHl3 MFC set to  0.000000
9/7/2011	9:50:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:50:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:50:47 PM	Tube furnace set to 0
9/7/2011	9:51:17 PM	Helium valve closed
9/7/2011	9:51:17 PM	H2 valve closed
9/7/2011	9:51:17 PM	BCl3 valve closed
9/7/2011	9:51:17 PM	PH3 valve closed
9/7/2011	9:51:17 PM	SiCl4 pre valve closed
9/7/2011	9:51:17 PM	SiCl4 post valve closed
9/7/2011	9:51:17 PM	Bypass valve closed
9/7/2011	9:51:17 PM	Bubbler valve closed
9/7/2011	9:51:17 PM	Main Vac valve opened
9/7/2011	9:51:17 PM	Helium MFC set to  0.000000
9/7/2011	9:51:17 PM	H2 MFC set to  0.000000
9/7/2011	9:51:17 PM	BCl3 MFC set to  0.000000
9/7/2011	9:51:17 PM	PHl3 MFC set to  0.000000
9/7/2011	9:51:17 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:51:17 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:51:17 PM	Tube furnace set to 0
9/7/2011	9:51:47 PM	H2 valve closed
9/7/2011	9:51:47 PM	BCl3 valve closed
9/7/2011	9:51:47 PM	PH3 valve closed
9/7/2011	9:51:47 PM	SiCl4 pre valve closed
9/7/2011	9:51:47 PM	SiCl4 post valve closed
9/7/2011	9:51:47 PM	Bypass valve closed
9/7/2011	9:51:47 PM	Bubbler valve closed
9/7/2011	9:51:47 PM	Helium valve opened
9/7/2011	9:51:47 PM	Main Vac valve opened
9/7/2011	9:51:47 PM	Helium MFC set to  20.000000
9/7/2011	9:51:47 PM	H2 MFC set to  0.000000
9/7/2011	9:51:48 PM	BCl3 MFC set to  0.000000
9/7/2011	9:51:48 PM	PHl3 MFC set to  0.000000
9/7/2011	9:51:48 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:51:48 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:51:48 PM	Tube furnace set to 0
9/7/2011	9:52:18 PM	Helium valve closed
9/7/2011	9:52:18 PM	H2 valve closed
9/7/2011	9:52:18 PM	BCl3 valve closed
9/7/2011	9:52:18 PM	PH3 valve closed
9/7/2011	9:52:18 PM	SiCl4 pre valve closed
9/7/2011	9:52:18 PM	SiCl4 post valve closed
9/7/2011	9:52:18 PM	Bypass valve closed
9/7/2011	9:52:18 PM	Bubbler valve closed
9/7/2011	9:52:18 PM	Main Vac valve opened
9/7/2011	9:52:18 PM	Helium MFC set to  0.000000
9/7/2011	9:52:18 PM	H2 MFC set to  0.000000
9/7/2011	9:52:18 PM	BCl3 MFC set to  0.000000
9/7/2011	9:52:18 PM	PHl3 MFC set to  0.000000
9/7/2011	9:52:18 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:52:18 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:52:18 PM	Tube furnace set to 0
9/7/2011	9:52:48 PM	H2 valve closed
9/7/2011	9:52:48 PM	BCl3 valve closed
9/7/2011	9:52:48 PM	PH3 valve closed
9/7/2011	9:52:48 PM	SiCl4 pre valve closed
9/7/2011	9:52:48 PM	SiCl4 post valve closed
9/7/2011	9:52:48 PM	Bypass valve closed
9/7/2011	9:52:48 PM	Bubbler valve closed
9/7/2011	9:52:48 PM	Helium valve opened
9/7/2011	9:52:48 PM	Main Vac valve opened
9/7/2011	9:52:48 PM	Helium MFC set to  20.000000
9/7/2011	9:52:48 PM	H2 MFC set to  0.000000
9/7/2011	9:52:48 PM	BCl3 MFC set to  0.000000
9/7/2011	9:52:48 PM	PHl3 MFC set to  0.000000
9/7/2011	9:52:48 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:52:48 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:52:48 PM	Tube furnace set to 0
9/7/2011	9:53:18 PM	Helium valve closed
9/7/2011	9:53:18 PM	H2 valve closed
9/7/2011	9:53:18 PM	BCl3 valve closed
9/7/2011	9:53:18 PM	PH3 valve closed
9/7/2011	9:53:18 PM	SiCl4 pre valve closed
9/7/2011	9:53:18 PM	SiCl4 post valve closed
9/7/2011	9:53:18 PM	Bypass valve closed
9/7/2011	9:53:18 PM	Bubbler valve closed
9/7/2011	9:53:18 PM	Main Vac valve opened
9/7/2011	9:53:18 PM	Helium MFC set to  0.000000
9/7/2011	9:53:18 PM	H2 MFC set to  0.000000
9/7/2011	9:53:18 PM	BCl3 MFC set to  0.000000
9/7/2011	9:53:18 PM	PHl3 MFC set to  0.000000
9/7/2011	9:53:18 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:53:18 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:53:18 PM	Tube furnace set to 0
9/7/2011	9:53:19 PM	Run finished at 9:53 PM
9/7/2011	9:53:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	9:54:14 PM	Recipe started at 9:54 PM
9/7/2011	9:54:14 PM	Helium valve closed
9/7/2011	9:54:14 PM	H2 valve closed
9/7/2011	9:54:14 PM	BCl3 valve closed
9/7/2011	9:54:14 PM	PH3 valve closed
9/7/2011	9:54:14 PM	SiCl4 pre valve closed
9/7/2011	9:54:15 PM	SiCl4 post valve closed
9/7/2011	9:54:15 PM	Main Vac valve closed
9/7/2011	9:54:15 PM	Bypass valve closed
9/7/2011	9:54:15 PM	Bubbler valve closed
9/7/2011	9:54:15 PM	Helium MFC set to  0.000000
9/7/2011	9:54:15 PM	H2 MFC set to  0.000000
9/7/2011	9:54:15 PM	BCl3 MFC set to  0.000000
9/7/2011	9:54:15 PM	PHl3 MFC set to  0.000000
9/7/2011	9:54:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:54:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:54:15 PM	Tube furnace set to 0
9/7/2011	9:54:18 PM	Helium valve closed
9/7/2011	9:54:18 PM	BCl3 valve closed
9/7/2011	9:54:18 PM	PH3 valve closed
9/7/2011	9:54:18 PM	SiCl4 pre valve closed
9/7/2011	9:54:18 PM	SiCl4 post valve closed
9/7/2011	9:54:18 PM	Main Vac valve closed
9/7/2011	9:54:18 PM	Bypass valve closed
9/7/2011	9:54:18 PM	Bubbler valve closed
9/7/2011	9:54:18 PM	H2 valve opened
9/7/2011	9:54:18 PM	Helium MFC set to  0.000000
9/7/2011	9:54:18 PM	H2 MFC set to  500.000000
9/7/2011	9:54:18 PM	BCl3 MFC set to  0.000000
9/7/2011	9:54:18 PM	PHl3 MFC set to  0.000000
9/7/2011	9:54:18 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:54:18 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:54:18 PM	Tube furnace set to 0
9/7/2011	9:55:22 PM	Helium valve closed
9/7/2011	9:55:22 PM	BCl3 valve closed
9/7/2011	9:55:22 PM	PH3 valve closed
9/7/2011	9:55:22 PM	SiCl4 pre valve closed
9/7/2011	9:55:22 PM	SiCl4 post valve closed
9/7/2011	9:55:22 PM	Main Vac valve closed
9/7/2011	9:55:22 PM	Bypass valve closed
9/7/2011	9:55:22 PM	H2 valve opened
9/7/2011	9:55:22 PM	Bubbler valve opened
9/7/2011	9:55:22 PM	Helium MFC set to  0.000000
9/7/2011	9:55:22 PM	H2 MFC set to  500.000000
9/7/2011	9:55:22 PM	BCl3 MFC set to  0.000000
9/7/2011	9:55:22 PM	PHl3 MFC set to  0.000000
9/7/2011	9:55:22 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:55:22 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:55:23 PM	Tube furnace set to 0
9/7/2011	9:55:24 PM	Helium valve closed
9/7/2011	9:55:24 PM	BCl3 valve closed
9/7/2011	9:55:24 PM	PH3 valve closed
9/7/2011	9:55:24 PM	SiCl4 pre valve closed
9/7/2011	9:55:24 PM	SiCl4 post valve closed
9/7/2011	9:55:24 PM	Main Vac valve closed
9/7/2011	9:55:24 PM	Bypass valve closed
9/7/2011	9:55:24 PM	H2 valve opened
9/7/2011	9:55:24 PM	Bubbler valve opened
9/7/2011	9:55:24 PM	Helium MFC set to  0.000000
9/7/2011	9:55:24 PM	H2 MFC set to  500.000000
9/7/2011	9:55:24 PM	BCl3 MFC set to  0.000000
9/7/2011	9:55:24 PM	PHl3 MFC set to  0.000000
9/7/2011	9:55:24 PM	SiCl4 MFC set to  0.000000
9/7/2011	9:55:24 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	9:55:24 PM	Tube furnace set to 1000
9/7/2011	10:15:24 PM	Helium valve closed
9/7/2011	10:15:24 PM	PH3 valve closed
9/7/2011	10:15:24 PM	Main Vac valve closed
9/7/2011	10:15:24 PM	Bypass valve closed
9/7/2011	10:15:24 PM	H2 valve opened
9/7/2011	10:15:24 PM	BCl3 valve opened
9/7/2011	10:15:24 PM	SiCl4 pre valve opened
9/7/2011	10:15:24 PM	SiCl4 post valve opened
9/7/2011	10:15:24 PM	Bubbler valve opened
9/7/2011	10:15:24 PM	Helium MFC set to  0.000000
9/7/2011	10:15:24 PM	H2 MFC set to  500.000000
9/7/2011	10:15:24 PM	BCl3 MFC set to  2.000000
9/7/2011	10:15:24 PM	PHl3 MFC set to  0.000000
9/7/2011	10:15:24 PM	SiCl4 MFC set to  50.000000
9/7/2011	10:15:24 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	10:15:24 PM	Tube furnace set to 1000
9/7/2011	10:32:04 PM	Helium valve closed
9/7/2011	10:32:04 PM	BCl3 valve closed
9/7/2011	10:32:04 PM	PH3 valve closed
9/7/2011	10:32:04 PM	SiCl4 pre valve closed
9/7/2011	10:32:04 PM	SiCl4 post valve closed
9/7/2011	10:32:04 PM	Main Vac valve closed
9/7/2011	10:32:04 PM	Bypass valve closed
9/7/2011	10:32:04 PM	H2 valve opened
9/7/2011	10:32:04 PM	Bubbler valve opened
9/7/2011	10:32:04 PM	Helium MFC set to  0.000000
9/7/2011	10:32:04 PM	H2 MFC set to  500.000000
9/7/2011	10:32:04 PM	BCl3 MFC set to  0.000000
9/7/2011	10:32:04 PM	PHl3 MFC set to  0.000000
9/7/2011	10:32:04 PM	SiCl4 MFC set to  0.000000
9/7/2011	10:32:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	10:32:04 PM	Tube furnace set to 750
9/7/2011	10:37:04 PM	H2 valve closed
9/7/2011	10:37:04 PM	BCl3 valve closed
9/7/2011	10:37:04 PM	PH3 valve closed
9/7/2011	10:37:04 PM	SiCl4 pre valve closed
9/7/2011	10:37:04 PM	SiCl4 post valve closed
9/7/2011	10:37:04 PM	Main Vac valve closed
9/7/2011	10:37:04 PM	Bypass valve closed
9/7/2011	10:37:04 PM	Helium valve opened
9/7/2011	10:37:04 PM	Bubbler valve opened
9/7/2011	10:37:04 PM	Helium MFC set to  500.000000
9/7/2011	10:37:04 PM	H2 MFC set to  0.000000
9/7/2011	10:37:04 PM	BCl3 MFC set to  0.000000
9/7/2011	10:37:04 PM	PHl3 MFC set to  0.000000
9/7/2011	10:37:04 PM	SiCl4 MFC set to  0.000000
9/7/2011	10:37:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	10:37:04 PM	Tube furnace set to 0
9/7/2011	10:49:06 PM	Run aborted at 10:49 PM
9/7/2011	10:49:06 PM	Helium valve closed
9/7/2011	10:49:06 PM	H2 valve closed
9/7/2011	10:49:06 PM	BCl3 valve closed
9/7/2011	10:49:06 PM	PH3 valve closed
9/7/2011	10:49:06 PM	SiCl4 pre valve closed
9/7/2011	10:49:06 PM	SiCl4 post valve closed
9/7/2011	10:49:06 PM	Bypass valve closed
9/7/2011	10:49:06 PM	Main Vac valve closed
9/7/2011	10:49:06 PM	Bubbler valve closed
9/7/2011	10:49:06 PM	Helium MFC set to  0.000000
9/7/2011	10:49:06 PM	H2 MFC set to  0.000000
9/7/2011	10:49:06 PM	BCl3 MFC set to  0.000000
9/7/2011	10:49:06 PM	PHl3 MFC set to  0.000000
9/7/2011	10:49:06 PM	SiCl4 MFC set to  0.000000
9/7/2011	10:49:06 PM	Tube furnace set to 0
9/7/2011	10:53:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	10:53:19 PM	Recipe started at 10:53 PM
9/7/2011	10:53:19 PM	Helium valve closed
9/7/2011	10:53:19 PM	H2 valve closed
9/7/2011	10:53:19 PM	BCl3 valve closed
9/7/2011	10:53:19 PM	PH3 valve closed
9/7/2011	10:53:19 PM	SiCl4 pre valve closed
9/7/2011	10:53:19 PM	SiCl4 post valve closed
9/7/2011	10:53:19 PM	Main Vac valve closed
9/7/2011	10:53:19 PM	Bubbler valve closed
9/7/2011	10:53:19 PM	Bypass valve opened
9/7/2011	10:53:19 PM	Helium MFC set to  0.000000
9/7/2011	10:53:19 PM	H2 MFC set to  0.000000
9/7/2011	10:53:19 PM	BCl3 MFC set to  0.000000
9/7/2011	10:53:19 PM	PHl3 MFC set to  0.000000
9/7/2011	10:53:19 PM	SiCl4 MFC set to  0.000000
9/7/2011	10:53:19 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	10:53:19 PM	Tube furnace set to 0
9/7/2011	10:54:18 PM	Helium valve closed
9/7/2011	10:54:18 PM	H2 valve closed
9/7/2011	10:54:18 PM	BCl3 valve closed
9/7/2011	10:54:18 PM	PH3 valve closed
9/7/2011	10:54:18 PM	SiCl4 pre valve closed
9/7/2011	10:54:18 PM	SiCl4 post valve closed
9/7/2011	10:54:18 PM	Main Vac valve closed
9/7/2011	10:54:18 PM	Bubbler valve closed
9/7/2011	10:54:18 PM	Bypass valve opened
9/7/2011	10:54:18 PM	Helium MFC set to  0.000000
9/7/2011	10:54:18 PM	H2 MFC set to  0.000000
9/7/2011	10:54:18 PM	BCl3 MFC set to  0.000000
9/7/2011	10:54:18 PM	PHl3 MFC set to  0.000000
9/7/2011	10:54:18 PM	SiCl4 MFC set to  0.000000
9/7/2011	10:54:18 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	10:54:18 PM	Tube furnace set to 0
9/7/2011	10:55:18 PM	Helium valve closed
9/7/2011	10:55:18 PM	H2 valve closed
9/7/2011	10:55:18 PM	BCl3 valve closed
9/7/2011	10:55:18 PM	PH3 valve closed
9/7/2011	10:55:18 PM	SiCl4 pre valve closed
9/7/2011	10:55:18 PM	SiCl4 post valve closed
9/7/2011	10:55:18 PM	Bypass valve closed
9/7/2011	10:55:18 PM	Bubbler valve closed
9/7/2011	10:55:18 PM	Main Vac valve opened
9/7/2011	10:55:18 PM	Helium MFC set to  0.000000
9/7/2011	10:55:18 PM	H2 MFC set to  0.000000
9/7/2011	10:55:18 PM	BCl3 MFC set to  0.000000
9/7/2011	10:55:18 PM	PHl3 MFC set to  0.000000
9/7/2011	10:55:18 PM	SiCl4 MFC set to  0.000000
9/7/2011	10:55:18 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	10:55:18 PM	Tube furnace set to 0
9/7/2011	10:55:19 PM	Run finished at 10:55 PM
9/7/2011	10:55:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	11:04:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	11:04:11 PM	Recipe started at 11:04 PM
9/7/2011	11:04:11 PM	Helium valve closed
9/7/2011	11:04:11 PM	H2 valve closed
9/7/2011	11:04:11 PM	BCl3 valve closed
9/7/2011	11:04:11 PM	PH3 valve closed
9/7/2011	11:04:11 PM	SiCl4 pre valve closed
9/7/2011	11:04:11 PM	SiCl4 post valve closed
9/7/2011	11:04:11 PM	Main Vac valve closed
9/7/2011	11:04:11 PM	Bypass valve closed
9/7/2011	11:04:11 PM	Bubbler valve closed
9/7/2011	11:04:11 PM	Helium MFC set to  0.000000
9/7/2011	11:04:11 PM	H2 MFC set to  0.000000
9/7/2011	11:04:11 PM	BCl3 MFC set to  0.000000
9/7/2011	11:04:11 PM	PHl3 MFC set to  0.000000
9/7/2011	11:04:11 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:04:11 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:04:12 PM	Tube furnace set to 0
9/7/2011	11:04:15 PM	H2 valve closed
9/7/2011	11:04:15 PM	BCl3 valve closed
9/7/2011	11:04:15 PM	PH3 valve closed
9/7/2011	11:04:15 PM	SiCl4 pre valve closed
9/7/2011	11:04:15 PM	SiCl4 post valve closed
9/7/2011	11:04:15 PM	Main Vac valve closed
9/7/2011	11:04:15 PM	Bypass valve closed
9/7/2011	11:04:15 PM	Bubbler valve closed
9/7/2011	11:04:15 PM	Helium valve opened
9/7/2011	11:04:15 PM	Helium MFC set to  500.000000
9/7/2011	11:04:15 PM	H2 MFC set to  0.000000
9/7/2011	11:04:15 PM	BCl3 MFC set to  0.000000
9/7/2011	11:04:15 PM	PHl3 MFC set to  0.000000
9/7/2011	11:04:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:04:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:04:15 PM	Tube furnace set to 0
9/7/2011	11:04:58 PM	Helium valve closed
9/7/2011	11:04:58 PM	H2 valve closed
9/7/2011	11:04:58 PM	BCl3 valve closed
9/7/2011	11:04:58 PM	PH3 valve closed
9/7/2011	11:04:58 PM	SiCl4 pre valve closed
9/7/2011	11:04:58 PM	SiCl4 post valve closed
9/7/2011	11:04:58 PM	Main Vac valve closed
9/7/2011	11:04:58 PM	Bypass valve closed
9/7/2011	11:04:58 PM	Bubbler valve closed
9/7/2011	11:04:58 PM	Helium MFC set to  0.000000
9/7/2011	11:04:58 PM	H2 MFC set to  0.000000
9/7/2011	11:04:58 PM	BCl3 MFC set to  0.000000
9/7/2011	11:04:58 PM	PHl3 MFC set to  0.000000
9/7/2011	11:04:58 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:04:58 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:04:58 PM	Tube furnace set to 0
9/7/2011	11:04:59 PM	Run finished at 11:04 PM
9/7/2011	11:04:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2011	11:14:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	11:14:15 PM	Recipe started at 11:14 PM
9/7/2011	11:14:15 PM	Helium valve closed
9/7/2011	11:14:15 PM	H2 valve closed
9/7/2011	11:14:15 PM	BCl3 valve closed
9/7/2011	11:14:15 PM	PH3 valve closed
9/7/2011	11:14:15 PM	SiCl4 pre valve closed
9/7/2011	11:14:15 PM	SiCl4 post valve closed
9/7/2011	11:14:15 PM	Main Vac valve closed
9/7/2011	11:14:15 PM	Bubbler valve closed
9/7/2011	11:14:15 PM	Bypass valve opened
9/7/2011	11:14:15 PM	Helium MFC set to  0.000000
9/7/2011	11:14:15 PM	H2 MFC set to  0.000000
9/7/2011	11:14:15 PM	BCl3 MFC set to  0.000000
9/7/2011	11:14:15 PM	PHl3 MFC set to  0.000000
9/7/2011	11:14:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:14:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:14:15 PM	Tube furnace set to 0
9/7/2011	11:15:26 PM	Helium valve closed
9/7/2011	11:15:26 PM	H2 valve closed
9/7/2011	11:15:26 PM	BCl3 valve closed
9/7/2011	11:15:26 PM	PH3 valve closed
9/7/2011	11:15:26 PM	SiCl4 pre valve closed
9/7/2011	11:15:26 PM	SiCl4 post valve closed
9/7/2011	11:15:26 PM	Main Vac valve closed
9/7/2011	11:15:26 PM	Bubbler valve closed
9/7/2011	11:15:26 PM	Bypass valve opened
9/7/2011	11:15:26 PM	Helium MFC set to  0.000000
9/7/2011	11:15:26 PM	H2 MFC set to  0.000000
9/7/2011	11:15:26 PM	BCl3 MFC set to  0.000000
9/7/2011	11:15:26 PM	PHl3 MFC set to  0.000000
9/7/2011	11:15:26 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:15:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:15:26 PM	Tube furnace set to 0
9/7/2011	11:16:26 PM	Helium valve closed
9/7/2011	11:16:26 PM	H2 valve closed
9/7/2011	11:16:26 PM	BCl3 valve closed
9/7/2011	11:16:26 PM	PH3 valve closed
9/7/2011	11:16:26 PM	SiCl4 pre valve closed
9/7/2011	11:16:26 PM	SiCl4 post valve closed
9/7/2011	11:16:26 PM	Bypass valve closed
9/7/2011	11:16:26 PM	Bubbler valve closed
9/7/2011	11:16:26 PM	Main Vac valve opened
9/7/2011	11:16:26 PM	Helium MFC set to  0.000000
9/7/2011	11:16:26 PM	H2 MFC set to  0.000000
9/7/2011	11:16:26 PM	BCl3 MFC set to  0.000000
9/7/2011	11:16:26 PM	PHl3 MFC set to  0.000000
9/7/2011	11:16:26 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:16:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:16:26 PM	Tube furnace set to 0
9/7/2011	11:16:27 PM	Run finished at 11:16 PM
9/7/2011	11:16:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2011	11:45:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	11:45:13 PM	Recipe started at 11:45 PM
9/7/2011	11:45:13 PM	Helium valve closed
9/7/2011	11:45:13 PM	H2 valve closed
9/7/2011	11:45:13 PM	BCl3 valve closed
9/7/2011	11:45:13 PM	PH3 valve closed
9/7/2011	11:45:13 PM	SiCl4 pre valve closed
9/7/2011	11:45:13 PM	SiCl4 post valve closed
9/7/2011	11:45:13 PM	Main Vac valve closed
9/7/2011	11:45:13 PM	Bubbler valve closed
9/7/2011	11:45:13 PM	Bypass valve opened
9/7/2011	11:45:13 PM	Helium MFC set to  0.000000
9/7/2011	11:45:13 PM	H2 MFC set to  0.000000
9/7/2011	11:45:13 PM	BCl3 MFC set to  0.000000
9/7/2011	11:45:13 PM	PHl3 MFC set to  0.000000
9/7/2011	11:45:13 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:45:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:45:13 PM	Tube furnace set to 0
9/7/2011	11:45:13 PM	Helium valve closed
9/7/2011	11:45:13 PM	H2 valve closed
9/7/2011	11:45:13 PM	BCl3 valve closed
9/7/2011	11:45:13 PM	PH3 valve closed
9/7/2011	11:45:13 PM	SiCl4 pre valve closed
9/7/2011	11:45:13 PM	SiCl4 post valve closed
9/7/2011	11:45:13 PM	Main Vac valve closed
9/7/2011	11:45:13 PM	Bubbler valve closed
9/7/2011	11:45:13 PM	Bypass valve opened
9/7/2011	11:45:13 PM	Helium MFC set to  0.000000
9/7/2011	11:45:13 PM	H2 MFC set to  0.000000
9/7/2011	11:45:13 PM	BCl3 MFC set to  0.000000
9/7/2011	11:45:13 PM	PHl3 MFC set to  0.000000
9/7/2011	11:45:13 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:45:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:45:14 PM	Tube furnace set to 0
9/7/2011	11:45:44 PM	Helium valve closed
9/7/2011	11:45:44 PM	H2 valve closed
9/7/2011	11:45:44 PM	BCl3 valve closed
9/7/2011	11:45:44 PM	PH3 valve closed
9/7/2011	11:45:44 PM	SiCl4 pre valve closed
9/7/2011	11:45:44 PM	SiCl4 post valve closed
9/7/2011	11:45:44 PM	Bypass valve closed
9/7/2011	11:45:44 PM	Bubbler valve closed
9/7/2011	11:45:44 PM	Main Vac valve opened
9/7/2011	11:45:44 PM	Helium MFC set to  0.000000
9/7/2011	11:45:44 PM	H2 MFC set to  0.000000
9/7/2011	11:45:44 PM	BCl3 MFC set to  0.000000
9/7/2011	11:45:44 PM	PHl3 MFC set to  0.000000
9/7/2011	11:45:44 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:45:44 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:45:44 PM	Tube furnace set to 0
9/7/2011	11:46:14 PM	H2 valve closed
9/7/2011	11:46:14 PM	BCl3 valve closed
9/7/2011	11:46:14 PM	PH3 valve closed
9/7/2011	11:46:14 PM	SiCl4 pre valve closed
9/7/2011	11:46:14 PM	SiCl4 post valve closed
9/7/2011	11:46:14 PM	Bypass valve closed
9/7/2011	11:46:14 PM	Bubbler valve closed
9/7/2011	11:46:14 PM	Helium valve opened
9/7/2011	11:46:14 PM	Main Vac valve opened
9/7/2011	11:46:14 PM	Helium MFC set to  20.000000
9/7/2011	11:46:14 PM	H2 MFC set to  0.000000
9/7/2011	11:46:14 PM	BCl3 MFC set to  0.000000
9/7/2011	11:46:14 PM	PHl3 MFC set to  0.000000
9/7/2011	11:46:14 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:46:14 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:46:14 PM	Tube furnace set to 0
9/7/2011	11:46:44 PM	Helium valve closed
9/7/2011	11:46:44 PM	H2 valve closed
9/7/2011	11:46:44 PM	BCl3 valve closed
9/7/2011	11:46:44 PM	PH3 valve closed
9/7/2011	11:46:44 PM	SiCl4 pre valve closed
9/7/2011	11:46:44 PM	SiCl4 post valve closed
9/7/2011	11:46:44 PM	Bypass valve closed
9/7/2011	11:46:44 PM	Bubbler valve closed
9/7/2011	11:46:44 PM	Main Vac valve opened
9/7/2011	11:46:44 PM	Helium MFC set to  0.000000
9/7/2011	11:46:44 PM	H2 MFC set to  0.000000
9/7/2011	11:46:44 PM	BCl3 MFC set to  0.000000
9/7/2011	11:46:44 PM	PHl3 MFC set to  0.000000
9/7/2011	11:46:44 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:46:44 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:46:44 PM	Tube furnace set to 0
9/7/2011	11:47:14 PM	H2 valve closed
9/7/2011	11:47:14 PM	BCl3 valve closed
9/7/2011	11:47:14 PM	PH3 valve closed
9/7/2011	11:47:14 PM	SiCl4 pre valve closed
9/7/2011	11:47:14 PM	SiCl4 post valve closed
9/7/2011	11:47:14 PM	Bypass valve closed
9/7/2011	11:47:14 PM	Bubbler valve closed
9/7/2011	11:47:14 PM	Helium valve opened
9/7/2011	11:47:14 PM	Main Vac valve opened
9/7/2011	11:47:14 PM	Helium MFC set to  20.000000
9/7/2011	11:47:14 PM	H2 MFC set to  0.000000
9/7/2011	11:47:14 PM	BCl3 MFC set to  0.000000
9/7/2011	11:47:14 PM	PHl3 MFC set to  0.000000
9/7/2011	11:47:14 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:47:14 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:47:14 PM	Tube furnace set to 0
9/7/2011	11:47:44 PM	Helium valve closed
9/7/2011	11:47:44 PM	H2 valve closed
9/7/2011	11:47:44 PM	BCl3 valve closed
9/7/2011	11:47:44 PM	PH3 valve closed
9/7/2011	11:47:44 PM	SiCl4 pre valve closed
9/7/2011	11:47:44 PM	SiCl4 post valve closed
9/7/2011	11:47:44 PM	Bypass valve closed
9/7/2011	11:47:44 PM	Bubbler valve closed
9/7/2011	11:47:44 PM	Main Vac valve opened
9/7/2011	11:47:44 PM	Helium MFC set to  0.000000
9/7/2011	11:47:44 PM	H2 MFC set to  0.000000
9/7/2011	11:47:44 PM	BCl3 MFC set to  0.000000
9/7/2011	11:47:44 PM	PHl3 MFC set to  0.000000
9/7/2011	11:47:44 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:47:44 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:47:45 PM	Tube furnace set to 0
9/7/2011	11:48:15 PM	H2 valve closed
9/7/2011	11:48:15 PM	BCl3 valve closed
9/7/2011	11:48:15 PM	PH3 valve closed
9/7/2011	11:48:15 PM	SiCl4 pre valve closed
9/7/2011	11:48:15 PM	SiCl4 post valve closed
9/7/2011	11:48:15 PM	Bypass valve closed
9/7/2011	11:48:15 PM	Bubbler valve closed
9/7/2011	11:48:15 PM	Helium valve opened
9/7/2011	11:48:15 PM	Main Vac valve opened
9/7/2011	11:48:15 PM	Helium MFC set to  20.000000
9/7/2011	11:48:15 PM	H2 MFC set to  0.000000
9/7/2011	11:48:15 PM	BCl3 MFC set to  0.000000
9/7/2011	11:48:15 PM	PHl3 MFC set to  0.000000
9/7/2011	11:48:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:48:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:48:15 PM	Tube furnace set to 0
9/7/2011	11:48:45 PM	Helium valve closed
9/7/2011	11:48:45 PM	H2 valve closed
9/7/2011	11:48:45 PM	BCl3 valve closed
9/7/2011	11:48:45 PM	PH3 valve closed
9/7/2011	11:48:45 PM	SiCl4 pre valve closed
9/7/2011	11:48:45 PM	SiCl4 post valve closed
9/7/2011	11:48:45 PM	Bypass valve closed
9/7/2011	11:48:45 PM	Bubbler valve closed
9/7/2011	11:48:45 PM	Main Vac valve opened
9/7/2011	11:48:45 PM	Helium MFC set to  0.000000
9/7/2011	11:48:45 PM	H2 MFC set to  0.000000
9/7/2011	11:48:45 PM	BCl3 MFC set to  0.000000
9/7/2011	11:48:45 PM	PHl3 MFC set to  0.000000
9/7/2011	11:48:45 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:48:45 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:48:45 PM	Tube furnace set to 0
9/7/2011	11:49:15 PM	H2 valve closed
9/7/2011	11:49:15 PM	BCl3 valve closed
9/7/2011	11:49:15 PM	PH3 valve closed
9/7/2011	11:49:15 PM	SiCl4 pre valve closed
9/7/2011	11:49:15 PM	SiCl4 post valve closed
9/7/2011	11:49:15 PM	Bypass valve closed
9/7/2011	11:49:15 PM	Bubbler valve closed
9/7/2011	11:49:15 PM	Helium valve opened
9/7/2011	11:49:15 PM	Main Vac valve opened
9/7/2011	11:49:15 PM	Helium MFC set to  20.000000
9/7/2011	11:49:15 PM	H2 MFC set to  0.000000
9/7/2011	11:49:15 PM	BCl3 MFC set to  0.000000
9/7/2011	11:49:15 PM	PHl3 MFC set to  0.000000
9/7/2011	11:49:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:49:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:49:15 PM	Tube furnace set to 0
9/7/2011	11:49:45 PM	Helium valve closed
9/7/2011	11:49:45 PM	H2 valve closed
9/7/2011	11:49:45 PM	BCl3 valve closed
9/7/2011	11:49:45 PM	PH3 valve closed
9/7/2011	11:49:45 PM	SiCl4 pre valve closed
9/7/2011	11:49:45 PM	SiCl4 post valve closed
9/7/2011	11:49:45 PM	Bypass valve closed
9/7/2011	11:49:45 PM	Bubbler valve closed
9/7/2011	11:49:45 PM	Main Vac valve opened
9/7/2011	11:49:45 PM	Helium MFC set to  0.000000
9/7/2011	11:49:45 PM	H2 MFC set to  0.000000
9/7/2011	11:49:45 PM	BCl3 MFC set to  0.000000
9/7/2011	11:49:45 PM	PHl3 MFC set to  0.000000
9/7/2011	11:49:45 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:49:45 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:49:45 PM	Tube furnace set to 0
9/7/2011	11:50:15 PM	H2 valve closed
9/7/2011	11:50:15 PM	BCl3 valve closed
9/7/2011	11:50:15 PM	PH3 valve closed
9/7/2011	11:50:15 PM	SiCl4 pre valve closed
9/7/2011	11:50:15 PM	SiCl4 post valve closed
9/7/2011	11:50:15 PM	Bypass valve closed
9/7/2011	11:50:15 PM	Bubbler valve closed
9/7/2011	11:50:15 PM	Helium valve opened
9/7/2011	11:50:15 PM	Main Vac valve opened
9/7/2011	11:50:15 PM	Helium MFC set to  20.000000
9/7/2011	11:50:15 PM	H2 MFC set to  0.000000
9/7/2011	11:50:15 PM	BCl3 MFC set to  0.000000
9/7/2011	11:50:15 PM	PHl3 MFC set to  0.000000
9/7/2011	11:50:15 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:50:15 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:50:16 PM	Tube furnace set to 0
9/7/2011	11:50:46 PM	Helium valve closed
9/7/2011	11:50:46 PM	H2 valve closed
9/7/2011	11:50:46 PM	BCl3 valve closed
9/7/2011	11:50:46 PM	PH3 valve closed
9/7/2011	11:50:46 PM	SiCl4 pre valve closed
9/7/2011	11:50:46 PM	SiCl4 post valve closed
9/7/2011	11:50:46 PM	Bypass valve closed
9/7/2011	11:50:46 PM	Bubbler valve closed
9/7/2011	11:50:46 PM	Main Vac valve opened
9/7/2011	11:50:46 PM	Helium MFC set to  0.000000
9/7/2011	11:50:46 PM	H2 MFC set to  0.000000
9/7/2011	11:50:46 PM	BCl3 MFC set to  0.000000
9/7/2011	11:50:46 PM	PHl3 MFC set to  0.000000
9/7/2011	11:50:46 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:50:46 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:50:46 PM	Tube furnace set to 0
9/7/2011	11:51:16 PM	H2 valve closed
9/7/2011	11:51:16 PM	BCl3 valve closed
9/7/2011	11:51:16 PM	PH3 valve closed
9/7/2011	11:51:16 PM	SiCl4 pre valve closed
9/7/2011	11:51:16 PM	SiCl4 post valve closed
9/7/2011	11:51:16 PM	Bypass valve closed
9/7/2011	11:51:16 PM	Bubbler valve closed
9/7/2011	11:51:16 PM	Helium valve opened
9/7/2011	11:51:16 PM	Main Vac valve opened
9/7/2011	11:51:16 PM	Helium MFC set to  20.000000
9/7/2011	11:51:16 PM	H2 MFC set to  0.000000
9/7/2011	11:51:16 PM	BCl3 MFC set to  0.000000
9/7/2011	11:51:16 PM	PHl3 MFC set to  0.000000
9/7/2011	11:51:16 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:51:16 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:51:16 PM	Tube furnace set to 0
9/7/2011	11:51:46 PM	Helium valve closed
9/7/2011	11:51:46 PM	H2 valve closed
9/7/2011	11:51:46 PM	BCl3 valve closed
9/7/2011	11:51:46 PM	PH3 valve closed
9/7/2011	11:51:46 PM	SiCl4 pre valve closed
9/7/2011	11:51:46 PM	SiCl4 post valve closed
9/7/2011	11:51:46 PM	Bypass valve closed
9/7/2011	11:51:46 PM	Bubbler valve closed
9/7/2011	11:51:46 PM	Main Vac valve opened
9/7/2011	11:51:46 PM	Helium MFC set to  0.000000
9/7/2011	11:51:46 PM	H2 MFC set to  0.000000
9/7/2011	11:51:46 PM	BCl3 MFC set to  0.000000
9/7/2011	11:51:46 PM	PHl3 MFC set to  0.000000
9/7/2011	11:51:46 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:51:46 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:51:46 PM	Tube furnace set to 0
9/7/2011	11:52:16 PM	H2 valve closed
9/7/2011	11:52:16 PM	BCl3 valve closed
9/7/2011	11:52:16 PM	PH3 valve closed
9/7/2011	11:52:16 PM	SiCl4 pre valve closed
9/7/2011	11:52:16 PM	SiCl4 post valve closed
9/7/2011	11:52:16 PM	Bypass valve closed
9/7/2011	11:52:16 PM	Bubbler valve closed
9/7/2011	11:52:16 PM	Helium valve opened
9/7/2011	11:52:16 PM	Main Vac valve opened
9/7/2011	11:52:16 PM	Helium MFC set to  20.000000
9/7/2011	11:52:16 PM	H2 MFC set to  0.000000
9/7/2011	11:52:16 PM	BCl3 MFC set to  0.000000
9/7/2011	11:52:16 PM	PHl3 MFC set to  0.000000
9/7/2011	11:52:16 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:52:16 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:52:16 PM	Tube furnace set to 0
9/7/2011	11:52:46 PM	Helium valve closed
9/7/2011	11:52:46 PM	H2 valve closed
9/7/2011	11:52:46 PM	BCl3 valve closed
9/7/2011	11:52:46 PM	PH3 valve closed
9/7/2011	11:52:46 PM	SiCl4 pre valve closed
9/7/2011	11:52:46 PM	SiCl4 post valve closed
9/7/2011	11:52:46 PM	Bypass valve closed
9/7/2011	11:52:46 PM	Bubbler valve closed
9/7/2011	11:52:46 PM	Main Vac valve opened
9/7/2011	11:52:46 PM	Helium MFC set to  0.000000
9/7/2011	11:52:46 PM	H2 MFC set to  0.000000
9/7/2011	11:52:46 PM	BCl3 MFC set to  0.000000
9/7/2011	11:52:46 PM	PHl3 MFC set to  0.000000
9/7/2011	11:52:46 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:52:46 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:52:46 PM	Tube furnace set to 0
9/7/2011	11:53:17 PM	H2 valve closed
9/7/2011	11:53:17 PM	BCl3 valve closed
9/7/2011	11:53:17 PM	PH3 valve closed
9/7/2011	11:53:17 PM	SiCl4 pre valve closed
9/7/2011	11:53:17 PM	SiCl4 post valve closed
9/7/2011	11:53:17 PM	Bypass valve closed
9/7/2011	11:53:17 PM	Bubbler valve closed
9/7/2011	11:53:17 PM	Helium valve opened
9/7/2011	11:53:17 PM	Main Vac valve opened
9/7/2011	11:53:17 PM	Helium MFC set to  20.000000
9/7/2011	11:53:17 PM	H2 MFC set to  0.000000
9/7/2011	11:53:17 PM	BCl3 MFC set to  0.000000
9/7/2011	11:53:17 PM	PHl3 MFC set to  0.000000
9/7/2011	11:53:17 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:53:17 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:53:17 PM	Tube furnace set to 0
9/7/2011	11:53:47 PM	Helium valve closed
9/7/2011	11:53:47 PM	H2 valve closed
9/7/2011	11:53:47 PM	BCl3 valve closed
9/7/2011	11:53:47 PM	PH3 valve closed
9/7/2011	11:53:47 PM	SiCl4 pre valve closed
9/7/2011	11:53:47 PM	SiCl4 post valve closed
9/7/2011	11:53:47 PM	Bypass valve closed
9/7/2011	11:53:47 PM	Bubbler valve closed
9/7/2011	11:53:47 PM	Main Vac valve opened
9/7/2011	11:53:47 PM	Helium MFC set to  0.000000
9/7/2011	11:53:47 PM	H2 MFC set to  0.000000
9/7/2011	11:53:47 PM	BCl3 MFC set to  0.000000
9/7/2011	11:53:47 PM	PHl3 MFC set to  0.000000
9/7/2011	11:53:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:53:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:53:47 PM	Tube furnace set to 0
9/7/2011	11:54:17 PM	H2 valve closed
9/7/2011	11:54:17 PM	BCl3 valve closed
9/7/2011	11:54:17 PM	PH3 valve closed
9/7/2011	11:54:17 PM	SiCl4 pre valve closed
9/7/2011	11:54:17 PM	SiCl4 post valve closed
9/7/2011	11:54:17 PM	Bypass valve closed
9/7/2011	11:54:17 PM	Bubbler valve closed
9/7/2011	11:54:17 PM	Helium valve opened
9/7/2011	11:54:17 PM	Main Vac valve opened
9/7/2011	11:54:17 PM	Helium MFC set to  20.000000
9/7/2011	11:54:17 PM	H2 MFC set to  0.000000
9/7/2011	11:54:17 PM	BCl3 MFC set to  0.000000
9/7/2011	11:54:17 PM	PHl3 MFC set to  0.000000
9/7/2011	11:54:17 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:54:17 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:54:17 PM	Tube furnace set to 0
9/7/2011	11:54:47 PM	Helium valve closed
9/7/2011	11:54:47 PM	H2 valve closed
9/7/2011	11:54:47 PM	BCl3 valve closed
9/7/2011	11:54:47 PM	PH3 valve closed
9/7/2011	11:54:47 PM	SiCl4 pre valve closed
9/7/2011	11:54:47 PM	SiCl4 post valve closed
9/7/2011	11:54:47 PM	Bypass valve closed
9/7/2011	11:54:47 PM	Bubbler valve closed
9/7/2011	11:54:47 PM	Main Vac valve opened
9/7/2011	11:54:47 PM	Helium MFC set to  0.000000
9/7/2011	11:54:47 PM	H2 MFC set to  0.000000
9/7/2011	11:54:47 PM	BCl3 MFC set to  0.000000
9/7/2011	11:54:47 PM	PHl3 MFC set to  0.000000
9/7/2011	11:54:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:54:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:54:47 PM	Tube furnace set to 0
9/7/2011	11:55:17 PM	H2 valve closed
9/7/2011	11:55:17 PM	BCl3 valve closed
9/7/2011	11:55:17 PM	PH3 valve closed
9/7/2011	11:55:17 PM	SiCl4 pre valve closed
9/7/2011	11:55:17 PM	SiCl4 post valve closed
9/7/2011	11:55:17 PM	Bypass valve closed
9/7/2011	11:55:17 PM	Bubbler valve closed
9/7/2011	11:55:17 PM	Helium valve opened
9/7/2011	11:55:17 PM	Main Vac valve opened
9/7/2011	11:55:17 PM	Helium MFC set to  20.000000
9/7/2011	11:55:17 PM	H2 MFC set to  0.000000
9/7/2011	11:55:17 PM	BCl3 MFC set to  0.000000
9/7/2011	11:55:17 PM	PHl3 MFC set to  0.000000
9/7/2011	11:55:17 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:55:17 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:55:18 PM	Tube furnace set to 0
9/7/2011	11:55:48 PM	Helium valve closed
9/7/2011	11:55:48 PM	H2 valve closed
9/7/2011	11:55:48 PM	BCl3 valve closed
9/7/2011	11:55:48 PM	PH3 valve closed
9/7/2011	11:55:48 PM	SiCl4 pre valve closed
9/7/2011	11:55:48 PM	SiCl4 post valve closed
9/7/2011	11:55:48 PM	Bypass valve closed
9/7/2011	11:55:48 PM	Bubbler valve closed
9/7/2011	11:55:48 PM	Main Vac valve opened
9/7/2011	11:55:48 PM	Helium MFC set to  0.000000
9/7/2011	11:55:48 PM	H2 MFC set to  0.000000
9/7/2011	11:55:48 PM	BCl3 MFC set to  0.000000
9/7/2011	11:55:48 PM	PHl3 MFC set to  0.000000
9/7/2011	11:55:48 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:55:48 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:55:48 PM	Tube furnace set to 0
9/7/2011	11:55:49 PM	Run finished at 11:55 PM
9/7/2011	11:55:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	11:56:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/7/2011	11:56:47 PM	Recipe started at 11:56 PM
9/7/2011	11:56:47 PM	Helium valve closed
9/7/2011	11:56:47 PM	H2 valve closed
9/7/2011	11:56:47 PM	BCl3 valve closed
9/7/2011	11:56:47 PM	PH3 valve closed
9/7/2011	11:56:47 PM	SiCl4 pre valve closed
9/7/2011	11:56:47 PM	SiCl4 post valve closed
9/7/2011	11:56:47 PM	Main Vac valve closed
9/7/2011	11:56:47 PM	Bubbler valve closed
9/7/2011	11:56:47 PM	Bypass valve opened
9/7/2011	11:56:47 PM	Helium MFC set to  0.000000
9/7/2011	11:56:47 PM	H2 MFC set to  0.000000
9/7/2011	11:56:47 PM	BCl3 MFC set to  0.000000
9/7/2011	11:56:47 PM	PHl3 MFC set to  0.000000
9/7/2011	11:56:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:56:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:56:47 PM	Tube furnace set to 0
9/7/2011	11:56:47 PM	Helium valve closed
9/7/2011	11:56:47 PM	H2 valve closed
9/7/2011	11:56:47 PM	BCl3 valve closed
9/7/2011	11:56:47 PM	PH3 valve closed
9/7/2011	11:56:47 PM	SiCl4 pre valve closed
9/7/2011	11:56:47 PM	SiCl4 post valve closed
9/7/2011	11:56:47 PM	Main Vac valve closed
9/7/2011	11:56:47 PM	Bubbler valve closed
9/7/2011	11:56:47 PM	Bypass valve opened
9/7/2011	11:56:47 PM	Helium MFC set to  0.000000
9/7/2011	11:56:47 PM	H2 MFC set to  0.000000
9/7/2011	11:56:47 PM	BCl3 MFC set to  0.000000
9/7/2011	11:56:47 PM	PHl3 MFC set to  0.000000
9/7/2011	11:56:47 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:56:47 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:56:47 PM	Tube furnace set to 0
9/7/2011	11:57:17 PM	Helium valve closed
9/7/2011	11:57:17 PM	H2 valve closed
9/7/2011	11:57:17 PM	BCl3 valve closed
9/7/2011	11:57:17 PM	PH3 valve closed
9/7/2011	11:57:17 PM	SiCl4 pre valve closed
9/7/2011	11:57:17 PM	SiCl4 post valve closed
9/7/2011	11:57:17 PM	Bypass valve closed
9/7/2011	11:57:17 PM	Bubbler valve closed
9/7/2011	11:57:17 PM	Main Vac valve opened
9/7/2011	11:57:17 PM	Helium MFC set to  0.000000
9/7/2011	11:57:17 PM	H2 MFC set to  0.000000
9/7/2011	11:57:17 PM	BCl3 MFC set to  0.000000
9/7/2011	11:57:17 PM	PHl3 MFC set to  0.000000
9/7/2011	11:57:17 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:57:17 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:57:18 PM	Tube furnace set to 0
9/7/2011	11:57:48 PM	H2 valve closed
9/7/2011	11:57:48 PM	BCl3 valve closed
9/7/2011	11:57:48 PM	PH3 valve closed
9/7/2011	11:57:48 PM	SiCl4 pre valve closed
9/7/2011	11:57:48 PM	SiCl4 post valve closed
9/7/2011	11:57:48 PM	Bypass valve closed
9/7/2011	11:57:48 PM	Bubbler valve closed
9/7/2011	11:57:48 PM	Helium valve opened
9/7/2011	11:57:48 PM	Main Vac valve opened
9/7/2011	11:57:48 PM	Helium MFC set to  20.000000
9/7/2011	11:57:48 PM	H2 MFC set to  0.000000
9/7/2011	11:57:48 PM	BCl3 MFC set to  0.000000
9/7/2011	11:57:48 PM	PHl3 MFC set to  0.000000
9/7/2011	11:57:48 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:57:48 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:57:48 PM	Tube furnace set to 0
9/7/2011	11:58:18 PM	Helium valve closed
9/7/2011	11:58:18 PM	H2 valve closed
9/7/2011	11:58:18 PM	BCl3 valve closed
9/7/2011	11:58:18 PM	PH3 valve closed
9/7/2011	11:58:18 PM	SiCl4 pre valve closed
9/7/2011	11:58:18 PM	SiCl4 post valve closed
9/7/2011	11:58:18 PM	Bypass valve closed
9/7/2011	11:58:18 PM	Bubbler valve closed
9/7/2011	11:58:18 PM	Main Vac valve opened
9/7/2011	11:58:18 PM	Helium MFC set to  0.000000
9/7/2011	11:58:18 PM	H2 MFC set to  0.000000
9/7/2011	11:58:18 PM	BCl3 MFC set to  0.000000
9/7/2011	11:58:18 PM	PHl3 MFC set to  0.000000
9/7/2011	11:58:18 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:58:18 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:58:18 PM	Tube furnace set to 0
9/7/2011	11:58:48 PM	H2 valve closed
9/7/2011	11:58:48 PM	BCl3 valve closed
9/7/2011	11:58:48 PM	PH3 valve closed
9/7/2011	11:58:48 PM	SiCl4 pre valve closed
9/7/2011	11:58:48 PM	SiCl4 post valve closed
9/7/2011	11:58:48 PM	Bypass valve closed
9/7/2011	11:58:48 PM	Bubbler valve closed
9/7/2011	11:58:48 PM	Helium valve opened
9/7/2011	11:58:48 PM	Main Vac valve opened
9/7/2011	11:58:48 PM	Helium MFC set to  20.000000
9/7/2011	11:58:48 PM	H2 MFC set to  0.000000
9/7/2011	11:58:48 PM	BCl3 MFC set to  0.000000
9/7/2011	11:58:48 PM	PHl3 MFC set to  0.000000
9/7/2011	11:58:48 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:58:48 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:58:48 PM	Tube furnace set to 0
9/7/2011	11:59:18 PM	Helium valve closed
9/7/2011	11:59:18 PM	H2 valve closed
9/7/2011	11:59:18 PM	BCl3 valve closed
9/7/2011	11:59:18 PM	PH3 valve closed
9/7/2011	11:59:18 PM	SiCl4 pre valve closed
9/7/2011	11:59:18 PM	SiCl4 post valve closed
9/7/2011	11:59:18 PM	Bypass valve closed
9/7/2011	11:59:18 PM	Bubbler valve closed
9/7/2011	11:59:18 PM	Main Vac valve opened
9/7/2011	11:59:18 PM	Helium MFC set to  0.000000
9/7/2011	11:59:18 PM	H2 MFC set to  0.000000
9/7/2011	11:59:18 PM	BCl3 MFC set to  0.000000
9/7/2011	11:59:18 PM	PHl3 MFC set to  0.000000
9/7/2011	11:59:18 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:59:18 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:59:18 PM	Tube furnace set to 0
9/7/2011	11:59:48 PM	H2 valve closed
9/7/2011	11:59:48 PM	BCl3 valve closed
9/7/2011	11:59:48 PM	PH3 valve closed
9/7/2011	11:59:48 PM	SiCl4 pre valve closed
9/7/2011	11:59:48 PM	SiCl4 post valve closed
9/7/2011	11:59:48 PM	Bypass valve closed
9/7/2011	11:59:48 PM	Bubbler valve closed
9/7/2011	11:59:48 PM	Helium valve opened
9/7/2011	11:59:48 PM	Main Vac valve opened
9/7/2011	11:59:48 PM	Helium MFC set to  20.000000
9/7/2011	11:59:48 PM	H2 MFC set to  0.000000
9/7/2011	11:59:48 PM	BCl3 MFC set to  0.000000
9/7/2011	11:59:48 PM	PHl3 MFC set to  0.000000
9/7/2011	11:59:48 PM	SiCl4 MFC set to  0.000000
9/7/2011	11:59:48 PM	Bypass solenoid MFC set to  0.000000
9/7/2011	11:59:49 PM	Tube furnace set to 0
